10-Q

UNITED STATES

SECURITIES AND EXCHANGE COMMISSION

WASHINGTON, D.C. 20549

___________________________

FORM 10-Q

__________________________

(Mark One)
x	QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934

For the Quarterly Period Ended June 30, 2017

OR

o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934

For the transition period from          to          

Commission File No. 001-36226

___________________________

RUDOLPH TECHNOLOGIES, INC.

(Exact name of registrant as specified in its charter)

___________________________

Delaware	22-3531208
(State or other jurisdiction of incorporation or organization)	(I.R.S. Employer Identification Number)

16 Jonspin Road, Wilmington, Massachusetts 01887

(Address of principal executive offices, including zip code)

Registrant’s telephone number, including area code: (978) 253-6200

___________________________

Indicate by check mark whether the registrant: (1) has filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that the Registrant was required to file such reports), and (2) has been subject to such filing requirements for the past 90 days.  Yes [X]   No [_]

Indicate by check mark whether the registrant has submitted electronically and posted on its corporate Web site, if any, every Interactive Data File required to be submitted and posted pursuant to Rule 405 of Regulation S-T (Section 232.405 of this chapter) during the preceding 12 months (or for such shorter period that the registrant was required to submit and post such files). Yes [X]   No [_]

Indicate by check mark whether the registrant is a large accelerated filer, an accelerated filer, a non-accelerated filer, a smaller reporting company, or an emerging growth company.  See definition of “large accelerated filer”, “accelerated filer”, “smaller reporting company”, and “emerging growth company” in Rule 12b-2 of the Securities Exchange Act.    

Large accelerated filer [  ]	Accelerated filer [ X ]	Non-accelerated filer [  ]	Smaller reporting company [  ]	Emerging growth company [  ]
		(Do not check if a smaller reporting company)

Indicate by check mark whether the registrant is a shell company (as defined in Rule 12b-2 of the Exchange Act).     Yes [_] No [X]

If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act. [_]

The number of outstanding shares of the Registrant’s Common Stock on July 18, 2017 was 31,540,042.

TABLE OF CONTENTS

Item No.  Page

PART I    FINANCIAL INFORMATION

Item 1.	Financial Statements (unaudited)	1
	Condensed Consolidated Balance Sheets at June 30, 2017 and December 31, 2016	1
	Condensed Consolidated Statements of Operations for the three and six months ended June 30, 2017 and 2016	2
	Condensed Consolidated Statements of Comprehensive Income for the three and six months ended June 30, 2017 and 2016	3
	Condensed Consolidated Statements of Cash Flows for the six months ended June 30, 2017 and 2016	4
	Notes to Condensed Consolidated Financial Statements	5
Item 2.	Management’s Discussion and Analysis of Financial Condition and Results of Operations	17
Item 3.	Quantitative and Qualitative Disclosures about Market Risk	21
Item 4.	Controls and Procedures	22

PART II    OTHER INFORMATION

Item 1.	Legal Proceedings	22
Item 1A.	Risk Factors	22
Item 2.	Unregistered Sales of Equity Securities and Use of Proceeds	23
Item 3.	Defaults Upon Senior Securities	23
Item 4.	Mine Safety Disclosures	23
Item 5.	Other Information	23
Item 6.	Exhibits	24

PART I FINANCIAL INFORMATION

Item 1. Financial Statements

RUDOLPH TECHNOLOGIES, INC.

CONDENSED CONSOLIDATED BALANCE SHEETS

(In thousands)

	June 30, 2017			December 31, 2016
	(Unaudited)
ASSETS
Current Assets:
Cash and cash equivalents	$	57,705		$	37,859
Marketable securities	91,244			87,872
Accounts receivable, less allowance of $495 and $680	70,564			64,912
Inventories, net	66,835			65,485
Income taxes receivable	—			2,389
Prepaid expenses and other current assets	4,634			4,113
Total current assets	290,982			262,630
Property, plant and equipment, net	15,091			11,858
Goodwill	22,495			22,495
Identifiable intangible assets, net	9,263			10,273
Other assets	32,755			31,443
Total assets	$	370,586		$	338,699
LIABILITIES AND STOCKHOLDERS’ EQUITY
Current liabilities:
Accounts payable and accrued liabilities	$	25,928		$	21,494
Income taxes payable	1,168			—
Deferred revenue	11,230			7,329
Other current liabilities	7,722			7,139
Total current liabilities	46,048			35,962
Other non-current liabilities	11,247			9,002
Total liabilities	57,295			44,964
Commitments and contingencies
Stockholders’ equity:
Common stock	32			31
Additional paid-in capital	383,174			381,189
Accumulated other comprehensive loss	(1,481		)	(2,779		)
Accumulated deficit	(68,434		)	(84,706		)
Total stockholders’ equity	313,291			293,735
Total liabilities and stockholders’ equity	$	370,586		$	338,699

The accompanying notes are an integral part of these financial statements.

1

RUDOLPH TECHNOLOGIES, INC.

CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS

(In thousands, except per share data)

(Unaudited)

	Three Months Ended					Six Months Ended
	June 30,					June 30,
	2017			2016		2017			2016
Revenues	$	67,418		$	62,701	$	128,097		$	117,063
Cost of revenues	31,962			28,508		60,773			53,825
Gross profit	35,456			34,193		67,324			63,238
Operating expenses (income):
Research and development	12,146			11,879		24,156			24,325
Selling, general and administrative	10,110			9,488		19,778			18,987
Amortization	505			595		1,010			1,190
Patent litigation judgment	—			—		—			(14,632		)
Total operating expenses	22,761			21,962		44,944			29,870
Operating income	12,695			12,231		22,380			33,368
Interest (income) expense, net	(223		)	1,446		(414		)	2,915
Other expense	166			192		435			299
Income before income taxes	12,752			10,593		22,359			30,154
Provision for income taxes	3,559			2,992		6,015			8,614
Net income	$	9,193		$	7,601	$	16,344		$	21,540
Earnings per share:
Basic	$	0.29		$	0.25	$	0.52		$	0.70
Diluted	$	0.29		$	0.24	$	0.51		$	0.68
Weighted average shares outstanding:
Basic	31,501			30,779		31,397			30,869
Diluted	32,146			31,754		32,104			31,705

The accompanying notes are an integral part of these financial statements. 

2

RUDOLPH TECHNOLOGIES, INC.

CONDENSED CONSOLIDATED STATEMENTS OF COMPREHENSIVE INCOME

(In thousands)

(Unaudited)

	Three Months Ended				Six Months Ended
	June 30,				June 30,
	2017		2016		2017		2016
Net income	$	9,193	$	7,601	$	16,344	$	21,540
Other comprehensive income:
Change in net unrealized gains on investments, net of tax	1		29		45		23
Change in currency translation adjustments	133		596		1,253		1,234
Total comprehensive income	$	9,327	$	8,226	$	17,642	$	22,797

The accompanying notes are an integral part of these financial statements. 

3

RUDOLPH TECHNOLOGIES, INC.

CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS

(In thousands)

(Unaudited)

	Six Months Ended June 30,
	2017			2016
Cash flows from operating activities:
Net income	$	16,344		$	21,540
Adjustments to reconcile net income to net cash and cash equivalents provided by operating activities:
Amortization of convertible note discount and issuance costs	—			2,039
Amortization of intangibles	1,010			1,190
Depreciation	1,880			1,868
Foreign currency exchange loss	435			299
Change in fair value of contingent consideration	132			117
Share-based compensation	2,948			2,387
Provision for doubtful accounts and inventory valuation	2,026			2,278
Patent litigation judgment	—			(14,632		)
Changes in operating assets and liabilities	5,198			(4,852		)
Net cash and cash equivalents provided by operating activities	29,973			12,234
Cash flows from investing activities:
Purchases of marketable securities	(62,527		)	(70,412		)
Proceeds from sales of marketable securities	59,491			90,599
Purchases of property, plant and equipment	(5,301		)	(2,173		)
Net cash and cash equivalents provided by (used in) investing activities	(8,337		)	18,014
Cash flows from financing activities:
Redemption of stock warrants	(1,025		)	—
Purchases of common stock	—			(8,044		)
Tax payments related to shares withheld for share-based compensation plans	(1,323		)	(1,565		)
Payment of contingent consideration for acquired business	(358		)	(94		)
Issuance of shares through share-based compensation plans	289			275
Net cash and cash equivalents used in financing activities	(2,417		)	(9,428		)
Effect of exchange rate changes on cash and cash equivalents	627			1,065
Net increase (decrease) in cash and cash equivalents	19,846			21,885
Cash and cash equivalents at beginning of period	37,859			44,554
Cash and cash equivalents at end of period	$	57,705		$	66,439
Supplemental disclosure of cash flow information:
Income taxes paid	$	2,246		$	2,541
Interest paid	$	—		$	1,125

The accompanying notes are an integral part of these financial statements. 

4

RUDOLPH TECHNOLOGIES, INC.

NOTES TO CONDENSED CONSOLIDATED FINANCIAL STATEMENTS

(In thousands, except per share data)

(Unaudited)

NOTE 1.    Basis of Presentation

The accompanying interim unaudited condensed consolidated financial statements have been prepared by Rudolph Technologies, Inc. (the “Company” or “Rudolph”) and in the opinion of management reflect all adjustments, consisting of normal recurring accruals, necessary for their fair presentation in accordance with accounting principles generally accepted in the United States of America (“U.S. GAAP”).  Preparing financial statements requires management to make estimates and assumptions that affect amounts reported in the financial statements and accompanying notes.  Actual amounts could differ materially from reported amounts.  The interim results for the three and six month periods ended June 30, 2017 are not necessarily indicative of results to be expected for the entire year or any future periods.  This interim financial information should be read in conjunction with the financial statements and the notes thereto included in the Company’s Annual Report on Form 10-K for the year ended December 31, 2016 (“2016 10-K”) filed with the Securities and Exchange Commission (“SEC”). The accompanying condensed consolidated balance sheet at December 31, 2016 has been derived from the audited consolidated financial statements included in the 2016 10-K.

Reclassifications

Certain immaterial prior period amounts have been reclassified to conform to the current financial statement presentation.

Recent Accounting Pronouncements

Recently Adopted

Effective January 1, 2017, the Company adopted the Financial Accounting Standards Board (FASB) Accounting Standard Update (ASU) No. 2016-09, “Improvements to Employee Share-Based Payment Accounting.” The standard update simplifies several aspects of the accounting for employee share-based payment transactions, including accounting for income taxes, forfeitures, and statutory withholding requirements, as well as classification in the Condensed Consolidated Statement of Cash Flows. As a result of the adoption, on a prospective basis, the Company recognized $623 and $1,295 of excess tax benefits from stock-based compensation as a benefit in our income tax provision for the three and six months ended June 30, 2017, respectively. Historically, these amounts were recorded as additional paid-in capital. Upon adoption, the Company elected to present excess tax benefits to operating cash flows retrospectively to its Condensed Consolidated Statement of Cash Flows for the six months ended June 30, 2016, which resulted in a reclassification of excess tax benefits from stock-based compensation of $252 from cash flows from financing activities to cash flows from operating activities. The Company elected to change its policy on accounting for forfeitures and account for forfeitures as they occur. As a result of the forfeiture rate policy change, the Company recorded a reduction to retained earnings of $72 under the modified retrospective approach. Additional amendments to the accounting for income taxes and minimum statutory withholding requirements had no impact on its results of operations.

Effective January 1, 2017, the Company adopted ASU No. 2015-11, “Inventory (Topic 330): Simplifying the Measurement of Inventory.” This simplifies subsequent measurement of inventory by having an entity measure inventory at the lower of cost and net realizable value. Net realizable value is the estimated selling price in the ordinary course of business, less reasonably predictable cost of completion, disposal, and transportation. The adoption of ASU 2015-11 did not have any impact on the Company's consolidated financial position, results of operations, and cash flows.

Recently Issued

In May 2017, the FASB issued ASU No. 2017-09, “Compensation - Stock Compensation (Topic718): Scope of Modification Accounting.” This ASU amends the scope of modification accounting for share-based payment arrangements and provides guidance on the types of changes to the terms or conditions of share-based payment awards to which an entity would be required to apply modification accounting under ASC 718. The ASU is effective for the fiscal years beginning after December 15, 2019, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2017-09 will have on its consolidated financial position, results of operations, and cash flows.

In January 2017, the FASB issued ASU No. 2017-04, “Intangibles - Goodwill and Other (Topic 350): Simplifying the Test for Goodwill Impairment.” This ASU eliminates Step 2 from the goodwill impairment test. Accordingly, if the carrying amount of a reporting unit exceeds its fair value, an impairment loss will be recognized in an amount equal to the excess, limited to the total amount of goodwill allocated to the reporting unit. The ASU is effective for the fiscal years beginning after

5

December 15, 2019, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2017-04 will have on its consolidated financial position, results of operations, and cash flows.

In October 2016, the FASB issued ASU No. 2016-16, “Income Tax (Topic 740): Intra-Entity Transfers of Assets Other Than Inventory.” This ASU, which is part of the Board’s simplification initiative, is intended to reduce the complexity of U.S. GAAP and diversity in practice related to the tax consequences of certain types of intra-entity asset transfers, particularly those involving intellectual property. This ASU is effective for fiscal years beginning after December 15, 2017, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2016-16 will have on its consolidated financial position, results of operations, and cash flows.

In August 2016, the FASB issued ASU No. 2016-15, “Statement of Cash Flows (Topic 230): Classification of Certain Cash Receipts and Cash Payments.” This ASU provides guidance on statement of cash flows presentation for eight specific cash flow issues where diversity in practice exists. This ASU is effective for fiscal years beginning after December 15, 2017, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2016-15 will have on its consolidated financial position, results of operations, and cash flows.

In June 2016, the FASB issued ASU No. 2016-13, “Financial Instruments – Credit Losses (Topic 326),” which introduces new guidance for the accounting for credit losses on instruments within its scope. Given the breadth of that scope, the new ASU will impact both financial services and non-financial services entities. The standard is effective for fiscal years beginning after December 15, 2020. The Company is currently evaluating the effect the adoption of ASU No. 2016-13 will have on its consolidated financial position, results of operations, and cash flows.

In February 2016, the FASB issued ASU No. 2016-02, “Leases (Topic 842).” The standard requires that lessees will be required to recognize assets and liabilities on the balance sheet for the rights and obligations created by all leases with terms of more than 12 months. ASU No. 2016-02 also will require disclosures designed to give financial statement users information on the amount, timing, and uncertainty of cash flows arising from leases. These disclosures include qualitative and quantitative information. The standard is effective for annual periods, and interim periods within those annual periods, beginning after December 15, 2018 with earlier adoption permitted. The Company is in the process of evaluating the effects the adoption of ASU No. 2016-02 will have on its consolidated financial position, results of operations, and cash flows.

In May 2014, the FASB issued ASU No. 2014-09, “Revenue from Contracts with Customers (Topic 606).” ASU No. 2014-09, as amended, outlines a comprehensive revenue recognition model and supersedes most current revenue recognition guidance as amended. In July 2015, the FASB deferred for one year the effective date of the new revenue standard. The standard is effective for annual periods, and interim periods within those annual periods, beginning after December 15, 2017 with earlier adoption permitted. ASU No. 2014-09 allows for two methods of adoption: (a) “full retrospective” adoption, meaning the standard is applied to all periods presented, or (b) “modified retrospective” adoption, meaning the cumulative effect of applying ASU No. 2014-09 is recognized as an adjustment to the 2018 opening retained earnings balance. The Company is in the process of determining the adoption method as well as the effects the adoption of ASU No. 2014-09 will have on its consolidated financial position, results of operations, and cash flows as well as the impact on our internal controls over financial reporting.

NOTE 2.  Fair Value Measurements

The Company applies a three-level valuation hierarchy for fair value measurements. This hierarchy prioritizes the inputs into three broad levels.  Level 1 inputs are quoted prices (unadjusted) in active markets for identical assets or liabilities. Level 2 inputs are quoted prices for similar assets and liabilities in active markets or inputs that are observable for the asset or liability, either directly or indirectly through market corroboration, for substantially the full term of the asset or liability. Level 3 inputs are unobservable inputs based on management’s assumptions used to measure assets and liabilities at fair value. A financial asset’s or liability’s fair value measurement classification within the hierarchy is determined based on the lowest level input that is significant to the fair value measurement.

