<SEC-DOCUMENT>0001193125-19-242079-index.html : 20190910
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<ACCEPTANCE-DATETIME>20190910164410
ACCESSION NUMBER:		0001193125-19-242079
CONFORMED SUBMISSION TYPE:	DEFM14A
PUBLIC DOCUMENT COUNT:		13
FILED AS OF DATE:		20190910
DATE AS OF CHANGE:		20190910
EFFECTIVENESS DATE:		20190910

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			RUDOLPH TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001094392
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				223531208
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		DEFM14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-36226
		FILM NUMBER:		191085807

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		978-253-6200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
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