-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 G0/jpaYdDuPBLy20SUONkz4+crh5ifxaqk/fgmT22hhKUWeOOAOHkbFVUuXsfb5P
 854+Q6SaBIc91QDIKd15RQ==

<SEC-DOCUMENT>0001407682-07-000006.txt : 20070817
<SEC-HEADER>0001407682-07-000006.hdr.sgml : 20070817
<ACCEPTANCE-DATETIME>20070817175259
ACCESSION NUMBER:		0001407682-07-000006
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20070808
FILED AS OF DATE:		20070817
DATE AS OF CHANGE:		20070817

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			RUDOLPH TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001094392
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				223531208
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			0726

	BUSINESS ADDRESS:	
		STREET 1:		PO BOX 1000
		STREET 2:		ONE RUDOLPH RD
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836
		BUSINESS PHONE:		9736911300

	MAIL ADDRESS:	
		STREET 1:		PO BOX 1000
		STREET 2:		ONE RUDOLPH RD
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			MORATH CHRISTOPHER J
		CENTRAL INDEX KEY:			0001410170

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-27965
		FILM NUMBER:		071066130

	BUSINESS ADDRESS:	
		BUSINESS PHONE:		973-691-1300

	MAIL ADDRESS:	
		STREET 1:		C/O RUDOLPH TECHNOLOGIES INC.
		STREET 2:		ONE RUDOLPH RD, P.O. BOX 1000
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>primary_doc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>3</documentType>

    <periodOfReport>2007-08-08</periodOfReport>

    <noSecuritiesOwned>0</noSecuritiesOwned>

    <issuer>
        <issuerCik>0001094392</issuerCik>
        <issuerName>RUDOLPH TECHNOLOGIES INC</issuerName>
        <issuerTradingSymbol>RTEC</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001410170</rptOwnerCik>
            <rptOwnerName>MORATH CHRISTOPHER J</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O RUDOLPH TECHNOLOGIES INC.</rptOwnerStreet1>
            <rptOwnerStreet2>ONE RUDOLPH RD, P.O. BOX 1000</rptOwnerStreet2>
            <rptOwnerCity>FLANDERS</rptOwnerCity>
            <rptOwnerState>NJ</rptOwnerState>
            <rptOwnerZipCode>07836</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>1</isOther>
            <otherText>VP, Operations, MBU</otherText>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeHolding>
            <securityTitle>
                <value>Common Stock</value>
            </securityTitle>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>380</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeHolding>
        <nonDerivativeHolding>
            <securityTitle>
                <value>Common Stock - Restricted Stock Unit</value>
                <footnoteId id="F1"/>
            </securityTitle>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>5400</value>
                    <footnoteId id="F2"/>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeHolding>
    </nonDerivativeTable>

    <derivativeTable>
        <derivativeHolding>
            <securityTitle>
                <value>Incentive Stock Option (right to buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>16</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2004-11-11</value>
                <footnoteId id="F3"/>
            </exerciseDate>
            <expirationDate>
                <value>2009-11-10</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>23438</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Non-Qualified Stock Option (right to buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>14.62</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2005-04-14</value>
                <footnoteId id="F4"/>
            </exerciseDate>
            <expirationDate>
                <value>2012-10-17</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>2500</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Non- Qualified Stock Option (right to buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>16</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2004-11-11</value>
                <footnoteId id="F3"/>
            </exerciseDate>
            <expirationDate>
                <value>2009-11-10</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>7107</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Non-Qualified Stock Option (right to buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>21.13</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2005-04-14</value>
                <footnoteId id="F4"/>
            </exerciseDate>
            <expirationDate>
                <value>2014-02-28</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>1500</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Non-Qualified Stock (right to buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>22.25</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2005-04-14</value>
                <footnoteId id="F4"/>
            </exerciseDate>
            <expirationDate>
                <value>2013-09-01</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>2500</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Non-Qualified Stock Options (right to buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>23.4</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2005-04-14</value>
                <footnoteId id="F4"/>
            </exerciseDate>
            <expirationDate>
                <value>2011-10-18</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>4500</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Non-Qualified Stock Option (right to buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>37.31</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2005-04-14</value>
                <footnoteId id="F4"/>
            </exerciseDate>
            <expirationDate>
                <value>2010-07-23</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>20000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
    </derivativeTable>

    <footnotes>
        <footnote id="F1">Each Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock.</footnote>
        <footnote id="F2">20% of the share of Common Stock subject to the Restricted Stock Unit vest each year on the grant date Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.</footnote>
        <footnote id="F3">20% of the shares of common stock subject to the Option becomes excercisable twelve months after the date the Option was granted and 1/60th of the shares of Common Stock subject to the Option vest each month thereafter.</footnote>
        <footnote id="F4">20% of the shares of Common Stock subject to the Option became excercisable twelve months after the date the Option was granted and 1/60th of the shares of Common Stock subject to the Option vested each month therafter.However, the Option became vested in full on April 14,2005 due to accelerated vesting</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>/s/ Christopher J. Morath</signatureName>
        <signatureDate>2007-08-17</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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