The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at June 30, 2017 and December 31, 2016:

6

			Fair Value Measurements Using
	Carrying Value		Quoted Prices in Active Markets for Identical Assets (Level 1)		Significant Other Observable Inputs (Level 2)		Significant Unobservable Inputs (Level 3)
June 30, 2017
Assets:
Available-for-sale debt securities:
Municipal notes and bonds	$	90,403	$	—	$	90,403	$	—
Corporate bonds	841		—		841		—
Foreign currency forward contracts	94		—		94		—
Total Assets	$	91,338	$	—	$	91,338	$	—
Liabilities:
Contingent consideration - acquisitions	3,025		—		—		3,025
Total Liabilities	$	3,025	$	—	$	—	$	3,025
December 31, 2016
Assets:
Available-for-sale debt securities:
Municipal notes and bonds	$	87,029	$	—	$	87,029	$	—
Corporate bonds	843		—		843		—
Foreign currency forward contracts	312		—		312		—
Total Assets	$	88,184	$	—	$	88,184	$	—
Liabilities:
Contingent consideration - acquisitions	3,251		—		—		3,251
Total Liabilities	$	3,251	$	—	$	—	$	3,251

The Company’s investments classified as Level 1 are based on quoted market prices that are available in active markets.

The Company’s investments classified as Level 2 are valued using observable inputs to quoted market prices, benchmark yields, reported trades, broker/dealer quotes or alternative pricing sources with reasonable levels of price transparency. The foreign currency forward contracts are primarily measured based on the foreign currency spot and forward rates quoted by the banks or foreign currency dealers. Investment prices are obtained from third party pricing providers, which models prices utilizing the above observable inputs, for each asset class.

Level 3 liabilities consisted of contingent consideration related to an acquisition for which the Company uses a discounted cash flow model to value these liabilities. The Level 3 assumptions used in the discounted cash flow model for the contingent consideration included projected revenues, timing of cash flows and estimates of discount rates of 8.6% and 9.1% for the six months ended June 30, 2017 and 2016, respectively. A significant decrease in the projected revenues or increase in discount rates could result in a significantly lower fair value measurement for the contingent consideration.

This table presents a reconciliation for all liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the six months ended June 30, 2017:

7

	Fair Value Measurements Using Significant Unobservable Inputs (Level 3)
Balance at December 31, 2016	$	3,251
Additions	—
Total loss included in selling, general and administrative expense	132
Payments	(358		)
Transfers into (out of) Level 3	—
Balance at June 30, 2017	$	3,025

See Note 3 for additional discussion regarding the fair value of the Company’s marketable securities.

Fair Value of Other Financial Instruments

The carrying value of cash and cash equivalents, accounts receivable, accounts payable and accrued liabilities approximates fair value because of the short-term maturity of these instruments. The estimated fair value of these obligations is based, primarily, on a market approach, comparing the Company’s interest rates to those rates the Company believes it would reasonably receive upon re-entry into the market. Judgment is required to estimate the fair value, using available market information and appropriate valuation methods.

NOTE 3.   Marketable Securities

The Company has evaluated its investment policies and determined that all of its investment securities are to be classified as available-for-sale.  Available-for-sale securities are carried at fair value, with the unrealized gains and losses reported in Stockholders’ equity under the caption “Accumulated other comprehensive loss.”  Realized gains and losses on available-for-sale securities are included in “Other expense” in the Condensed Consolidated Statements of Operations.  The Company records other-than-temporary impairment charges for its available-for-sale investments when it intends to sell the securities, it is more-likely-than not that it will be required to sell the securities before a recovery, or when it does not expect to recover the entire amortized cost basis of the securities.  The cost of securities sold is based on the specific identification method.

The Company has determined that the gross unrealized losses on its marketable securities at June 30, 2017 and December 31, 2016 are temporary in nature. The Company reviews its investment portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated recovery in market value.

At June 30, 2017 and December 31, 2016, marketable securities are categorized as follows:

	Amortized Cost		Gross Unrealized Holding Gains		Gross Unrealized Holding Losses			Fair Value
June 30, 2017
Municipal notes and bonds	$	90,389	$	21	$	(7	)	$	90,403
Corporate bonds	841		—		—			841
Total marketable securities	$	91,230	$	21	$	(7	)	$	91,244
December 31, 2016
Municipal notes and bonds	$	87,088	$	6	$	(65	)	$	87,029
Corporate bonds	842		1		—			843
Total marketable securities	$	87,930	$	7	$	(65	)	$	87,872

 The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Condensed Consolidated Balance Sheet classification, is as follows at June 30, 2017 and December 31, 2016:

8

	June 30, 2017				December 31, 2016
	Amortized Cost		Fair Value		Amortized Cost		Fair Value
Due within one year	$	77,592	$	77,601	$	82,498	$	82,445
Due after one through five years	13,638		13,643		5,432		5,427
Due after five through ten years	—		—		—		—
Due after ten years	—		—		—		—
Total marketable securities	$	91,230	$	91,244	$	87,930	$	87,872

The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at June 30, 2017 and December 31, 2016:  

	Unrealized Loss Position For Less Than 12 Months					Unrealized Loss Position For Greater Than 12 Months
	Fair Value		Gross Unrealized Losses			Fair Value		Gross Unrealized Losses
June 30, 2017
Municipal notes and bonds	$	26,062	$	(7	)	$	—	$	—
Corporate bonds	—		—			—		—
Total	$	26,062	$	(7	)	$	—	$	—
December 31, 2016
Municipal notes and bonds	$	64,918	$	(65	)	$	—	$	—
Corporate bonds	—		—			—		—
Total	$	64,918	$	(65	)	$	—	$	—

See Note 2 for additional discussion regarding the fair value of the Company’s marketable securities.

NOTE 4.    Derivative Instruments and Hedging Activities

The Company, when it considers it to be appropriate, enters into forward contracts to hedge the economic exposures arising from foreign currency denominated transactions. At June 30, 2017 and December 31, 2016, these contracts included the future sale of Japanese Yen to purchase U.S. dollars. Derivative instruments are recognized as either “Prepaid expenses and other current assets” or “Other current liabilities” in the Condensed Consolidated Balance Sheets and are measured at fair value. The foreign currency forward contracts were entered into by the Company’s Japanese subsidiary to economically hedge a portion of certain intercompany obligations. The forward contracts are not designated as hedges for accounting purposes and decreases in the fair value of $218 and $300 for the six month periods ended June 30, 2017 and 2016, respectively, are recorded within the caption “Other expense” in the Condensed Consolidated Statements of Operations.

The dollar equivalent of the U.S. dollar forward contracts and related fair values as of June 30, 2017 and December 31, 2016 were as follows:

	June 30, 2017		December 31, 2016
Notional amount	$	3,148	$	3,827
Fair value of asset	$	94	$	312

NOTE 5.    Purchased Intangible Assets

Purchased intangible assets as of June 30, 2017 and December 31, 2016 are as follows:

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	Gross Carrying Amount		Accumulated Amortization		Net
June 30, 2017
Finite-lived intangibles:
Developed technology	$	65,527	$	57,790	$	7,737
Customer and distributor relationships	9,560		8,670		890
Trade names	4,361		3,725		636
Total identifiable intangible assets	$	79,448	$	70,185	$	9,263
December 31, 2016
Finite-lived intangibles:
Developed technology	$	65,527	$	56,986	$	8,541
Customer and distributor relationships	9,560		8,514		1,046
Trade names	4,361		3,675		686
Total identifiable intangible assets	$	79,448	$	69,175	$	10,273

Intangible asset amortization expense for the three and six month periods ended June 30, 2017 was $505 and $1,010, respectively. For the three and six month periods ended June 30, 2016, intangible assets amortization expenses was $595 and $1,190, respectively. Assuming no change in the gross carrying value of identifiable intangible assets and estimated lives, estimated amortization expense for the remainder of 2017 will be $923, and for each of the next five years estimated amortization expense amounts to $1,496 for 2018, $1,496 for 2019, $1,294 for 2020, $546 for 2021, and $480 for 2022.

NOTE 6.    Balance Sheet Details

Inventories

Inventories are comprised of the following:

	June 30, 2017		December 31, 2016
Materials	$	34,739	$	32,993
Work-in-process	19,862		18,764
Finished goods	12,234		13,728
Total inventories	$	66,835	$	65,485

The Company has established reserves of $11,842 and $10,545 as of June 30, 2017 and December 31, 2016, respectively, for slow moving and obsolete inventory, which are included in the amounts above.

Property, Plant and Equipment

Property, plant and equipment, net is comprised of the following:

	June 30, 2017			December 31, 2016
Land and building	$	2,584		$	2,584
Machinery and equipment	26,803			23,493
Furniture and fixtures	3,036			2,699
Computer equipment and software	5,682			5,204
Leasehold improvements	8,952			8,116
	47,057			42,096
Accumulated depreciation	(31,966		)	(30,238		)
Total property, plant and equipment, net	$	15,091		$	11,858

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Other assets

Other assets is comprised of the following:

	June 30, 2017		December 31, 2016
Deferred income taxes	$	32,165	$	30,850
Other	590		593
Total other assets	$	32,755	$	31,443

Other current liabilities

Other current liabilities is comprised of the following:

	June 30, 2017		December 31, 2016
Intangible asset acquisition - Stella Alliance	$	1,000	$	1,000
Contingent consideration - acquisitions	634		855
Warrant settlement payable	—		1,025
Customer deposits	983		996
Other	5,105		3,263
Total other current liabilities	$	7,722	$	7,139

Other non-current liabilities

Other non-current liabilities is comprised of the following:

	June 30, 2017		December 31, 2016
Unrecognized tax benefits (including interest)	$	4,866	$	3,386
Contingent consideration - acquisitions	2,391		2,396
Deferred revenue	1,299		1,132
Other	2,691		2,088
Total other non-current liabilities	$	11,247	$	9,002

NOTE 7.   Debt Obligations

On July 25, 2011, the Company issued $60,000 aggregate principal amount of 3.75% Convertible Senior Notes due 2016 (the “Notes”) at par. The Notes were issued pursuant to an indenture, dated as of July 25, 2011, between the Company and Bank of New York Mellon Trust Company, N.A., as Trustee, which includes a form of Note. The Notes provided for the payment of interest semi-annually in arrears on January 15 and July 15 of each year, beginning January 15, 2012, at an annual rate of 3.75%. Concurrently with the issuance of the Notes, the Company purchased a convertible note hedge and sold a warrant. Each of the convertible note hedge and warrant transactions were entered into with an affiliate of the initial purchaser of the Notes.

On July 15, 2016, the Company redeemed all of its outstanding 3.75% Convertible Senior Notes with an aggregate principle amount of $60,000. Under the terms of the indenture, holders of the Notes were paid cash up to the aggregate principal amount of the Notes and were issued shares of common stock for the remainder of the conversion, with any fractional shares paid in cash. The conversion resulted in the issuance of 540 shares of common stock of the Company to the bondholders, but resulted in no dilution to Rudolph shareholders as these shares were covered by the convertible note hedge that was entered into by the Company in 2011 at the time of issuance of the Notes.

The sale of the warrant gave the holder the right to purchase 4,634 shares of Company common stock at a strike price of $17.00 per share. The warrant had a series of daily expiration dates beginning in October 2016 and ending in January 2017. In 2016, the holder exercised 4,248 warrants, which settled for 80 shares of Company common stock and $10,525 payable in cash, of which $9,500 was paid as of December 31, 2016 and $1,025 was paid in January 2017, at a weighted average stock price of

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$19.82 per share. The remaining 386 warrants were exercised in January 2017 by the holder for 102 shares of Company common stock at a weighted average stock price of $23.13 per share.

The following table presents the amount of interest cost recognized relating to the Notes during the three and six months endedJune 30, 2017 and June 30, 2016:

	Three Months Ended June 30,				Six Months Ended June 30,
	2017		2016		2017		2016
Contractual interest coupon	$	—	$	563	$	—	$	1,125
Amortization of interest discount	—		899		—		1,793
Amortization of debt issuance costs	—		123		—		246
Total interest cost recognized	$	—	$	1,585	$	—	$	3,164

NOTE 8.   Commitments and Contingencies

Intellectual Property Indemnification Obligations

The Company has entered into agreements with customers that include limited intellectual property indemnification obligations that are customary in the industry. These guarantees generally require the Company to compensate the other party for certain damages and costs incurred as a result of third party intellectual property claims arising from these transactions. The nature of the intellectual property indemnification obligations prevents the Company from making a reasonable estimate of the maximum potential amount it could be required to pay to its customers. Historically, the Company has not made any indemnification payments under such agreements and no amount has been accrued in the accompanying consolidated financial statements with respect to these indemnification guarantees.

Warranty Reserves

The Company generally provides a warranty on its products for a period of 12 to 15 months against defects in material and workmanship. The Company estimates the costs that may be incurred during the warranty period and records a liability in the amount of such costs at the time revenue is recognized. The Company’s estimate is based primarily on historical experience. The Company periodically assesses the adequacy of its recorded warranty liabilities and adjusts the amounts as necessary. Settlements of warranty reserves are generally associated with sales that occurred during the 12 to 15 months prior to the quarter-end and warranty accruals are related to sales during the same year.

Changes in the Company’s warranty reserves are as follows:

	Six Months Ended June 30,
	2017			2016
Balance, beginning of the period	$	1,788		$	1,894
Accruals	1,659			1,261
Usage	(1,311		)	(1,319		)
Balance, end of the period	$	2,136		$	1,836

Warranty reserves are reported in the Condensed Consolidated Balance Sheets within the caption “Accounts payable and accrued liabilities.”

Legal Matters

From time to time, the Company is subject to legal proceedings and claims in the ordinary course of business. The following reflects an overview of the material activities with regard to these matters through June 30, 2017.

August Technology Corporation and Rudolph Technologies, Inc. v. Camtek, Ltd., No. 11-CV-03707 (MJD/TNL): A lawsuit against Camtek, Ltd. (“Camtek”), of Migdal Hamek, Israel, was filed by the Company on June 1, 2011 alleging infringement of its U.S. Patent No. 7,729,528 related to its proprietary continuous scan wafer inspection technology. The relief sought in the lawsuit includes the payment of damages and a permanent injunction against any products found to be infringing. Camtek filed an inter

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partes reexamination petition with the U.S. Patent and Trademark Office (the “PTO”) on January 19, 2012 asserting that certain claims of the patent are unpatentable. In the course of this proceeding the PTO issued a final determination that 35 claims of the patent were valid and 18 claims were rejected.  The Company appealed the PTO’s rejection of the 18 claims to the US Court of Appeals for the Federal Circuit.  On December 22, 2016, the U.S. Court of Appeals for the Federal Circuit reversed the PTO’s rejection of three of the 18 patent claims, affirmed the PTO’s rejection of nine of the 18 patent claims, and dismissed the remaining six patent claims for procedural reasons. Thus, 38 claims are available to be asserted under the ‘528 patent in this lawsuit. During the pendency of the reexamination process, the parties had stipulated that the lawsuit be stayed. With resolution of Camtek’s petition, the stay in the lawsuit has been lifted and the parties are proceeding with litigation.

Rudolph Technologies, Inc. v. Camtek, Ltd., No. 15-CV-1246 (ADM/BRT): On March 12, 2015, the Company filed and served on Camtek a complaint asserting infringement of Rudolph’s U.S. Patent No. 6,826,298 by Camtek’s Eagle product with the U.S. District Court in Minnesota. The ‘6,298 patent is also related to our proprietary continuous scan wafer inspection technology and was the subject of Rudolph’s prior litigation against the Camtek Falcon system (the “Falcon Litigation”) in which Rudolph prevailed with a final judgment of infringement and damages of $14.6 million assessed against Camtek. The relief sought in the lawsuit includes the payment of damages and a permanent injunction against any products found to be infringing. On April 21, 2015, the Company filed a Motion for Preliminary Injunction to enjoin Camtek’s sale of the Eagle device in the United States. On or about April 20, 2015, Camtek filed a complaint in the U.S. District Court in New Jersey seeking a declaratory judgment challenging the jurisdiction and venue of the Minnesota District Court and seeking to have the New Jersey District Court find that the ‘6,298 patent is not infringed and, in the alternative, that the ‘6,298 patent is invalid. On August 26, 2015, the U.S. District Court in Minnesota ruled that Minnesota jurisdiction was appropriate for this matter while at the same time denying the Company’s Motion for Preliminary Injunction. Camtek’s complaint filed in the U.S. District Court in New Jersey was subsequently dismissed. On August 8, 2016 the Minnesota District Court issued an order regarding motions for partial summary judgment which we had filed in March 2016 granting (i) that the ‘6,298 patent is valid and Camtek is precluded from contesting its validity at trial, and (ii) that the claim constructions adopted in the Falcon Litigation for four terms are entitled to a preclusive effect and will apply in the course of the present litigation. The Minnesota District Court also ruled that three phrases not subject to claim construction in the Falcon Litigation may be defined in the present case. This matter is currently ongoing in the U.S. District Court in Minnesota with no trial date set.

