-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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MIC-Info: RSA-MD5,RSA,
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 0AzfEXa4QGId7v7/bzsYmg==

<SEC-DOCUMENT>0001269314-03-000001.txt : 20031110
<SEC-HEADER>0001269314-03-000001.hdr.sgml : 20031110
<ACCEPTANCE-DATETIME>20031110095725
ACCESSION NUMBER:		0001269314-03-000001
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20031106
FILED AS OF DATE:		20031110

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			RUDOLPH TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001094392
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				223531208
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		ONE RUDOLPH RD
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836
		BUSINESS PHONE:		9736911300

	MAIL ADDRESS:	
		STREET 1:		ONE RUDOLPH RD
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			GREIG THOMAS G
		CENTRAL INDEX KEY:			0001225870

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-27965
		FILM NUMBER:		03986879

	BUSINESS ADDRESS:	
		STREET 1:		C/O LIBERTY CAPITAL PARTNERS
		STREET 2:		1370 AVENUE OF THE AMERICAS
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10036
		BUSINESS PHONE:		2125417676

	MAIL ADDRESS:	
		STREET 1:		C/O LIBERTY CAPITAL PARTNERS
		STREET 2:		1370 AVENUE OF THE AMERICAS
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10036

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			LIBERTY PARTNERS L P
		CENTRAL INDEX KEY:			0001269314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-27965
		FILM NUMBER:		03986881

	BUSINESS ADDRESS:	
		STREET 1:		1370 AVENUE OF THE AMERICAS 34TH FL
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10019
		BUSINESS PHONE:		2125417676

	MAIL ADDRESS:	
		STREET 1:		1370 AVENUE OF THE AMERICAS 34TH FL
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10019

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			PEB ASSOCIATES INC
		CENTRAL INDEX KEY:			0001269315
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-27965
		FILM NUMBER:		03986880

	BUSINESS ADDRESS:	
		STREET 1:		1370 AVENUE OF THE AMERICAS 34TH FL
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10019
		BUSINESS PHONE:		2125417676

	MAIL ADDRESS:	
		STREET 1:		1370 AVENUE OF THE AMERICAS 34TH FL
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10019
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>primary_doc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>

<ownershipDocument>

    <schemaVersion>X0201</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2003-11-06</periodOfReport>


    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0001094392</issuerCik>
        <issuerName>RUDOLPH TECHNOLOGIES INC</issuerName>
        <issuerTradingSymbol>RTEC</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001269314</rptOwnerCik>
            <rptOwnerName>LIBERTY PARTNERS L P</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>1370 AVENUE OF THE AMERICAS 34TH FL</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>NEW YORK</rptOwnerCity>
            <rptOwnerState>NY</rptOwnerState>
            <rptOwnerZipCode>10019</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>1</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>
    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001269315</rptOwnerCik>
            <rptOwnerName>PEB ASSOCIATES INC</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>1370 AVENUE OF THE AMERICAS 34TH FL</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>NEW YORK</rptOwnerCity>
            <rptOwnerState>NY</rptOwnerState>
            <rptOwnerZipCode>10019</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>1</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>
    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001225870</rptOwnerCik>
            <rptOwnerName>GREIG THOMAS G</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O LIBERTY CAPITAL PARTNERS</rptOwnerStreet1>
            <rptOwnerStreet2>1370 AVENUE OF THE AMERICAS</rptOwnerStreet2>
            <rptOwnerCity>NEW YORK</rptOwnerCity>
            <rptOwnerState>NY</rptOwnerState>
            <rptOwnerZipCode>10036</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>1</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>

        <nonDerivativeTransaction>
            <securityTitle>
                <value>Rudolph Technologies Common Stock</value>
            </securityTitle>
            <transactionDate>
                <value>2003-11-06</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>S</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionTimeliness>
                <value></value>
            </transactionTimeliness>
            <transactionAmounts>
                <transactionShares>
                    <value>39400</value>
                </transactionShares>
                <transactionPricePerShare>
                    <value>26.7703</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>D</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>3202440</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>I</value>
                </directOrIndirectOwnership>
                <natureOfOwnership>
                    <value>See Footnote 1</value>
                    <footnoteId id="F1"/>
                </natureOfOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>

    </nonDerivativeTable>

    <footnotes>
        <footnote id="F1">These securities are held by Liberty Partners Holdings 11, LLC.  Liberty Partners, L.P. is the managing member of Liberty Partners Holdings 11, LLC and PEB Associates, Inc. d/b/a Liberty Capital Partners, Inc. is the general partner of Liberty Partners, LP. Reporting person is an officer, director and shareholder of Liberty Capital Partners, Inc.  Reporting entity disclaims beneficial ownership to the extent it exceeds his pecuniary interest in the securities.</footnote>
    </footnotes>


    <ownerSignature>
        <signatureName>Michael Levine</signatureName>
        <signatureDate>2003-11-10</signatureDate>
    </ownerSignature>
    <ownerSignature>
        <signatureName>Thomas Greig III</signatureName>
        <signatureDate>2003-11-10</signatureDate>
    </ownerSignature>

</ownershipDocument>

</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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