Power of Attorney

The undersigned, as a Section 16 reporting
person of Rudolph Technologies, Inc.
(the "Company"), hereby constitutes and
appoints Steven Roth, Robert Koch and
Stephanie Spivack, and each of them, the
undersigned's true and lawful attorney-in-fact to:

a. complete and execute Forms 3, 4, and 5 and
other forms and all amendments thereto as such
attorney-in-fact shall in his or her discretion
determine to be required or advisable pursuant to
Section 16 of the Securities Exchange Act of 1934
(as amended) and the rules and regulations
promulgated thereunder, or any successor laws and
regulations, as a consequence of the undersigned's
ownership, acquisition or disposition of securities
of the Company; and

b. do all acts necessary in order to file such
forms with the Securities and Exchange Commission,
any securities exchange or national association, the
Company and such other person or agency as the
attorney-in-fact shall deem appropriate.

This Power of Attorney shall remain in full
force and effect until the undersigned is no
longer required to file Forms 3, 4, and 5 with
respect to the undersigned's holdings of and
transactions in securities issued by the Company,
unless earlier revoked by the undersigned in a
signed writing delivered to the foregoing
attorneys-in-fact.

The undersigned hereby ratifies and confirms
all that said attorneys-in-fact and agents shall
do or cause to be done by virtue hereof.  The
undersigned acknowledges that the foregoing
attorneys-in-fact, in serving in such capacity at
the request of the undersigned, are not assuming,
nor is the Company assuming, any of the undersigned's
responsibilities to comply with Section 16 of the
Securities Exchange Act of 1934 (as amended).

IN WITNESS WHEREOF, the undersigned has
caused this Power of Attorney to be
executed as of this 29th day of September, 2008.

Signature: 	/s/ Leo Berlinghieri
Print Name:  	Leo Berlinghieri