Camtek, Ltd. v. Rudolph Technologies, Inc., No.: 1:17-CV-11127-PBS: On June 19, 2017, Camtek filed with the U.S. District Court in Massachusetts and served on Rudolph a complaint alleging infringement by Rudolph’s NSX product of Camtek’s U.S. Patent No. 6,192,289 related to kerf inspection. The relief sought in the lawsuit includes the payment of damages and a permanent injunction against any products found to be infringing. This newly served matter is currently ongoing in the U.S. District Court in Massachusetts with no trial date set.

Subsequent to the close of the 2017 second quarter, on July 28, 2017, Rudolph and Camtek entered into a Settlement Agreement (the “Agreement”) resolving each of the three litigations referenced above (the “Litigations”). Pursuant to the Agreement, in exchange for a $13.0 million cash payment from Camtek to be paid to Rudolph, the parties each agreed to dismiss with prejudice and release the other party from all claims, damages and expenses incurred or raised in the Litigations. The parties also mutually agreed not to pursue further legal actions on any of the claims reflected in the patents which were the subject of the Litigations. Further, subject to limited exceptions, Rudolph and Camtek have agreed not to bring suit against each other for a three year period from the date of the Agreement. Each party expressly denies any liability to the other party with respect to any of the Litigations.

Line of Credit

The Company has a credit agreement with a bank that provides for a line of credit which is secured by the marketable securities the Company has with the bank. The Company is permitted to borrow up to 70% of the value of eligible securities held at the time the line of credit is accessed. The available line of credit as of June 30, 2017 was approximately $86 million with an available interest rate of 2.8%. The credit agreement is available to the Company until such time that either party terminates the arrangement at their discretion. The Company has not utilized the line of credit to date.

NOTE 9.   Share-Based Compensation

Restricted Stock Unit Activity

A summary of the Company’s nonvested restricted stock unit activity with respect to the six months endedJune 30, 2017 is as follows:

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	Number of Shares		Weighted Average Grant Date Fair Value
Nonvested at December 31, 2016	1,136		$	12.30
Granted	273		$	22.62
Vested	(277	)	$	11.35
Forfeited	(30	)	$	12.30
Nonvested at June 30, 2017	1,102		$	15.10

Included in the number of shares granted in the table directly above are 38 market performance-based restricted stock units (MPRSUs) granted to executives.  Vesting of these MPRSUs is contingent upon the Company meeting certain total shareholder return (TSR) levels as compared to a select peer group over the next three years.  The MPRSUs cliff vest at the end of the three-year period and have a maximum potential to vest at 200% (76 shares) based on TSR performance.  The related share-based compensation expense is determined based on the estimated fair value of the underlying shares on the date of grant and is recognized straight-line over the vesting term.  The estimated fair value per share of the MPRSUs was $25.30 and was calculated using a Monte Carlo simulation model.

As of June 30, 2017 and December 31, 2016, there was $12,601 and $8,697 of total unrecognized compensation cost related to restricted stock units granted under the Company’s stock plans, respectively.  That cost is expected to be recognized over a weighted average period of 2.6 years and 2.7 years for the respective periods.

NOTE 10.   Other Expense

	Three Months Ended				Six Months Ended
	June 30,				June 30,
	2017		2016		2017		2016
Foreign currency exchange losses, net	$	166	$	192	$	435	$	299
Total other expense	$	166	$	192	$	435	$	299

NOTE 11.   Income Taxes

The following table provides details of income taxes:

	Three Months Ended						Six Months Ended
	June 30,						June 30,
	2017			2016			2017			2016
Income before income taxes	$	12,752		$	10,593		$	22,359		$	30,154
Provision for income taxes	$	3,559		$	2,992		$	6,015		$	8,614
Effective tax rate	27.9		%	28.2		%	26.9		%	28.6		%

The income tax provision for the three and six months endedJune 30, 2017 was computed based on the Company’s annual forecast of profit by jurisdiction and forecasted effective tax rate for the year. The changes in the Company’s effective tax rate for the three and six months endedJune 30, 2017 compared to the same period for the prior year are primarily due to changes in the mix of forecasted earnings by jurisdictions and the recording of excess tax benefits for stock compensation related to the adoption of FASB ASU No. 2016-09.

The Company currently has a partial valuation allowance recorded against certain foreign and state net operating loss and credit carryforwards where the realizability of such deferred tax assets is substantially in doubt. Each quarter, the Company assesses the likelihood that it will be able to recover its deferred tax assets. The Company considers available evidence, both positive and negative, including forecasted earnings in assessing the need for a valuation allowance. As a result of the Company’s analysis, it concluded that it is more likely than not that a portion of its deferred tax assets will not be realized. Therefore, the Company continues to provide a valuation allowance against certain deferred tax assets. The Company continues to monitor

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available evidence and may reverse some or all of the remaining valuation allowance in future periods, if appropriate. The Company has a recorded valuation allowance against certain of its deferred tax assets of $1,924 as of June 30, 2017 and December 31, 2016.

NOTE 12.   Earnings Per Share

Basic earnings per share is calculated using the weighted average number of shares of common stock outstanding during the period.  Diluted earnings per share is computed in the same manner and also gives effect to all dilutive common equivalent shares outstanding during the period.  Potential common shares that would have the effect of increasing diluted earnings per share are considered to be anti-dilutive. In accordance with U.S. GAAP, these shares were not included in calculating diluted earnings per share.

The following table sets forth the weighted average number of stock options and restricted stock units that have been excluded from the calculation of diluted earnings per share as their effect would have been antidilutive:

	Three Months Ended June 30,		Six Months Ended June 30,
	2017	2016	2017	2016
Stock options	—	4	—	78
Restricted stock units	1	—	13	—
Total	1	4	13	78

The Company’s basic and diluted earnings per share amounts are as follows:

	Three Months Ended June 30,				Six Months Ended June 30,
	2017		2016		2017		2016
Numerator:
Net income	$	9,193	$	7,601	$	16,344	$	21,540
Denominator:
Basic earnings per share - weighted average shares outstanding	31,501		30,779		31,397		30,869
Effect of potential dilutive securities:
Employee stock options and restricted stock units - dilutive shares	645		563		704		630
Convertible senior notes - dilutive shares	—		412		—		206
Warrant - dilutive shares	—		—		3		—
Diluted earnings per share - weighted average shares outstanding	32,146		31,754		32,104		31,705
Earnings per share:
Basic	$	0.29	$	0.25	$	0.52	$	0.70
Diluted	$	0.29	$	0.24	$	0.51	$	0.68

NOTE 13.   Accumulated Other Comprehensive Loss

Comprehensive income includes net income, foreign currency translation adjustments, and net unrealized gains and losses on available-for-sale investments. See the Condensed Consolidated Statements of Comprehensive Income for the effect of the components of comprehensive income on the Company’s net income.

The components of accumulated other comprehensive loss, net of tax, are as follows:

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	Foreign currency translation adjustments			Net unrealized (gains) losses on available-for-sale investments			Accumulated other comprehensive loss (income)
Beginning Balance, December 31, 2016	$	2,742		$	37		$	2,779
Net current period other comprehensive income	(1,253		)	(45		)	(1,298		)
Reclassifications	—			—			—
Ending balance, June 30, 2017	$	1,489		$	(8	)	$	1,481

NOTE 14.   Segment Reporting and Geographic Information

The Company is engaged in the design, development, manufacture and support of high-performance control metrology, defect inspection, advanced packaging lithography and data analysis systems used by microelectronics device manufacturers. The Company and its subsidiaries currently operate in a single operating segment: the design, development, manufacture and support of high-performance process control defect inspection and metrology, advanced packaging lithography, and process control software systems used by microelectronics device manufacturers, and therefore the Company has one reportable segment. The Company’s chief operating decision maker is the Chief Executive Officer. The chief operating decision maker allocates resources and assesses performance of the business and other activities at the reporting segment level.

The following table lists the different sources of revenue:

	Three Months Ended								Six Months Ended
	June 30,								June 30,
	2017				2016				2017				2016
Systems and software:
Process Control	$	47,711	71	%	$	34,464	55	%	$	91,586	72	%	$	70,922	61	%
Lithography	3,533		5	%	11,480		18	%	3,550		2	%	11,650		10	%
Software	6,895		10	%	7,780		12	%	14,394		11	%	15,202		13	%
Parts	7,348		11	%	5,993		10	%	13,678		11	%	13,153		11	%
Services	1,931		3	%	2,984		5	%	4,889		4	%	6,136		5	%
Total revenue	$	67,418	100	%	$	62,701	100	%	$	128,097	100	%	$	117,063	100	%

For geographical revenue reporting, revenues are attributed to the geographic location in which the product is shipped.  Revenue by geographic region is as follows:

	Three Months Ended				Six Months Ended
	June 30,				June 30,
	2017		2016		2017		2016
United States	$	9,182	$	5,646	$	18,190	$	13,034
Taiwan	20,323		14,535		34,156		36,570
Japan	3,468		3,164		6,677		6,101
China	5,904		10,824		20,005		19,649
South Korea	14,221		2,226		23,751		3,849
Singapore	1,945		14,879		5,211		21,926
Other Asia	1,444		1,674		1,559		2,545
Germany	4,789		4,235		7,869		4,932
Other Europe	6,142		5,518		10,679		8,457
Total revenue	$	67,418	$	62,701	$	128,097	$	117,063

The following customers each accounted for more than 10% of total revenues for the indicated periods.

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	Six Months Ended
	June 30,
	2017		2016
Customer A	11.2	%	1.6	%
Customer B	6.0	%	13.4	%
Customer C	0.9	%	10.2	%

NOTE 15.   Share Repurchase Authorization

In January 2015, the Board of Directors authorized the Company to repurchase up to 3,000 shares of the Company’s common stock with no established end date. The authorization allows for repurchases to be made in the open market or through negotiated transactions from time to time. During the three and six month periods ended June 30, 2017, the Company did not repurchase any shares of common stock pursuant to the share repurchase authorization. At June 30, 2017, there were 711 shares available for future stock repurchases under this repurchase authorization. Shares of common stock purchased under the share repurchase authorization are retired.

The following table summarizes the Company’s stock repurchases for the three and six month periods ended June 30, 2017 and 2016, respectively:

	Three Months Ended				Six Months Ended
	June 30,				June 30,
	2017		2016		2017		2016
Shares of common stock repurchased	—		245		—		615
Cost of stock repurchased		$—		$3,344		$—		$8,045
Average price paid per share		$—		$13.63		$—		$13.07

NOTE 16.   Subsequent Event

Subsequent to June 30, 2017 and through the Company’s financial statement issuance date of August 3, 2017, the Company entered into an agreement  with Camtek on July 28, 2017 resolving each of the three Litigations discussed further in Note 8, “Commitments and Contingencies”, of these Notes to Condensed Consolidated Financial Statements.  Pursuant to the Agreement, in exchange for a $13,000 cash payment from Camtek to be paid to the Company, the parties each agreed to dismiss with prejudice and release the other party from all claims, damages and expenses incurred or raised in the Litigations.

Item 2.   Management’s Discussion and Analysis of Financial Condition and Results of Operations

Certain statements in this Quarterly Report on Form 10-Q of Rudolph Technologies, Inc. (the “Company” or “Rudolph”) are forward-looking statements, including those concerning our business momentum and future growth, acceptance of our products and services, our ability to deliver both products and services consistent with our customers’ demands and expectations and to strengthen our market position, our expectations of the semiconductor market outlook, future revenues, gross profits, research and development and engineering expenses, selling, general and administrative expenses, product introductions, technology development, manufacturing practices, cash requirements, our dependence on certain significant customers and anticipated trends and developments in and management plans for our business and the markets in which we operate, our anticipated revenue as a result of acquisitions, and our ability to be successful in managing our cost structure and cash expenditures and results of litigation. The statements contained in this Quarterly Report on Form 10-Q that are not purely historical are forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, Section 21E of the Securities Exchange Act of 1934, as amended (the “Exchange Act”), and within the meaning of the Private Securities Litigation Reform Act of 1995. Forward-looking statements may be identified by words such as, but not limited to, “anticipate,” “believe,” “expect,” “intend,” “plan,” “should,” “may,” “could,” “will” and words or phrases of similar meaning, as they relate to our management or us.

The forward-looking statements contained herein reflect our expectations with respect to future events and are subject to certain risks, uncertainties and assumptions. Actual results may differ materially from those included in such forward-looking statements for a number of reasons including, but not limited to, the following: variations in the level of orders which can be affected by general economic conditions, seasonality and growth rates in the semiconductor manufacturing industry and in the markets served by our customers, the global economic and political climates, difficulties or delays in product functionality or performance, the delivery performance of sole source vendors, the timing of future product releases, failure to respond adequately

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to either changes in technology or customer preferences, changes in pricing by us or our competitors, our ability to manage growth, changes in management, risk of nonpayment of accounts receivable, changes in budgeted costs, our ability to leverage our resources to improve our position in our core markets, our ability to weather difficult economic environments, our ability to open new market opportunities and target high-margin markets, the strength/weakness of the back-end and/or front-end semiconductor market segments, our ability to successfully integrate acquired businesses into our business and fully realize, or realize within the expected time frame, the expected combination benefits from the acquisitions, and the “Risk Factors” set forth in Item 1A in our Annual Report on Form 10-K for the year ended December 31, 2016 (“2016 10-K”) and any subsequently filed Quarterly Reports on Form 10-Q. The forward-looking statements reflect our position as of the date of this report and we undertake no obligation to update any forward-looking statements, whether as a result of new information, future events or otherwise, except as required by law.

Critical Accounting Policies

The preparation of condensed consolidated financial statements and related disclosures in conformity with accounting principles generally accepted in the United States (“U.S. GAAP”) requires management to make judgments, assumptions and estimates that affect the amounts reported. Certain of these significant accounting policies are considered to be critical accounting policies, as defined below.

A critical accounting policy is defined as one that is both material to the presentation of our condensed consolidated financial statements and requires management to make difficult, subjective or complex judgments that could have a material effect on our financial condition or results of operations. Specifically, these policies have the following attributes: (1) we are required to make judgments and assumptions about matters that are highly uncertain at the time of the estimate; and (2) different estimates we could reasonably have used, or changes in the estimate that are reasonably likely to occur, could have a material effect on our financial position and results of operations.

Estimates and assumptions about future events and their effects cannot be determined with certainty. We base our estimates on historical experience and on various other assumptions believed to be applicable and reasonable under the circumstances. These estimates may change as new events occur, as additional information is obtained and as our operating environment changes. In addition, management is periodically faced with uncertainties, the outcomes of which are not within our control and will not be known for prolonged periods of time. Certain of these uncertainties are discussed in our 2016 10-K in the sections entitled “Risk Factors” and “Management’s Discussion and Analysis of Financial Condition and Results of Operations.” Based on a critical assessment of our accounting policies and the underlying judgments and uncertainties affecting the application of those policies, we believe that our condensed consolidated financial statements are fairly stated in accordance with U.S. GAAP, and provide a fair presentation of our financial position and results of operations.

For more information, please see our critical accounting policies as previously disclosed in our 2016 10-K.

See Note 1 to the condensed consolidated financial statements included in this Quarterly Report on Form 10-Q regarding the impact of recent accounting pronouncements on our financial position and results of operations.

Overview

We are a worldwide leader in the design, development, manufacture and support of process control defect inspection and metrology, advanced packaging lithography, and data analysis systems and software used by microelectronic device manufacturers. We provide process and yield management solutions used in both wafer processing and final manufacturing through a family of standalone systems for macro-defect inspection, lithography, probe card test and analysis, and transparent and opaque thin film measurements. All Rudolph systems feature sophisticated software and production-worthy automation. Rudolph systems are backed by worldwide customer support.

