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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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MIC-Info: RSA-MD5,RSA,
 JIoIdRd0Bi+ghpuPF6bnAqQ1C4G5lu7HrCG9rlI1VUsnpq0J9uTOzpEnRHKnYjef
 UuQDY7Ae1CRde+8KhWQOMA==

<SEC-DOCUMENT>0001257815-07-000029.txt : 20070205
<SEC-HEADER>0001257815-07-000029.hdr.sgml : 20070205
<ACCEPTANCE-DATETIME>20070205170104
ACCESSION NUMBER:		0001257815-07-000029
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20070201
FILED AS OF DATE:		20070205
DATE AS OF CHANGE:		20070205

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			RUDOLPH TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001094392
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				223531208
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		PO BOX 1000
		STREET 2:		ONE RUDOLPH RD
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836
		BUSINESS PHONE:		9736911300

	MAIL ADDRESS:	
		STREET 1:		PO BOX 1000
		STREET 2:		ONE RUDOLPH RD
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Nelson Jeffrey T
		CENTRAL INDEX KEY:			0001308216

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-27965
		FILM NUMBER:		07581088

	BUSINESS ADDRESS:	
		BUSINESS PHONE:		973-691-1300

	MAIL ADDRESS:	
		STREET 1:		C/O RUDOLPH TECHNOLOGIES, INC.
		STREET 2:		ONE RUDOLPH ROAD, PO BOX 1000
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>edgardoc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2007-02-01</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0001094392</issuerCik>
        <issuerName>RUDOLPH TECHNOLOGIES INC</issuerName>
        <issuerTradingSymbol>RTEC</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001308216</rptOwnerCik>
            <rptOwnerName>Nelson Jeffrey T</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O RUDOLPH TECHNOLOGIES, INC.</rptOwnerStreet1>
            <rptOwnerStreet2>ONE RUDOLPH ROAD, PO BOX 1000</rptOwnerStreet2>
            <rptOwnerCity>FLANDERS</rptOwnerCity>
            <rptOwnerState>NJ</rptOwnerState>
            <rptOwnerZipCode>07836</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>VP Manufacturing Inspection BU</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock - Restricted Stock Unit</value>
                <footnoteId id="F1"/>
            </securityTitle>
            <transactionDate>
                <value>2007-02-01</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>3000</value>
                    <footnoteId id="F2"/>
                </transactionShares>
                <transactionPricePerShare>
                    <value>0</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>8000</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
    </nonDerivativeTable>

    <footnotes>
        <footnote id="F1">Each Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock.</footnote>
        <footnote id="F2">20% of the shares of Common Stock subject to the Restricted Stock Unit vest each year on the grant date.  Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>By: Steven R. Roth  For: Jeffrey T. Nelson</signatureName>
        <signatureDate>2007-02-05</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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