Our business is affected by the annual spending patterns of our customers on semiconductor capital equipment. The amount that our customers devote to capital equipment spending depends on a number of factors, including general worldwide economic conditions as well as other economic drivers such as personal computer, tablet, cell phone, other personal electronic devices and automotive sales. Current forecasts by industry analysts for the semiconductor device manufacturing industry project year-over-year increase in capital equipment spending of approximately 8% - 12% for 2017. Our revenues and profitability tend to follow the trends of certain segments within the semiconductor market.

Historically, a significant portion of our revenues in each quarter and year has been derived from sales to relatively few customers, and we expect this trend to continue. For the six month period ended June 30, 2017 and for the years ended December 31, 2016, 2015 and 2014, sales to customers that individually represented at least five percent of our revenues accounted for 29.6%, 34.5%, 23.3%, and 23.9% of our revenues, respectively.

We do not have purchase contracts with any of our customers that obligate them to continue to purchase our products, and they could cease purchasing products from us at any time. A delay in purchase or a cancellation by any of our large customers

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could cause quarterly revenues to vary significantly. In addition, during a given quarter, a significant portion of our revenues may be derived from the sale of a relatively small number of systems, with one customer accounting for 11.2% of our total revenues for the six month period ended June 30, 2017. The following table lists the average selling price for our systems:

System	Average Selling Price Per System
Process Control	$250,000 to $1.8 million
Lithography steppers	$3.0 million to $8.0 million

A significant portion of our revenues has been derived from customers outside of the United States.  A substantial portion of our international sales are denominated in U.S. dollars. We expect that revenues generated from customers outside of the United States will continue to account for a significant percentage of our revenues. 

The sales cycle for our systems typically ranges from six to twenty-four months, and can be longer when our customers are evaluating new technology. Due to the length of these cycles, we invest significantly in research and development and sales and marketing in advance of generating revenues related to these investments.

Results of Operations for the Three and Six Month Periods EndedJune 30, 2017 and 2016

Revenues. Our revenues are primarily derived from the sale of our systems, services, spare parts and software licensing. Our revenues of $67.4 million increased 7.5% for the three months ended June 30, 2017 compared to the same period in the prior year when revenues totaled $62.7 million. For the six month period ended June 30, 2017 and 2016, our revenues totaled $128.1 million and $117.1 million, respectively, representing a year-over-year increase of 9.4%.

The following table lists, for the periods indicated, the different sources of our revenues in dollars (thousands) and as percentages of our total revenues:

	Three Months Ended								Six Months Ended
	June 30,								June 30,
	2017				2016				2017				2016
Systems and software:
Process Control	$	47,711	71	%	$	34,464	55	%	$	91,586	72	%	$	70,922	61	%
Lithography	3,533		5	%	11,480		18	%	3,550		2	%	11,650		10	%
Software	6,895		10	%	7,780		12	%	14,394		11	%	15,202		13	%
Parts	7,348		11	%	5,993		10	%	13,678		11	%	13,153		11	%
Services	1,931		3	%	2,984		5	%	4,889		4	%	6,136		5	%
Total revenue	$	67,418	100	%	$	62,701	100	%	$	128,097	100	%	$	117,063	100	%

Total systems and software revenue increased $11.8 million for the six months ended June 30, 2017 compared to the six months ended June 30, 2016. Process control system revenue increased $20.7 million for the six months ended June 30, 2017, compared to the same period in the prior year primarily due to higher metrology system sales in the 2017 period. Lithography system revenue decreased $8.1 million for the six months ended June 30, 2017, compared to the same period in the prior year, primarily due to the shipment of a JetStep G system during the second quarter of 2016. Software revenue decreased slightly for the six months ended June 30, 2017, compared to six months ended June 30, 2016. Systems revenue generated by our latest product releases and major enhancements in each of our product families amounted to 74% and 72% of total revenues for the three and six month periods ended June 30, 2017, compared to 79% and 74% of total revenues for the three and six month periods ended June 30, 2016.  The year-over-year decrease in total services revenue for the six months ended June 30, 2017, is primarily due to decreased spending by our customers on system upgrades and repairs of existing systems. Parts and services revenues are generated from part sales, maintenance service contracts, system upgrades, as well as time and material billable service calls. 

Deferred revenues of $11.2 million were recorded in the Condensed Consolidated Balance Sheet within the caption “Deferred revenue” and $1.3 million were recorded in “Other non-current liabilities” at June 30, 2017. Deferred revenue primarily consisted of $5.8 million for deferred maintenance agreements, $4.5 million for systems awaiting acceptance and $2.2 million for outstanding deliverables.

Gross Profit. Our gross profit has been and will continue to be affected by a variety of factors, including manufacturing efficiencies, provision for excess and obsolete inventory, pricing by competitors or suppliers, new product introductions, production volume, customization and reconfiguration of systems, international and domestic sales mix, system and software product mix

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and parts and service margins. Our gross profit was $35.5 million and $67.3 million for the three and six month periods ended June 30, 2017, compared to $34.2 million and $63.2 million for the same periods in the prior year. Our gross profit represented 52.6% of our revenues for both the three and six month periods ended June 30, 2017. For the three and six months ended June 30, 2016, gross profit represented 54.5% and 54.0% of our revenues.  The decrease in gross profit as a percentage of revenue for the six month period ended June 30, 2017 compared to the same period in the prior year is primarily due to a change in our product sales mix.

Operating Expenses. Major components of operating expenses include research and development as well as selling, general and administrative expenses. 

Research and Development.  Our research and development expense was $12.1 million and $24.2 million for the three and six month periods ended June 30, 2017, compared to $11.9 million and $24.3 million for the same periods in the prior year.  Research and development expense represented 18.0% and 18.9% of our revenues for the three and six month periods ended June 30, 2017, compared to 18.9% and 20.8% of revenues for the prior year periods.  Research and development expenses decreased for the six month period year-over-year due to decreased litigation expenses, partially offset by increased project and compensation costs.

Selling, General and Administrative.     Our selling, general and administrative expense was $10.1 million and $19.8 million for the three and six month periods ended June 30, 2017, compared to $9.5 million and $19.0 million for the same periods in the prior year.  Selling, general and administrative expense represented 15.0% and 15.4% of our revenues for the three and six month periods ended June 30, 2017, compared to 15.1% and 16.2% of our revenues for the same periods in the prior year.  The year-over-year dollar increase for the six month period ended June 30, 2017 in selling, general and administrative expense was primarily due to an increase in compensation costs.

Income Taxes.  We recorded an income tax provision of $3.6 million and $6.0 million for the three and six month periods ended June 30, 2017. Our effective tax rate of 27.9% differs from the statutory rate of 35% for the six month period ended June 30, 2017 primarily due to a projected IRC Section 199 manufacturing deduction, research and development credit and an excess tax benefit for stock compensation related to the adoption of FASB ASU No. 2016-09. For the three and six month periods ended June 30, 2016, we recorded an income tax provision of $3.0 million and $8.6 million, respectively.

We currently have a partial valuation allowance recorded for certain foreign and state loss and credit carryforwards where the realizability of such deferred tax assets is substantially in doubt. Each quarter we assess the likelihood that we will be able to recover our deferred tax assets primarily relating to state research and development credits. We consider available evidence, both positive and negative, including historical levels of income, expectations and risks associated with estimates of future taxable income and ongoing prudent and feasible tax planning strategies in assessing the need for a valuation allowance. As a result of our analysis, we concluded that it is more likely than not that a portion of our net deferred tax assets will not be realized. Therefore, we continue to provide a valuation allowance against certain net deferred tax assets. We continue to monitor available evidence and may reverse some or all of the valuation allowance in future periods, if appropriate.

Litigation. As discussed in Part I, Item 3. “Legal Proceedings” of our 2016 10-K and Note 8 in the accompanying condensed consolidated financial statements included in this Quarterly Report on Form 10-Q, we are subject to separate legal proceedings and claims, which include, among other things, our litigation with Camtek, Ltd. (“Camtek”).

Liquidity and Capital Resources

At June 30, 2017, we had $148.9 million of cash, cash equivalents and marketable securities and $244.9 million in working capital.  At December 31, 2016, we had $125.7 million of cash, cash equivalents and marketable securities and $226.7 million in working capital.

Operating activities provided $30.0 million in net cash and cash equivalents for the six month period ended June 30, 2017.  The net cash and cash equivalents provided by operating activities during the six month period ended June 30, 2017 was primarily a result of net income, adjusted to exclude the effect of non-cash operating charges of $24.8 million and an increase in cash provided from operating assets and liabilities of $5.2 million. Operating activities provided $12.2 million in net cash and cash equivalents during the six month period ended June 30, 2016 primarily as a result of net income, adjusted to exclude the effect of non-cash operating charges of $17.1 million, partially offset by a decrease in cash used from operating assets and liabilities of $4.9 million.

Net cash and cash equivalents used in investing activities during the six month period ended June 30, 2017 of $8.3 million was due to the purchase of marketable securities of $62.5 million and capital expenditures of $5.3 million, partially offset by proceeds from sales of marketable securities of $59.5 million.  Net cash and cash equivalents provided by investing activities during the six month period ended June 30, 2016 of $18.0 million was due to proceeds from sales of marketable securities of $90.6 million, partially offset by the purchase of marketable securities of $70.4 million and capital expenditures of $2.2 million.

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Net cash and cash equivalents used in financing activities during the six month period ended June 30, 2017 of $2.4 million was due primarily to tax payments related to shares withheld for share-based compensation plans of $1.3 million, the redemption of stock warrants of $1.0 million and payment of contingent consideration for acquired business of $0.4 million, partially offset by proceeds from sales of shares through share-based compensation plans of $0.3 million. For the six month period ended June 30, 2016, financing activities used $9.4 million, due primarily to the repurchase of shares of our common stock of $8.0 million and tax payments related to shares withheld for share-based compensation plans of $1.6 million.

From time to time, we evaluate whether to acquire new or complementary businesses, products and/or technologies. We may fund all of a portion of the purchase price of these acquisitions in cash, stock, or a combination of cash and stock.

In January 2015, our Board of Directors authorized the Company to repurchase up to 3.0 million shares of our common stock with no established end date. The authorization allows for repurchases to be made in the open market or through negotiated transactions from time to time. During the six months ended June 30, 2017, no shares of common stock were repurchased. At June 30, 2017, 0.7 million shares remained available for future stock repurchase under this repurchase authorization. Shares of common stock purchased under the share repurchase authorization are being retired. For further information, see Note 15 in the accompanying condensed consolidated financial statements.

We have a credit agreement with a bank that provides for a line of credit which is secured by the marketable securities we have with the bank. We are permitted to borrow up to 70% of the value of eligible securities held at the time the line of credit is accessed. The available line of credit as of June 30, 2017 was approximately $86 million with an available interest rate of 2.8%. The credit agreement is available to us until such time that either party terminates the arrangement at their discretion. To date, we have not utilized this line of credit.

Our future capital requirements will depend on many factors, including the timing and amount of our revenues and our investment decisions, which will affect our ability to generate additional cash. We expect that our existing cash, cash equivalents, marketable securities and availability under our line of credit will be sufficient to meet our anticipated cash requirements for working capital, capital expenditures and other cash needs for the next twelve months. Thereafter, if cash generated from operations and financing activities is insufficient to satisfy our working capital requirements, we may seek additional funding through bank borrowings, sales of securities or other means. There can be no assurance that we will be able to raise any such capital on terms acceptable to us or at all.

Item 3.    Quantitative and Qualitative Disclosures about Market Risk

Interest Rate and Credit Market Risk

We are exposed to changes in interest rates and market liquidity including our investments in certain available-for-sale securities. Our available-for-sale securities consist of fixed and variable rate income investments (municipal notes, municipal bonds and corporate bonds). We continually monitor our exposure to changes in interest rates, market liquidity and credit ratings of issuers for our available-for-sale securities. It is possible that we are at risk if interest rates, market liquidity or credit ratings of issuers change in an unfavorable direction. The magnitude of any gain or loss will be a function of the difference between the fixed or variable rate of the financial instrument and the market rate, and our financial condition and results of operations could be materially affected. Based on a sensitivity analysis performed on our financial investments held as of June 30, 2017, an immediate adverse change of 10% in interest rates (e.g. 3.00% to 3.30%) would result in an immaterial decrease in the fair value of our available-for-sale securities and would not have a material impact on our consolidated financial position, results of operations or cash flows.

Foreign Currency Risk

A substantial portion of our systems and software sales are denominated in U.S. dollars with the exception of Japan and, as a result, we have relatively little exposure to foreign currency exchange risk with respect to these sales. Substantially all our sales in Japan are denominated in Japanese yen. From time to time, we may enter into forward exchange contracts to economically hedge a portion of, but not all, existing and anticipated foreign currency denominated transactions expected to occur within 12 months. The change in fair value of the forward contracts is recognized in “Other (income) expense” in the Condensed Consolidated Statements of Operations for each reporting period. As of June 30, 2017, we had nineteen forward contracts outstanding with a total notional contract value of $3.1 million. We do not use derivative financial instruments for trading or speculative purposes.

We have branch operations in Taiwan, Singapore and South Korea and wholly-owned subsidiaries in Europe, Japan and China.  Our international subsidiaries and branches operate primarily using local functional currencies.  A hypothetical 10% appreciation or depreciation in the U.S. dollar relative to the reporting currencies of our foreign operations at June 30, 2017 would have affected the foreign-currency-denominated non-operating expenses of our foreign operations by approximately $0.8 million. We cannot accurately predict future exchange rates or the overall impact of future exchange rate fluctuations on our business, results of operations and financial condition.

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Item 4.  Controls and Procedures

We maintain a set of disclosure controls and procedures, as defined in Rule 13a-15(e) or Rule 15d-15(e) under the Exchange Act, designed to ensure that information required to be disclosed by us in reports that we file or submit under the Exchange Act is recorded, processed, summarized and reported within the time periods specified in SEC rules and forms and that such information is accumulated and communicated to our management, including our Chief Executive Officer (CEO) and Chief Financial Officer (CFO), as appropriate, to allow for timely decisions regarding required disclosure. The disclosure controls and procedures are designed to provide reasonable assurance of achieving the desired control objectives. 

Scope of the Controls Evaluation

The evaluation of our disclosure controls and procedures included a review of the controls’ objectives and design, our implementation of the controls and the effect of the controls on the information generated for use in this Quarterly Report on Form 10-Q. In the course of the evaluation, we sought to identify data errors, control problems or acts of fraud and confirm that appropriate corrective actions, if any, including process improvements, were being undertaken. This type of evaluation is performed on a quarterly basis so that the conclusions of management, including the CEO and CFO, concerning the effectiveness of the controls can be reported in our Quarterly Reports on Form 10-Q and in our Annual Reports on Form 10-K. Many of the components of our disclosure controls and procedures are also evaluated on an ongoing basis by other personnel in our accounting, finance, internal audit and legal functions. The overall goals of these various evaluation activities are to monitor our disclosure controls and procedures and to modify them on an ongoing basis as necessary. A control system can provide only reasonable, not absolute, assurance that the control system’s objectives will be met. Because of the inherent limitations in all control systems, no evaluation of controls can provide absolute assurance that all control issues and instances of fraud, if any, have been detected. Over time, controls may become inadequate because of changes in conditions or deterioration in the degree of compliance with policies or procedures. Because of inherent limitations in a cost effective control system, misstatements due to error or fraud may occur and not be detected.

Conclusions

As of June 30, 2017, an evaluation of our disclosure controls and procedures was carried out under the supervision and with the participation of our management, including the CEO and CFO. Based on this evaluation, the CEO and CFO have concluded that our disclosure controls and procedures were effective at the reasonable assurance level as of the end of the period covered by this Quarterly Report on Form 10-Q.

Changes in Internal Control over Financial Reporting

There has been no change in our internal control over financial reporting that occurred during the quarter ended June 30, 2017 that has materially affected, or is reasonably likely to materially affect, our internal control over financial reporting.

PART II    OTHER INFORMATION

Item 1.   Legal Proceedings

For a description of our previously reported legal proceedings refer to “Part I, Item 3 - Legal Proceedings” in our 2016 10-K, as updated in Note 8 in the accompanying unaudited condensed consolidated financial statements.

We are party to other ordinary and routine litigation incidental to our business. We do not expect the outcome of any pending litigation to have a material adverse effect on our consolidated financial position or results of operations.

Item 1A.    Risk Factors

There have been no material changes to our risk factors discussed in Part I, Item 1A - Risk Factors in our 2016 10-K.

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Item 2.    Unregistered Sales of Equity Securities and Use of Proceeds

In January 2015, our Board of Directors authorized the Company to repurchase up to 3,000 thousand shares of our common stock with no established end date. The authorization allows for repurchases to be made in the open market or through negotiated transactions from time to time. During the six months ended June 30, 2017, the Company repurchased no shares of common stock. At June 30, 2017, 711 thousand shares remained available for future stock repurchase under this repurchase authorization. Shares of common stock purchased under the share repurchase authorization are being retired. For further information, see Note 15 in the accompanying condensed consolidated financial statements.

In addition to our share repurchase program, we withhold common stock shares associated with net share settlements to cover tax withholding obligations upon the vesting of restricted stock unit awards under our equity incentive program. During the three and six months endedJune 30, 2017, we withheld 3.9 thousand shares and 35.9 thousand shares through net share settlements, respectively. For the three and six month periods ended June 30, 2017 net share settlements cost were $88.7 thousand and $815.8 thousand, respectively. Please refer to Note 9 in the accompanying condensed consolidated financial statements for further additional information regarding our share-based compensation plans.

The following table provides details of common stock purchased and withheld during the three month period ended June 30, 2017 (in thousands, except per share data):

Period	Total Number of Shares Purchased and Withheld	Average Price Paid per Share		Total Number of Shares Purchased as Part of Publicly Announced Program	Maximum Number of Shares that May Yet Be Purchased Under the Program
April 1, 2017 - April 30, 2017	3.6	$	22.58	—	711
May 1, 2017 - May 31, 2017	0.3	$	24.30	—	711
June 1, 2017 - June 30, 2017	—	$	—	—	711
Three months ended June 30, 2017	3.9	$	22.70	—	711

Item 3.    Defaults Upon Senior Securities

None.

Item 4.    Mine Safety Disclosures

None.

Item 5.    Other Information

Decision Regarding the Frequency of Future Advisory Votes on Executive Compensation

At the Company’s annual meeting of stockholders held on May 17, 2017, the Company held an advisory vote regarding how frequently the Company should conduct an advisory vote on the compensation of our named executive officers. On  an  advisory  basis,   the  Company's  stockholders  indicated   their preference for  the advisory  vote on  executive compensation  to be  held annually. In accordance with the voting results for this item, the Company intends to  continue to provide stockholders  with  an annual  opportunity to  cast  a    non-binding  advisory  vote  on  executive  compensation  until  the  next required advisory  vote  on the  frequency  of future  advisory  votes  on executive compensation. 

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Item 6.   Exhibits

Exhibit No.	Description
10.12	Amended form of Restricted Stock Unit Agreement pursuant to the Rudolph Technologies, Inc. 2009 Stock Plan.
31.1	Certification of Michael P. Plisinski, Chief Executive Officer, pursuant to Securities Exchange Act Rule 13a-14(a).
31.2	Certification of  Steven R. Roth, Chief Financial Officer, pursuant to Securities Exchange Act Rule 13a-14(a).
32.1	Certification pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, signed by Michael P. Plisinski, Chief Executive Officer of Rudolph Technologies, Inc.
32.2	Certification pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, signed by Steven R. Roth, Chief Financial Officer of Rudolph Technologies, Inc.
101.INS	XBRL Instance Document
101.SCH	XBRL Taxonomy Extension Schema Document
101.CAL	XBRL Taxonomy Extension Calculation Linkbase Document
101.DEF	XBRL Taxonomy Extension Definition Linkbase Document
101.LAB	XBRL Taxonomy Extension Label Linkbase Document
101.PRE	XBRL Taxonomy Extension Presentation Linkbase Document

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SIGNATURES

Pursuant to the requirements of the Securities Exchange Act of 1934, the Registrant has duly caused this report to be signed on its behalf by the undersigned, thereunto duly authorized.

		Rudolph Technologies, Inc.
Date:	August 3, 2017	By:	/s/  Michael P. Plisinski
		Michael P. Plisinski
		Chief Executive Officer
Date:	August 3, 2017	By:	/s/  Steven R. Roth
		Steven R. Roth
		Senior Vice President, Chief Financial Officer and Principal Accounting Officer

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EXHIBIT INDEX

Exhibit No.	Description
10.12	Amended form of Restricted Stock Unit Agreement pursuant to the Rudolph Technologies, Inc. 2009 Stock Plan.
31.1	Certification of Michael P. Plisinski, Chief Executive Officer, pursuant to Securities Exchange Act Rule 13a-14(a).
31.2	Certification of  Steven R. Roth, Chief Financial Officer, pursuant to Securities Exchange Act Rule 13a-14(a).
32.1	Certification pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, signed by Michael P. Plisinski, Chief Executive Officer of Rudolph Technologies, Inc.
32.2	Certification pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, signed by Steven R. Roth, Chief Financial Officer of Rudolph Technologies, Inc.
101.INS	XBRL Instance Document
101.SCH	XBRL Taxonomy Extension Schema Document
101.CAL	XBRL Taxonomy Extension Calculation Linkbase Document
101.DEF	XBRL Taxonomy Extension Definition Linkbase Document
101.LAB	XBRL Taxonomy Extension Label Linkbase Document
101.PRE	XBRL Taxonomy Extension Presentation Linkbase Document

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EX-10.12

Exhibit 10.12

Rudolph Technologies, Inc.

Employee Restricted Stock Unit Purchase Agreement

THIS AGREEMENT (“Agreement”), dated _________________, 20___ (the “Award Date”), is made between Rudolph Technologies, Inc., a Delaware corporation, hereinafter referred to as the “Company,” and ________________________ (the “Participant”).

1. Definitions. All capitalized terms used in this Agreement without definition shall have the meanings ascribed in Company’s 2009 Stock Plan, as amended from time to time (the “Plan”). In addition, the following definition shall apply:

• “Retirement Eligible” shall mean the Participant has achieved a combination of age plus years of service with the company totaling 70, with a base minimum age of 58 years old and a minimum service term of five (5) years.

• “Retirement” shall mean Participant has become Retirement Eligible and has formally notified the Company of his/her intention to retire from the employ of the Company on a date certain and does so retire or as otherwise approved by the Administrator.

2. Award of Restricted Stock Units.

(a)Award. In consideration of Participant’s agreement to remain in the employ of Company or one of its Subsidiaries, and for other good and valuable consideration, the Company hereby issues to Participant, as of the Award Date, the grant of Restricted Stock Units (“RSUs”) covering shares (“Shares”) of common stock of the Company (“Common Stock”) as described in Attachment I - Notice of Award (the “Notice of Award”) attached to this Agreement (the “Award”). The number of RSUs subject to the Award (which shall be subject to adjustment in accordance with Section 15 of the Plan) is set forth in the Notice of Award. Each RSU represents the right to receive one Share, subject to the terms and conditions of this Agreement. Upon granting of the Award, all RSUs shall be credited to Participant’s employee stock plan account established at the stock plan administration service determined by Company (the “Stock Service”). The current Stock Service is set forth in the Notice of Award.

(b)Vested Shares to be Issued in Book Entry Form. Upon vesting of the RSUs and the satisfaction of all other applicable conditions set forth in this Agreement, the Company shall cause uncertificated Shares to be issued to Participant’s account. Shares to be delivered to Participant under the terms of this Award shall be delivered to Participant no later than two and one-half months following the last day of the year that includes the date of vesting and lapse of Restrictions.

(c)Plan. The Award granted hereunder is subject to the terms and provisions of the Plan, including without limitation, Article 15(a) thereof. The Award constitutes Restricted Stock Units pursuant Section 8 of the Plan.

3. Restrictions.

(a)Forfeiture. Except only as may otherwise be expressly set forth in (i) any employment, severance or change in control agreement of the Company or a Subsidiary with Participant, or (ii) Section 3(g) below related to the Retirement of the Participant, any Award which is not vested as of the date Participant ceases to be an employee of Company or one of its Subsidiaries shall thereupon be forfeited immediately and terminate without any further action by Company.

(b)Vesting and Lapse of Restrictions. Subject to the terms of this Agreement, the RSUs covered by this Award shall vest and all Restrictions thereon shall lapse in accordance with the schedule set forth in the Notice of Award, provided in each case that Participant remains continuously as an employee of Company or a Subsidiary from the Award Date through the particular scheduled vesting date therefor (except only as may otherwise be expressly set forth in (i) any employment, severance or change in control agreement of the Company or a Subsidiary with Participant, or (ii) Section 3(g) below related to the Retirement of the Participant). For purposes of this Agreement, “Restrictions” shall mean the exposure to forfeiture set forth in this Award.

(c)Acceleration of Vesting. Notwithstanding any other provision of this Award, any time-based Award shall become fully vested and all Restrictions applicable to such Award shall lapse in the event of a Change in Control event (as defined in Section 2(h) of the Plan) and the successor or acquiring corporation or an affiliate thereof does not assume or substitute for this Award in accordance with Section 15(c)(i) of the Plan. Should the successor or acquiring corporation or an affiliate thereof assume or substitute for the time-based Award in accordance with Section 15(c)(i) of the Plan, then no accelerated vesting or lapse of Restrictions of this Award shall apply. With regard to any performance-based Award, in the event of a Change in Control event, the performance conditions will be deemed to have been achieved at the target level and the Participant will be deemed to have earned the target number of RSUs that were subject to the Award.

(d)Tax Withholding; Issuance of Uncertificated Shares for Participants Domiciled Outside the U.S. For Participants domiciled outside of the United States, the provisions set forth herein related to U.S. federal and/or state tax withholding do not apply. Shares shall be delivered to such Participant or his or her legal representative at the time the vesting requirements as provided in this Award shall have been satisfied. Participants domiciled outside the U.S. are advised to consult with a local tax advisor regarding the tax ramifications of the Award in their country of residence and assure compliance with such tax obligations.

(e)Tax Withholding for Participants Domiciled in U.S. Withholding Requirements. By accepting this Award, Participant agrees to make appropriate arrangements with the Company for the satisfaction, as of the applicable withholding date, of all applicable federal, state and local tax withholding requirements, including in connection with the vesting and settlement of this Award. No Shares will be issued until satisfaction of such applicable tax withholding has been received by the Company. Prior to the delivery of any Shares pursuant to this Award, the Company will have the power and the right to deduct or withhold an amount sufficient to satisfy federal, state, local, foreign or other taxes (including the Participant’s FICA obligation) required to be withheld with respect to the vesting or settlement of this Award.

(f)Withholding Arrangements. The Company pursuant to such procedures as it will specify from time to time, will permit Participant to satisfy such tax withholding obligation, in each case as of the applicable tax withholding date, by (without limitation and in such combinations as the Participant may elect):

(i) paying cash;

(ii) electing to have the Company withhold otherwise deliverable Shares having a Fair Market Value equal to the minimum statutory amount required to be withheld; or

(iii) delivering to the Company already-owned Shares having a Fair Market Value equal to the minimum statutory amount required to be withheld.

The Fair Market Value of the Shares to be withheld or delivered will be determined as of the date that the taxes are required to be withheld. Participant may elect to make prior arrangements with the Stock Service to sell Shares as of the vesting date and apply the appropriate amount of the proceeds thereof to the applicable tax withholding amount and remit any balance of the proceeds to Participant, provided that if Participant elects to have any Shares sold by the Stock Service or otherwise, any such proposed sale of Shares shall be in compliance with and satisfy all requirements and conditions under the Rudolph Technologies, Inc. Insider Trading Compliance Program.

(g)Retirement. Subject to the terms of this Agreement, in the event of the Retirement of the Participant, the RSUs shall vest based on:

(i)the vesting schedule set forth in the Notice of Award for time-based Awards; or

(ii) the actual performance results for performance-based Awards.

For clarity, in the event of the Participant’s Retirement, there will be no acceleration of an Award’s vesting schedule or forfeiture of unvested Awards.

4. Company Share Issuance Prerequisites. Company shall not be required to issue or deliver any Shares prior to the fulfillment of all of the following conditions:

(a)the admission of the Shares to listing on all stock exchanges on which such Common Stock is then listed;

(b)the completion of any registration or other qualification of the Shares under any state or federal law or under rulings or regulations of the Securities and Exchange Commission or other governmental regulatory body, which the Company shall, in its sole and absolute discretion, deem necessary and advisable;

(c)the obtaining of any approval or other clearance from any state or federal governmental agency that the Company shall, in its absolute discretion, determine to be necessary or advisable; and

(d)the lapse of any such reasonable period of time following the date the Restrictions lapse as the Company may from time to time establish for reasons of administrative convenience.

5. Restricted Stock Units Not Transferable. No RSUs or any interest or right therein or part thereof shall be liable for the debts, contracts or engagements of Participant or his or her successors in interest or shall be subject to disposition by transfer, alienation, anticipation, pledge, encumbrance, assignment or any other means whether such disposition be voluntary or involuntary or by operation of law by judgment, levy, attachment, garnishment or any other legal or equitable proceedings (including bankruptcy), and any attempted disposition thereof shall be null and void and of no effect; provided, however, that this Section 5 shall not prevent transfers by will or by applicable laws of descent and distribution if permitted under the Plan.

6.Rights as Stockholder. Until Participant has satisfied all requirements for vesting and the satisfaction of all conditions set forth in this Agreement and Shares have been issued to Participant, Participant shall not be deemed to be a shareholder or to have any of the rights of a shareholder with respect to any such Shares.

7.Not a Contract of Employment. Nothing in this Agreement or in the Plan shall confer upon Participant any right to continue to serve as an employee or other Service Provider of Company or any of its Subsidiaries.

8.Governing Law. The laws of the State of Delaware shall govern the interpretation, validity, administration, enforcement and performance of the terms of this Agreement and the Award regardless of the law that might be applied under principles of conflicts of laws.

9.Conformity to Securities Laws. Participant acknowledges that the Plan and this Award are intended to conform to the extent necessary with all provisions of the Securities Act of 1933, as amended, and the Exchange Act, and all regulations and rules promulgated thereunder by the Securities and Exchange Commission, including without limitation Rule 16b-3 under the Exchange Act. Notwithstanding anything herein to the contrary, the Plan shall be administered, and the Awards are granted, only in such a manner as to conform to such laws, rules and regulations.

10.Amendment, Suspension and Termination. The Awards may be wholly or partially amended or otherwise modified, suspended or terminated at any time or from time to time by the Compensation Committee of the Board of Directors of the Company, which is the Administrator of the Plan (the “Committee”), provided that, except as otherwise provided by the Plan, neither the amendment, suspension nor termination of this Agreement shall, without the consent of Participant, alter or impair any material rights of Participant under this Award.

11.Notices. Notices required or permitted hereunder shall be given in writing and shall be deemed effectively given upon personal delivery or upon deposit in the United States mail by certified mail, with postage and fees prepaid, addressed to Participant at his or her address then shown in Company records, and to Company at its principal executive office.

12.Severability. The provisions of this Agreement are severable and if any one or more provisions are determined to be illegal or otherwise unenforceable, in whole or in part, the remaining provisions will nevertheless be binding and enforceable.

13.Section 409A.

(a)This Award is intended to constitute a “short-term deferral” for purposes of Section 409A of the Internal Revenue Code of 1986, as amended (“Code”) and the rules and regulations promulgated thereunder and is intended to comply with the requirements of Section 409A of the Code so as not to be subject to taxes, interest or penalties under Section 409A of the Code. This Agreement shall be interpreted and administered to give effect to such intention and understanding.

(b)Notwithstanding anything in this Agreement to the contrary, any payment or issuance of Shares to be made to the Participant under this Award in connection with Participant’s separation from service shall not be made until the date six months and one day after the date of the Participant’s separation from service to the extent necessary to comply with Section 409A(a)(B)(i) of the Code and applicable Treasury regulations thereunder, after giving effect to the extent applicable to the short-term deferral exemption under Treasury Regulation §1.409A-1(b)(4) and the severance pay exemption under Treasury Regulation §1.409A-1(b)(9)(iii). Following any such six-month and one-day delay, all such delayed payments will be paid in a single lump sum on the date six months and one day after the Participant’s separation from service. For the purposes of this Agreement, “separation of service” means a separation from service as defined in Section 409A of the Code determined using the default provisions set forth in Treasury Regulation §1.409A-1(h) or any successor regulation thereto. Each and every payment or issuance of Shares made pursuant to this Award shall be deemed a separate payment or issuance and not a series of payments or issuances.

(c)If any provision of this Award would, in the reasonable, good faith judgment of the Committee, result or likely result in their position on the Participant, beneficiary or any other person claiming by or through the Participant, of any additional tax, accelerated taxation, interest or penalties under Section 409A of the Code, the Committee may, in its sole discretion, modify the terms of this Award or take any other such action, without the consent of the Participant or any spouse, beneficiary or any other person claiming by or through the Participant, in the manner that the Committee may reasonably and in good faith determine to be necessary or advisable to avoid the imposition of such additional tax, accelerated taxation, interest or penalties or otherwise comply with Sections 409A of the Code. However, nothing in this Agreement is intended to or shall create any obligation or liability on the part of the Company or the Committee or its members to modify the Agreement, the Award or any RSUs or other rights granted hereunder nor guarantee that the Participant will not be subject to additional taxes, accelerated taxation, interest or penalties under Section 409A of the Code.

Participant represents that he or she has read this Agreement and the Plan and is familiar with the terms and provisions of each. Participant acknowledges that the Award is issued pursuant to, and is subject to the terms and conditions of, the Plan, and Participant will be bound by the terms of the Plan as if it were set forth verbatim in this Agreement. Participant agrees to comply with all rules the Committee may establish from time to time with respect to the Plan. Participant agrees to accept as binding, conclusive and final all decisions or interpretations of the Committee with respect to any questions arising under the Plan or this Agreement. Participant further acknowledges and agrees that this Agreement (including the Plan) constitutes the entire agreement between the parties with respect to the Award and that this Agreement (including the Plan) supersedes any and all prior agreements, whether written or oral, between the parties with respect to the Award.

IN WITNESS WHEREOF, this Agreement has been executed and delivered by the parties hereto as of the date first set forth above.

RUDOLPH TECHNOLOGIES, INC.PARTICIPANT

By:_________________________________________________________

Name:Name:

Title:

ATTACHMENT I

NOTICE OF AWARD

Participant Information:

Participant Name: ________________________

Participant Residence Address:«STREET1»

«STREET2»

«CITY», «STATE» «ZIP»

«COUNTRY»

Participant Section 16 Status:Participant is is not a Section 16 Insider of Company.

Award Information:

Award Date: ___________________________

Aggregate number of Restricted Stock Units subject to the Award: __________________

Grant Number: ______________________

Type of Award: Time-based Performance-based

Vesting Schedule:

The time-based Award shall vest and Restrictions shall lapse with respect to _______ percent of the Shares subject to the Award (rounded down to the next whole number of shares) on each of the first ______ anniversaries of the Award Date.

The performance-based Award shall vest in full upon the conclusion of the performance period with the final number of shares earned contingent upon the meeting of the applicable performance criteria set forth in the associated performance plan document.

The Award shall vest and Restrictions shall lapse with respect to

_______________________________________________________________________________

_______________________________________________________________________________

_______________________________________________________________________________

Additional Vesting Requirements:

____________________________________________________________________________________

____________________________________________________________________________________

____________________________________________________________________________________

____________________________________________________________________________________

Company Stock Plan Administration Service (the “Stock Service”): _________________________

EX-31.1

Exhibit 31.1

Certification of Chief Executive Officer

Pursuant to Section 302 of the Sarbanes-Oxley Act of 2002

I, Michael P. Plisinski, certify that:

1. I have reviewed this quarterly report on Form 10-Q of Rudolph Technologies, Inc.;

2. Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;

3. Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this report;

4. The registrant’s other certifying officer(s) and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:

a.Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;

b.Designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;

c.Evaluated the effectiveness of the registrant’s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and

d.Disclosed in this report any change in the registrant’s internal control over financial reporting that occurred during the registrant’s most recent fiscal quarter (the registrant’s fourth fiscal quarter in the case of an annual report) that has materially affected, or is reasonably likely to materially affect, the registrant’s internal control over financial reporting; and

5. The registrant’s other certifying officer(s) and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or persons performing the equivalent functions):

a.All significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant’s ability to record, process, summarize and report financial information; and

b.Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant’s internal control over financial reporting.

Date: August 3, 2017

By:	/s/ MICHAEL P. PLISINSKI
	Michael P. Plisinski Chief Executive Officer

EX-31.2

Exhibit 31.2

Certification of Chief Financial Officer

Pursuant to Section 302 of the Sarbanes-Oxley Act of 2002

I, Steven R. Roth, certify that:

1. I have reviewed this quarterly report on Form 10-Q of Rudolph Technologies, Inc.;

2. Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;

3. Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this report;

4. The registrant’s other certifying officer(s) and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:

a.Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;

b.Designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;

c.Evaluated the effectiveness of the registrant’s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and

d.Disclosed in this report any change in the registrant’s internal control over financial reporting that occurred during the registrant’s most recent fiscal quarter (the registrant’s fourth fiscal quarter in the case of an annual report) that has materially affected, or is reasonably likely to materially affect, the registrant’s internal control over financial reporting; and

5. The registrant’s other certifying officer(s) and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or persons performing the equivalent functions):

a.All significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant’s ability to record, process, summarize and report financial information; and

b.Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant’s internal control over financial reporting.

Date: August 3, 2017

By:	/s/ STEVEN R. ROTH
	Steven R. Roth Senior Vice President and Chief Financial Officer

EX-32.1

Exhibit 32.1

CERTIFICATION OF CHIEF EXECUTIVE OFFICER

PURSUANT TO

18 U.S.C. SECTION 1350,

AS ADOPTED PURSUANT TO

SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

I, Michael P. Plisinski, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, that the Quarterly Report of Rudolph Technologies, Inc. on Form 10-Q for the quarter ended June 30, 2017 fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934 and that information contained in such Quarterly Report on Form 10-Q fairly presents in all material respects the financial condition and results of operations of Rudolph Technologies, Inc.

Date: August 3, 2017

By:	/s/  MICHAEL P. PLISINSKI
	Michael P. Plisinski Chief Executive Officer

EX-32.2

Exhibit 32.2

CERTIFICATION OF CHIEF FINANCIAL OFFICER

PURSUANT TO

18 U.S.C. SECTION 1350,

AS ADOPTED PURSUANT TO

SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

I, Steven R. Roth, certify, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, that the Quarterly Report of Rudolph Technologies, Inc. on Form 10-Q for the quarter ended June 30, 2017 fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934 and that information contained in such Quarterly Report on Form 10-Q fairly presents in all material respects the financial condition and results of operations of Rudolph Technologies, Inc.

Date: August 3, 2017

By:	/s/  STEVEN R. ROTH
	Steven R. Roth Senior Vice President and Chief Financial Officer

XML

Document and Entity Information Document - shares	6 Months Ended
	Jun. 30, 2017	Jul. 18, 2017
Entity Information [Line Items]
Entity Registrant Name	RUDOLPH TECHNOLOGIES INC
Entity Central Index Key	0001094392
Current Fiscal Year End Date	--12-31
Entity Filer Category	Accelerated Filer
Document Type	10-Q
Document Period End Date	Jun. 30, 2017
Document Fiscal Year Focus	2017
Document Fiscal Period Focus	Q2
Amendment Flag	false
Entity Common Stock, Shares Outstanding		31,540,042

XML

Statements of Financial Position Consolidated Balance Sheet - USD ($) $ in Thousands	Jun. 30, 2017	Dec. 31, 2016
Cash and Cash Equivalents, at Carrying Value	$ 57,705	$ 37,859
Available-for-sale Securities, Debt Securities, Current	91,244	87,872
Accounts Receivable, Net, Current	70,564	64,912
Inventory, Net	66,835	65,485
Income Taxes Receivable	0	2,389
Prepaid Expense and Other Assets, Current	4,634	4,113
Assets, Current	290,982	262,630
Property, Plant and Equipment, Net	15,091	11,858
Goodwill	22,495	22,495
Intangible Assets, Net (Excluding Goodwill)	9,263	10,273
Other Assets, Noncurrent	32,755	31,443
Assets	370,586	338,699
Liabilities, Current [Abstract]
Accounts Payable and Accrued Liabilities, Current	25,928	21,494
Accrued Income Taxes, Current	1,168	0
Deferred Revenue, Current	11,230	7,329
Other Liabilities, Current	7,722	7,139
Liabilities, Current	46,048	35,962
Other Liabilities, Noncurrent	11,247	9,002
Liabilities	57,295	44,964
Commitments and Contingencies
Stockholders' Equity Attributable to Parent [Abstract]
Common Stock, Value, Issued	32	31
Additional Paid in Capital, Common Stock	383,174	381,189
Accumulated Other Comprehensive Income (Loss), Net of Tax	(1,481)	(2,779)
Retained Earnings (Accumulated Deficit)	(68,434)	(84,706)
Stockholders' Equity Attributable to Parent	313,291	293,735
Liabilities and Equity	$ 370,586	$ 338,699

XML

Statements of Financial Position B/S Parenthetical - USD ($) $ in Thousands	Jun. 30, 2017	Dec. 31, 2016
Allowance for Doubtful Accounts Receivable, Current	$ 495	$ 680

XML

Statements of Income Statement - USD ($) shares in Thousands, $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016
Revenues	$ 67,418	$ 62,701	$ 128,097	$ 117,063
Cost of Revenue	31,962	28,508	60,773	53,825
Gross Profit	35,456	34,193	67,324	63,238
Operating Expenses [Abstract]
Research and Development Expense	12,146	11,879	24,156	24,325
Selling, General and Administrative Expense	10,110	9,488	19,778	18,987
Amortization of Intangible Assets	505	595	1,010	1,190
Gain (Loss) Related to Litigation Settlement	0	0	0	(14,632)
Operating Expenses	22,761	21,962	44,944	29,870
Operating Income (Loss)	12,695	12,231	22,380	33,368
Interest Income (Expense), Nonoperating, Net	223	(1,446)	414	(2,915)
Total other expenses (income)	166	192	435	299
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest	12,752	10,593	22,359	30,154
Income Tax Expense (Benefit)	3,559	2,992	6,015	8,614
Net Income (Loss) Attributable to Parent	$ 9,193	$ 7,601	$ 16,344	$ 21,540
Earnings (Loss) Per Share, Basic	$ 0.29	$ 0.25	$ 0.52	$ 0.70
Earnings (Loss) Per Share, Diluted	$ 0.29	$ 0.24	$ 0.51	$ 0.68
Weighted Average Number of Shares Outstanding, Basic	31,501	30,779	31,397	30,869
Weighted Average Number of Shares Outstanding, Diluted	32,146	31,754	32,104	31,705

XML

Statements of Comprehensive Income (Loss) Statement - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016
Net Income (Loss) Attributable to Parent	$ 9,193	$ 7,601	$ 16,344	$ 21,540
Other Comprehensive Income (Loss), Net of Tax [Abstract]
Available-for-sale Securities, Change in Net Unrealized Holding Gain (Loss), Net of Tax	1	29	45	23
Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax	133	596	1,253	1,234
Comprehensive Income (Loss), Net of Tax, Attributable to Parent	$ 9,327	$ 8,226	$ 17,642	$ 22,797

XML

Statements of Cash Flows Statement - USD ($) $ in Thousands	3 Months Ended		6 Months Ended		12 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016	Dec. 31, 2016	Dec. 31, 2015
Net Income (Loss) Attributable to Parent	$ 9,193	$ 7,601	$ 16,344	$ 21,540
Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]
Amortization of Financing Costs and Discounts			0	2,039
Amortization of Intangible Assets	505	595	1,010	1,190
Depreciation			1,880	1,868
Foreign Currency Transaction Gain (Loss), before Tax	166	192	435	299
Business Combination, Contingent Consideration Arrangements, Change in Amount of Contingent Consideration, Asset			132	117
Share-based Compensation			2,948	2,387
Provision for doubtful accounts and inventory valuation			2,026	2,278
Gain (Loss) Related to Litigation Settlement	0	0	0	(14,632)
Increase (Decrease) in Other Operating Assets and Liabilities, Net			5,198	(4,852)
Net Cash Provided by (Used in) Operating Activities			29,973	12,234
Net Cash Provided by (Used in) Investing Activities [Abstract]
Payments to Acquire Marketable Securities			(62,527)	(70,412)
Proceeds from Sale and Maturity of Marketable Securities			59,491	90,599
Payments to Acquire Property, Plant, and Equipment			(5,301)	(2,173)
Net Cash Provided by (Used in) Investing Activities			(8,337)	18,014
Net Cash Provided by (Used in) Financing Activities [Abstract]
Payments for Repurchase of Warrants			(1,025)	0	$ (9,500)
Payments for Repurchase of Common Stock			0	(8,044)
Payments Related to Tax Withholding for Share-based Compensation			(1,323)	(1,565)
Proceeds from (Payments for) Other Financing Activities			(358)	(94)
Proceeds from Issuance of Shares under Incentive and Share-based Compensation Plans, Including Stock Options			289	275
Net Cash Provided by (Used in) Financing Activities			(2,417)	(9,428)
Effect of Exchange Rate on Cash and Cash Equivalents			627	1,065
Cash and Cash Equivalents, Period Increase (Decrease)			19,846	21,885
Cash and Cash Equivalents, at Carrying Value	$ 57,705	$ 66,439	57,705	66,439	$ 37,859	$ 44,554
Supplemental Cash Flow Information [Abstract]
Income Taxes Paid			2,246	2,541
Interest Paid			$ 0	$ 1,125

XML

Basis of Presentation (Notes)

6 Months Ended

Jun. 30, 2017

Organization and Nature of Operations: [Abstract]

Organization, Consolidation and Presentation of Financial Statements Disclosure [Text Block]

Basis of Presentation

The accompanying interim unaudited condensed consolidated financial statements have been prepared by Rudolph Technologies, Inc. (the “Company” or “Rudolph”) and in the opinion of management reflect all adjustments, consisting of normal recurring accruals, necessary for their fair presentation in accordance with accounting principles generally accepted in the United States of America (“U.S. GAAP”).  Preparing financial statements requires management to make estimates and assumptions that affect amounts reported in the financial statements and accompanying notes.  Actual amounts could differ materially from reported amounts.  The interim results for the three and six month periods ended June 30, 2017 are not necessarily indicative of results to be expected for the entire year or any future periods.  This interim financial information should be read in conjunction with the financial statements and the notes thereto included in the Company’s Annual Report on Form 10-K for the year ended December 31, 2016 (“2016 10-K”) filed with the Securities and Exchange Commission (“SEC”). The accompanying condensed consolidated balance sheet at December 31, 2016 has been derived from the audited consolidated financial statements included in the 2016 10-K.

Reclassifications

Certain immaterial prior period amounts have been reclassified to conform to the current financial statement presentation.

Recent Accounting Pronouncements

Recently Adopted

Effective January 1, 2017, the Company adopted the Financial Accounting Standards Board (FASB) Accounting Standard Update (ASU) No. 2016-09, “Improvements to Employee Share-Based Payment Accounting.” The standard update simplifies several aspects of the accounting for employee share-based payment transactions, including accounting for income taxes, forfeitures, and statutory withholding requirements, as well as classification in the Condensed Consolidated Statement of Cash Flows. As a result of the adoption, on a prospective basis, the Company recognized $623 and $1,295 of excess tax benefits from stock-based compensation as a benefit in our income tax provision for the three and six months ended June 30, 2017, respectively. Historically, these amounts were recorded as additional paid-in capital. Upon adoption, the Company elected to present excess tax benefits to operating cash flows retrospectively to its Condensed Consolidated Statement of Cash Flows for the six months ended June 30, 2016, which resulted in a reclassification of excess tax benefits from stock-based compensation of $252 from cash flows from financing activities to cash flows from operating activities. The Company elected to change its policy on accounting for forfeitures and account for forfeitures as they occur. As a result of the forfeiture rate policy change, the Company recorded a reduction to retained earnings of $72 under the modified retrospective approach. Additional amendments to the accounting for income taxes and minimum statutory withholding requirements had no impact on its results of operations.

Effective January 1, 2017, the Company adopted ASU No. 2015-11, “Inventory (Topic 330): Simplifying the Measurement of Inventory.” This simplifies subsequent measurement of inventory by having an entity measure inventory at the lower of cost and net realizable value. Net realizable value is the estimated selling price in the ordinary course of business, less reasonably predictable cost of completion, disposal, and transportation. The adoption of ASU 2015-11 did not have any impact on the Company's consolidated financial position, results of operations, and cash flows.

Recently Issued

In May 2017, the FASB issued ASU No. 2017-09, “Compensation - Stock Compensation (Topic718): Scope of Modification Accounting.” This ASU amends the scope of modification accounting for share-based payment arrangements and provides guidance on the types of changes to the terms or conditions of share-based payment awards to which an entity would be required to apply modification accounting under ASC 718. The ASU is effective for the fiscal years beginning after December 15, 2019, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2017-09 will have on its consolidated financial position, results of operations, and cash flows.

In January 2017, the FASB issued ASU No. 2017-04, “Intangibles - Goodwill and Other (Topic 350): Simplifying the Test for Goodwill Impairment.” This ASU eliminates Step 2 from the goodwill impairment test. Accordingly, if the carrying amount of a reporting unit exceeds its fair value, an impairment loss will be recognized in an amount equal to the excess, limited to the total amount of goodwill allocated to the reporting unit. The ASU is effective for the fiscal years beginning after December 15, 2019, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2017-04 will have on its consolidated financial position, results of operations, and cash flows.

In October 2016, the FASB issued ASU No. 2016-16, “Income Tax (Topic 740): Intra-Entity Transfers of Assets Other Than Inventory.” This ASU, which is part of the Board’s simplification initiative, is intended to reduce the complexity of U.S. GAAP and diversity in practice related to the tax consequences of certain types of intra-entity asset transfers, particularly those involving intellectual property. This ASU is effective for fiscal years beginning after December 15, 2017, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2016-16 will have on its consolidated financial position, results of operations, and cash flows.

In August 2016, the FASB issued ASU No. 2016-15, “Statement of Cash Flows (Topic 230): Classification of Certain Cash Receipts and Cash Payments.” This ASU provides guidance on statement of cash flows presentation for eight specific cash flow issues where diversity in practice exists. This ASU is effective for fiscal years beginning after December 15, 2017, and interim periods within those fiscal years. The Company is currently evaluating the effect the adoption of ASU No. 2016-15 will have on its consolidated financial position, results of operations, and cash flows.

In June 2016, the FASB issued ASU No. 2016-13, “Financial Instruments – Credit Losses (Topic 326),” which introduces new guidance for the accounting for credit losses on instruments within its scope. Given the breadth of that scope, the new ASU will impact both financial services and non-financial services entities. The standard is effective for fiscal years beginning after December 15, 2020. The Company is currently evaluating the effect the adoption of ASU No. 2016-13 will have on its consolidated financial position, results of operations, and cash flows.

In February 2016, the FASB issued ASU No. 2016-02, “Leases (Topic 842).” The standard requires that lessees will be required to recognize assets and liabilities on the balance sheet for the rights and obligations created by all leases with terms of more than 12 months. ASU No. 2016-02 also will require disclosures designed to give financial statement users information on the amount, timing, and uncertainty of cash flows arising from leases. These disclosures include qualitative and quantitative information. The standard is effective for annual periods, and interim periods within those annual periods, beginning after December 15, 2018 with earlier adoption permitted. The Company is in the process of evaluating the effects the adoption of ASU No. 2016-02 will have on its consolidated financial position, results of operations, and cash flows.

In May 2014, the FASB issued ASU No. 2014-09, “Revenue from Contracts with Customers (Topic 606).” ASU No. 2014-09, as amended, outlines a comprehensive revenue recognition model and supersedes most current revenue recognition guidance as amended. In July 2015, the FASB deferred for one year the effective date of the new revenue standard. The standard is effective for annual periods, and interim periods within those annual periods, beginning after December 15, 2017 with earlier adoption permitted. ASU No. 2014-09 allows for two methods of adoption: (a) “full retrospective” adoption, meaning the standard is applied to all periods presented, or (b) “modified retrospective” adoption, meaning the cumulative effect of applying ASU No. 2014-09 is recognized as an adjustment to the 2018 opening retained earnings balance. The Company is in the process of determining the adoption method as well as the effects the adoption of ASU No. 2014-09 will have on its consolidated financial position, results of operations, and cash flows as well as the impact on our internal controls over financial reporting.

XML

Fair Value Measurements

6 Months Ended

Jun. 30, 2017

Fair Value Measurements [Abstract]

Fair Value Disclosures [Text Block]

Fair Value Measurements

The Company applies a three-level valuation hierarchy for fair value measurements. This hierarchy prioritizes the inputs into three broad levels.  Level 1 inputs are quoted prices (unadjusted) in active markets for identical assets or liabilities. Level 2 inputs are quoted prices for similar assets and liabilities in active markets or inputs that are observable for the asset or liability, either directly or indirectly through market corroboration, for substantially the full term of the asset or liability. Level 3 inputs are unobservable inputs based on management’s assumptions used to measure assets and liabilities at fair value. A financial asset’s or liability’s fair value measurement classification within the hierarchy is determined based on the lowest level input that is significant to the fair value measurement.

The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at June 30, 2017 and December 31, 2016:

			Fair Value Measurements Using
	Carrying Value		Quoted Prices in Active Markets for Identical Assets (Level 1)		Significant Other Observable Inputs (Level 2)		Significant Unobservable Inputs (Level 3)
June 30, 2017
Assets:
Available-for-sale debt securities:
Municipal notes and bonds	$	90,403	$	—	$	90,403	$	—
Corporate bonds	841		—		841		—
Foreign currency forward contracts	94		—		94		—
Total Assets	$	91,338	$	—	$	91,338	$	—
Liabilities:
Contingent consideration - acquisitions	3,025		—		—		3,025
Total Liabilities	$	3,025	$	—	$	—	$	3,025
December 31, 2016
Assets:
Available-for-sale debt securities:
Municipal notes and bonds	$	87,029	$	—	$	87,029	$	—
Corporate bonds	843		—		843		—
Foreign currency forward contracts	312		—		312		—
Total Assets	$	88,184	$	—	$	88,184	$	—
Liabilities:
Contingent consideration - acquisitions	3,251		—		—		3,251
Total Liabilities	$	3,251	$	—	$	—	$	3,251

The Company’s investments classified as Level 1 are based on quoted market prices that are available in active markets.

The Company’s investments classified as Level 2 are valued using observable inputs to quoted market prices, benchmark yields, reported trades, broker/dealer quotes or alternative pricing sources with reasonable levels of price transparency. The foreign currency forward contracts are primarily measured based on the foreign currency spot and forward rates quoted by the banks or foreign currency dealers. Investment prices are obtained from third party pricing providers, which models prices utilizing the above observable inputs, for each asset class.

Level 3 liabilities consisted of contingent consideration related to an acquisition for which the Company uses a discounted cash flow model to value these liabilities. The Level 3 assumptions used in the discounted cash flow model for the contingent consideration included projected revenues, timing of cash flows and estimates of discount rates of 8.6% and 9.1% for the six months ended June 30, 2017 and 2016, respectively. A significant decrease in the projected revenues or increase in discount rates could result in a significantly lower fair value measurement for the contingent consideration.

This table presents a reconciliation for all liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the six months ended June 30, 2017:

	Fair Value Measurements Using Significant Unobservable Inputs (Level 3)
Balance at December 31, 2016	$	3,251
Additions	—
Total loss included in selling, general and administrative expense	132
Payments	(358		)
Transfers into (out of) Level 3	—
Balance at June 30, 2017	$	3,025

See Note 3 for additional discussion regarding the fair value of the Company’s marketable securities.

Fair Value of Other Financial Instruments

The carrying value of cash and cash equivalents, accounts receivable, accounts payable and accrued liabilities approximates fair value because of the short-term maturity of these instruments. The estimated fair value of these obligations is based, primarily, on a market approach, comparing the Company’s interest rates to those rates the Company believes it would reasonably receive upon re-entry into the market. Judgment is required to estimate the fair value, using available market information and appropriate valuation methods.

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Marketable Securities

6 Months Ended

Jun. 30, 2017

Marketable Securities [Abstract]

Marketable Securities [Text Block]

Marketable Securities

The Company has evaluated its investment policies and determined that all of its investment securities are to be classified as available-for-sale.  Available-for-sale securities are carried at fair value, with the unrealized gains and losses reported in Stockholders’ equity under the caption “Accumulated other comprehensive loss.”  Realized gains and losses on available-for-sale securities are included in “Other expense” in the Condensed Consolidated Statements of Operations.  The Company records other-than-temporary impairment charges for its available-for-sale investments when it intends to sell the securities, it is more-likely-than not that it will be required to sell the securities before a recovery, or when it does not expect to recover the entire amortized cost basis of the securities.  The cost of securities sold is based on the specific identification method.

The Company has determined that the gross unrealized losses on its marketable securities at June 30, 2017 and December 31, 2016 are temporary in nature. The Company reviews its investment portfolio to identify and evaluate investments that have indications of possible impairment. Factors considered in determining whether a loss is other-than-temporary include the length of time and extent to which fair value has been less than the cost basis, credit quality and the Company’s ability and intent to hold the investment for a period of time sufficient to allow for any anticipated recovery in market value.

At June 30, 2017 and December 31, 2016, marketable securities are categorized as follows:

	Amortized Cost		Gross Unrealized Holding Gains		Gross Unrealized Holding Losses			Fair Value
June 30, 2017
Municipal notes and bonds	$	90,389	$	21	$	(7	)	$	90,403
Corporate bonds	841		—		—			841
Total marketable securities	$	91,230	$	21	$	(7	)	$	91,244
December 31, 2016
Municipal notes and bonds	$	87,088	$	6	$	(65	)	$	87,029
Corporate bonds	842		1		—			843
Total marketable securities	$	87,930	$	7	$	(65	)	$	87,872

 The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Condensed Consolidated Balance Sheet classification, is as follows at June 30, 2017 and December 31, 2016:

	June 30, 2017				December 31, 2016
	Amortized Cost		Fair Value		Amortized Cost		Fair Value
Due within one year	$	77,592	$	77,601	$	82,498	$	82,445
Due after one through five years	13,638		13,643		5,432		5,427
Due after five through ten years	—		—		—		—
Due after ten years	—		—		—		—
Total marketable securities	$	91,230	$	91,244	$	87,930	$	87,872

The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at June 30, 2017 and December 31, 2016:  

	Unrealized Loss Position For Less Than 12 Months					Unrealized Loss Position For Greater Than 12 Months
	Fair Value		Gross Unrealized Losses			Fair Value		Gross Unrealized Losses
June 30, 2017
Municipal notes and bonds	$	26,062	$	(7	)	$	—	$	—
Corporate bonds	—		—			—		—
Total	$	26,062	$	(7	)	$	—	$	—
December 31, 2016
Municipal notes and bonds	$	64,918	$	(65	)	$	—	$	—
Corporate bonds	—		—			—		—
Total	$	64,918	$	(65	)	$	—	$	—

See Note 2 for additional discussion regarding the fair value of the Company’s marketable securities.

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Derivative Instruments and Hedging Activities

6 Months Ended

Jun. 30, 2017

Derivative Instruments and Hedging Activities [Abstract]

Derivative Instruments and Hedging Activities Disclosure [Text Block]

Derivative Instruments and Hedging Activities

The Company, when it considers it to be appropriate, enters into forward contracts to hedge the economic exposures arising from foreign currency denominated transactions. At June 30, 2017 and December 31, 2016, these contracts included the future sale of Japanese Yen to purchase U.S. dollars. Derivative instruments are recognized as either “Prepaid expenses and other current assets” or “Other current liabilities” in the Condensed Consolidated Balance Sheets and are measured at fair value. The foreign currency forward contracts were entered into by the Company’s Japanese subsidiary to economically hedge a portion of certain intercompany obligations. The forward contracts are not designated as hedges for accounting purposes and decreases in the fair value of $218 and $300 for the six month periods ended June 30, 2017 and 2016, respectively, are recorded within the caption “Other expense” in the Condensed Consolidated Statements of Operations.

The dollar equivalent of the U.S. dollar forward contracts and related fair values as of June 30, 2017 and December 31, 2016 were as follows:

	June 30, 2017		December 31, 2016
Notional amount	$	3,148	$	3,827
Fair value of asset	$	94	$	312

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Identifiable Intangible Assets

6 Months Ended

Jun. 30, 2017

Finite-Lived Intangible Assets [Line Items]

Intangible Assets Disclosure [Text Block]

Purchased Intangible Assets

Purchased intangible assets as of June 30, 2017 and December 31, 2016 are as follows:

	Gross Carrying Amount		Accumulated Amortization		Net
June 30, 2017
Finite-lived intangibles:
Developed technology	$	65,527	$	57,790	$	7,737
Customer and distributor relationships	9,560		8,670		890
Trade names	4,361		3,725		636
Total identifiable intangible assets	$	79,448	$	70,185	$	9,263
December 31, 2016
Finite-lived intangibles:
Developed technology	$	65,527	$	56,986	$	8,541
Customer and distributor relationships	9,560		8,514		1,046
Trade names	4,361		3,675		686
Total identifiable intangible assets	$	79,448	$	69,175	$	10,273

Intangible asset amortization expense for the three and six month periods ended June 30, 2017 was $505 and $1,010, respectively. For the three and six month periods ended June 30, 2016, intangible assets amortization expenses was $595 and $1,190, respectively. Assuming no change in the gross carrying value of identifiable intangible assets and estimated lives, estimated amortization expense for the remainder of 2017 will be $923, and for each of the next five years estimated amortization expense amounts to $1,496 for 2018, $1,496 for 2019, $1,294 for 2020, $546 for 2021, and $480 for 2022.

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Balance Sheet Details

6 Months Ended

Jun. 30, 2017

Balance Sheet Detail [Abstract]

Balance Sheet Details [Text Block]

Balance Sheet Details

Inventories

Inventories are comprised of the following:

	June 30, 2017		December 31, 2016
Materials	$	34,739	$	32,993
Work-in-process	19,862		18,764
Finished goods	12,234		13,728
Total inventories	$	66,835	$	65,485

The Company has established reserves of $11,842 and $10,545 as of June 30, 2017 and December 31, 2016, respectively, for slow moving and obsolete inventory, which are included in the amounts above.

Property, Plant and Equipment

Property, plant and equipment, net is comprised of the following:

	June 30, 2017			December 31, 2016
Land and building	$	2,584		$	2,584
Machinery and equipment	26,803			23,493
Furniture and fixtures	3,036			2,699
Computer equipment and software	5,682			5,204
Leasehold improvements	8,952			8,116
	47,057			42,096
Accumulated depreciation	(31,966		)	(30,238		)
Total property, plant and equipment, net	$	15,091		$	11,858

Other assets

Other assets is comprised of the following:

	June 30, 2017		December 31, 2016
Deferred income taxes	$	32,165	$	30,850
Other	590		593
Total other assets	$	32,755	$	31,443

Other current liabilities

Other current liabilities is comprised of the following:

	June 30, 2017		December 31, 2016
Intangible asset acquisition - Stella Alliance	$	1,000	$	1,000
Contingent consideration - acquisitions	634		855
Warrant settlement payable	—		1,025
Customer deposits	983		996
Other	5,105		3,263
Total other current liabilities	$	7,722	$	7,139

Other non-current liabilities

Other non-current liabilities is comprised of the following:

	June 30, 2017		December 31, 2016
Unrecognized tax benefits (including interest)	$	4,866	$	3,386
Contingent consideration - acquisitions	2,391		2,396
Deferred revenue	1,299		1,132
Other	2,691		2,088
Total other non-current liabilities	$	11,247	$	9,002

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Debt Obligations

6 Months Ended

Jun. 30, 2017

Debt Obligations [Abstract]

Debt Disclosure [Text Block]

Debt Obligations

On July 25, 2011, the Company issued $60,000 aggregate principal amount of 3.75% Convertible Senior Notes due 2016 (the “Notes”) at par. The Notes were issued pursuant to an indenture, dated as of July 25, 2011, between the Company and Bank of New York Mellon Trust Company, N.A., as Trustee, which includes a form of Note. The Notes provided for the payment of interest semi-annually in arrears on January 15 and July 15 of each year, beginning January 15, 2012, at an annual rate of 3.75%. Concurrently with the issuance of the Notes, the Company purchased a convertible note hedge and sold a warrant. Each of the convertible note hedge and warrant transactions were entered into with an affiliate of the initial purchaser of the Notes.

On July 15, 2016, the Company redeemed all of its outstanding 3.75% Convertible Senior Notes with an aggregate principle amount of $60,000. Under the terms of the indenture, holders of the Notes were paid cash up to the aggregate principal amount of the Notes and were issued shares of common stock for the remainder of the conversion, with any fractional shares paid in cash. The conversion resulted in the issuance of 540 shares of common stock of the Company to the bondholders, but resulted in no dilution to Rudolph shareholders as these shares were covered by the convertible note hedge that was entered into by the Company in 2011 at the time of issuance of the Notes.

The sale of the warrant gave the holder the right to purchase 4,634 shares of Company common stock at a strike price of $17.00 per share. The warrant had a series of daily expiration dates beginning in October 2016 and ending in January 2017. In 2016, the holder exercised 4,248 warrants, which settled for 80 shares of Company common stock and $10,525 payable in cash, of which $9,500 was paid as of December 31, 2016 and $1,025 was paid in January 2017, at a weighted average stock price of $19.82 per share. The remaining 386 warrants were exercised in January 2017 by the holder for 102 shares of Company common stock at a weighted average stock price of $23.13 per share.

The following table presents the amount of interest cost recognized relating to the Notes during the three and six months endedJune 30, 2017 and June 30, 2016:

	Three Months Ended June 30,				Six Months Ended June 30,
	2017		2016		2017		2016
Contractual interest coupon	$	—	$	563	$	—	$	1,125
Amortization of interest discount	—		899		—		1,793
Amortization of debt issuance costs	—		123		—		246
Total interest cost recognized	$	—	$	1,585	$	—	$	3,164

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Commitments and Contingencies

6 Months Ended

Jun. 30, 2017

Commitments and Contingencies [Abstract]

Commitments and Contingencies Disclosure [Text Block]

Commitments and Contingencies

Intellectual Property Indemnification Obligations

The Company has entered into agreements with customers that include limited intellectual property indemnification obligations that are customary in the industry. These guarantees generally require the Company to compensate the other party for certain damages and costs incurred as a result of third party intellectual property claims arising from these transactions. The nature of the intellectual property indemnification obligations prevents the Company from making a reasonable estimate of the maximum potential amount it could be required to pay to its customers. Historically, the Company has not made any indemnification payments under such agreements and no amount has been accrued in the accompanying consolidated financial statements with respect to these indemnification guarantees.

Warranty Reserves

The Company generally provides a warranty on its products for a period of 12 to 15 months against defects in material and workmanship. The Company estimates the costs that may be incurred during the warranty period and records a liability in the amount of such costs at the time revenue is recognized. The Company’s estimate is based primarily on historical experience. The Company periodically assesses the adequacy of its recorded warranty liabilities and adjusts the amounts as necessary. Settlements of warranty reserves are generally associated with sales that occurred during the 12 to 15 months prior to the quarter-end and warranty accruals are related to sales during the same year.

Changes in the Company’s warranty reserves are as follows:

	Six Months Ended June 30,
	2017			2016
Balance, beginning of the period	$	1,788		$	1,894
Accruals	1,659			1,261
Usage	(1,311		)	(1,319		)
Balance, end of the period	$	2,136		$	1,836

Warranty reserves are reported in the Condensed Consolidated Balance Sheets within the caption “Accounts payable and accrued liabilities.”

Legal Matters

From time to time, the Company is subject to legal proceedings and claims in the ordinary course of business. The following reflects an overview of the material activities with regard to these matters through June 30, 2017.

August Technology Corporation and Rudolph Technologies, Inc. v. Camtek, Ltd., No. 11-CV-03707 (MJD/TNL): A lawsuit against Camtek, Ltd. (“Camtek”), of Migdal Hamek, Israel, was filed by the Company on June 1, 2011 alleging infringement of its U.S. Patent No. 7,729,528 related to its proprietary continuous scan wafer inspection technology. The relief sought in the lawsuit includes the payment of damages and a permanent injunction against any products found to be infringing. Camtek filed an inter partes reexamination petition with the U.S. Patent and Trademark Office (the “PTO”) on January 19, 2012 asserting that certain claims of the patent are unpatentable. In the course of this proceeding the PTO issued a final determination that 35 claims of the patent were valid and 18 claims were rejected.  The Company appealed the PTO’s rejection of the 18 claims to the US Court of Appeals for the Federal Circuit.  On December 22, 2016, the U.S. Court of Appeals for the Federal Circuit reversed the PTO’s rejection of three of the 18 patent claims, affirmed the PTO’s rejection of nine of the 18 patent claims, and dismissed the remaining six patent claims for procedural reasons. Thus, 38 claims are available to be asserted under the ‘528 patent in this lawsuit. During the pendency of the reexamination process, the parties had stipulated that the lawsuit be stayed. With resolution of Camtek’s petition, the stay in the lawsuit has been lifted and the parties are proceeding with litigation.

Rudolph Technologies, Inc. v. Camtek, Ltd., No. 15-CV-1246 (ADM/BRT): On March 12, 2015, the Company filed and served on Camtek a complaint asserting infringement of Rudolph’s U.S. Patent No. 6,826,298 by Camtek’s Eagle product with the U.S. District Court in Minnesota. The ‘6,298 patent is also related to our proprietary continuous scan wafer inspection technology and was the subject of Rudolph’s prior litigation against the Camtek Falcon system (the “Falcon Litigation”) in which Rudolph prevailed with a final judgment of infringement and damages of $14.6 million assessed against Camtek. The relief sought in the lawsuit includes the payment of damages and a permanent injunction against any products found to be infringing. On April 21, 2015, the Company filed a Motion for Preliminary Injunction to enjoin Camtek’s sale of the Eagle device in the United States. On or about April 20, 2015, Camtek filed a complaint in the U.S. District Court in New Jersey seeking a declaratory judgment challenging the jurisdiction and venue of the Minnesota District Court and seeking to have the New Jersey District Court find that the ‘6,298 patent is not infringed and, in the alternative, that the ‘6,298 patent is invalid. On August 26, 2015, the U.S. District Court in Minnesota ruled that Minnesota jurisdiction was appropriate for this matter while at the same time denying the Company’s Motion for Preliminary Injunction. Camtek’s complaint filed in the U.S. District Court in New Jersey was subsequently dismissed. On August 8, 2016 the Minnesota District Court issued an order regarding motions for partial summary judgment which we had filed in March 2016 granting (i) that the ‘6,298 patent is valid and Camtek is precluded from contesting its validity at trial, and (ii) that the claim constructions adopted in the Falcon Litigation for four terms are entitled to a preclusive effect and will apply in the course of the present litigation. The Minnesota District Court also ruled that three phrases not subject to claim construction in the Falcon Litigation may be defined in the present case. This matter is currently ongoing in the U.S. District Court in Minnesota with no trial date set.

Camtek, Ltd. v. Rudolph Technologies, Inc., No.: 1:17-CV-11127-PBS: On June 19, 2017, Camtek filed with the U.S. District Court in Massachusetts and served on Rudolph a complaint alleging infringement by Rudolph’s NSX product of Camtek’s U.S. Patent No. 6,192,289 related to kerf inspection. The relief sought in the lawsuit includes the payment of damages and a permanent injunction against any products found to be infringing. This newly served matter is currently ongoing in the U.S. District Court in Massachusetts with no trial date set.

Subsequent to the close of the 2017 second quarter, on July 28, 2017, Rudolph and Camtek entered into a Settlement Agreement (the “Agreement”) resolving each of the three litigations referenced above (the “Litigations”). Pursuant to the Agreement, in exchange for a $13.0 million cash payment from Camtek to be paid to Rudolph, the parties each agreed to dismiss with prejudice and release the other party from all claims, damages and expenses incurred or raised in the Litigations. The parties also mutually agreed not to pursue further legal actions on any of the claims reflected in the patents which were the subject of the Litigations. Further, subject to limited exceptions, Rudolph and Camtek have agreed not to bring suit against each other for a three year period from the date of the Agreement. Each party expressly denies any liability to the other party with respect to any of the Litigations.

Line of Credit

The Company has a credit agreement with a bank that provides for a line of credit which is secured by the marketable securities the Company has with the bank. The Company is permitted to borrow up to 70% of the value of eligible securities held at the time the line of credit is accessed. The available line of credit as of June 30, 2017 was approximately $86 million with an available interest rate of 2.8%. The credit agreement is available to the Company until such time that either party terminates the arrangement at their discretion. The Company has not utilized the line of credit to date.

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Share-Based Compensation

6 Months Ended

Jun. 30, 2017

Share-based Compensation [Abstract]

Disclosure of Compensation Related Costs, Share-based Payments [Text Block]

Share-Based Compensation

Restricted Stock Unit Activity

A summary of the Company’s nonvested restricted stock unit activity with respect to the six months endedJune 30, 2017 is as follows:

	Number of Shares		Weighted Average Grant Date Fair Value
Nonvested at December 31, 2016	1,136		$	12.30
Granted	273		$	22.62
Vested	(277	)	$	11.35
Forfeited	(30	)	$	12.30
Nonvested at June 30, 2017	1,102		$	15.10

Included in the number of shares granted in the table directly above are 38 market performance-based restricted stock units (MPRSUs) granted to executives.  Vesting of these MPRSUs is contingent upon the Company meeting certain total shareholder return (TSR) levels as compared to a select peer group over the next three years.  The MPRSUs cliff vest at the end of the three-year period and have a maximum potential to vest at 200% (76 shares) based on TSR performance.  The related share-based compensation expense is determined based on the estimated fair value of the underlying shares on the date of grant and is recognized straight-line over the vesting term.  The estimated fair value per share of the MPRSUs was $25.30 and was calculated using a Monte Carlo simulation model.

As of June 30, 2017 and December 31, 2016, there was $12,601 and $8,697 of total unrecognized compensation cost related to restricted stock units granted under the Company’s stock plans, respectively.  That cost is expected to be recognized over a weighted average period of 2.6 years and 2.7 years for the respective periods.

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Other Expense (Income)

6 Months Ended

Jun. 30, 2017

Other Income (Expense) [Abstract]

Other Income and Other Expense Disclosure [Text Block]

Other Expense

	Three Months Ended				Six Months Ended
	June 30,				June 30,
	2017		2016		2017		2016
Foreign currency exchange losses, net	$	166	$	192	$	435	$	299
Total other expense	$	166	$	192	$	435	$	299

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Income Taxes

6 Months Ended

Jun. 30, 2017

Income Taxes [Abstract]

Income Tax Disclosure [Text Block]

Income Taxes

The following table provides details of income taxes:

	Three Months Ended						Six Months Ended
	June 30,						June 30,
	2017			2016			2017			2016
Income before income taxes	$	12,752		$	10,593		$	22,359		$	30,154
Provision for income taxes	$	3,559		$	2,992		$	6,015		$	8,614
Effective tax rate	27.9		%	28.2		%	26.9		%	28.6		%

The income tax provision for the three and six months endedJune 30, 2017 was computed based on the Company’s annual forecast of profit by jurisdiction and forecasted effective tax rate for the year. The changes in the Company’s effective tax rate for the three and six months endedJune 30, 2017 compared to the same period for the prior year are primarily due to changes in the mix of forecasted earnings by jurisdictions and the recording of excess tax benefits for stock compensation related to the adoption of FASB ASU No. 2016-09.

The Company currently has a partial valuation allowance recorded against certain foreign and state net operating loss and credit carryforwards where the realizability of such deferred tax assets is substantially in doubt. Each quarter, the Company assesses the likelihood that it will be able to recover its deferred tax assets. The Company considers available evidence, both positive and negative, including forecasted earnings in assessing the need for a valuation allowance. As a result of the Company’s analysis, it concluded that it is more likely than not that a portion of its deferred tax assets will not be realized. Therefore, the Company continues to provide a valuation allowance against certain deferred tax assets. The Company continues to monitor available evidence and may reverse some or all of the remaining valuation allowance in future periods, if appropriate. The Company has a recorded valuation allowance against certain of its deferred tax assets of $1,924 as of June 30, 2017 and December 31, 2016.

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Earnings Per Share

6 Months Ended

Jun. 30, 2017

Earnings (Loss) Per Share [Abstract]

Earnings Per Share [Text Block]

Earnings Per Share

Basic earnings per share is calculated using the weighted average number of shares of common stock outstanding during the period.  Diluted earnings per share is computed in the same manner and also gives effect to all dilutive common equivalent shares outstanding during the period.  Potential common shares that would have the effect of increasing diluted earnings per share are considered to be anti-dilutive. In accordance with U.S. GAAP, these shares were not included in calculating diluted earnings per share.

The following table sets forth the weighted average number of stock options and restricted stock units that have been excluded from the calculation of diluted earnings per share as their effect would have been antidilutive:

	Three Months Ended June 30,		Six Months Ended June 30,
	2017	2016	2017	2016
Stock options	—	4	—	78
Restricted stock units	1	—	13	—
Total	1	4	13	78

The Company’s basic and diluted earnings per share amounts are as follows:

	Three Months Ended June 30,				Six Months Ended June 30,
	2017		2016		2017		2016
Numerator:
Net income	$	9,193	$	7,601	$	16,344	$	21,540
Denominator:
Basic earnings per share - weighted average shares outstanding	31,501		30,779		31,397		30,869
Effect of potential dilutive securities:
Employee stock options and restricted stock units - dilutive shares	645		563		704		630
Convertible senior notes - dilutive shares	—		412		—		206
Warrant - dilutive shares	—		—		3		—
Diluted earnings per share - weighted average shares outstanding	32,146		31,754		32,104		31,705
Earnings per share:
Basic	$	0.29	$	0.25	$	0.52	$	0.70
Diluted	$	0.29	$	0.24	$	0.51	$	0.68

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Accumulated Other Comprehensive Loss (Notes)

6 Months Ended

Jun. 30, 2017

Accumulated Other Comprehensive Loss [Abstract]

Comprehensive Income (Loss) Note [Text Block]

Accumulated Other Comprehensive Loss

Comprehensive income includes net income, foreign currency translation adjustments, and net unrealized gains and losses on available-for-sale investments. See the Condensed Consolidated Statements of Comprehensive Income for the effect of the components of comprehensive income on the Company’s net income.

The components of accumulated other comprehensive loss, net of tax, are as follows:

	Foreign currency translation adjustments			Net unrealized (gains) losses on available-for-sale investments			Accumulated other comprehensive loss (income)
Beginning Balance, December 31, 2016	$	2,742		$	37		$	2,779
Net current period other comprehensive income	(1,253		)	(45		)	(1,298		)
Reclassifications	—			—			—
Ending balance, June 30, 2017	$	1,489		$	(8	)	$	1,481

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Segment Reporting and Geographic Information

6 Months Ended

Jun. 30, 2017

Segment Reporting and Geographic Information [Abstract]

Segment Reporting Disclosure [Text Block]

Segment Reporting and Geographic Information

The Company is engaged in the design, development, manufacture and support of high-performance control metrology, defect inspection, advanced packaging lithography and data analysis systems used by microelectronics device manufacturers. The Company and its subsidiaries currently operate in a single operating segment: the design, development, manufacture and support of high-performance process control defect inspection and metrology, advanced packaging lithography, and process control software systems used by microelectronics device manufacturers, and therefore the Company has one reportable segment. The Company’s chief operating decision maker is the Chief Executive Officer. The chief operating decision maker allocates resources and assesses performance of the business and other activities at the reporting segment level.

The following table lists the different sources of revenue:

	Three Months Ended								Six Months Ended
	June 30,								June 30,
	2017				2016				2017				2016
Systems and software:
Process Control	$	47,711	71	%	$	34,464	55	%	$	91,586	72	%	$	70,922	61	%
Lithography	3,533		5	%	11,480		18	%	3,550		2	%	11,650		10	%
Software	6,895		10	%	7,780		12	%	14,394		11	%	15,202		13	%
Parts	7,348		11	%	5,993		10	%	13,678		11	%	13,153		11	%
Services	1,931		3	%	2,984		5	%	4,889		4	%	6,136		5	%
Total revenue	$	67,418	100	%	$	62,701	100	%	$	128,097	100	%	$	117,063	100	%

For geographical revenue reporting, revenues are attributed to the geographic location in which the product is shipped.  Revenue by geographic region is as follows:

	Three Months Ended				Six Months Ended
	June 30,				June 30,
	2017		2016		2017		2016
United States	$	9,182	$	5,646	$	18,190	$	13,034
Taiwan	20,323		14,535		34,156		36,570
Japan	3,468		3,164		6,677		6,101
China	5,904		10,824		20,005		19,649
South Korea	14,221		2,226		23,751		3,849
Singapore	1,945		14,879		5,211		21,926
Other Asia	1,444		1,674		1,559		2,545
Germany	4,789		4,235		7,869		4,932
Other Europe	6,142		5,518		10,679		8,457
Total revenue	$	67,418	$	62,701	$	128,097	$	117,063

The following customers each accounted for more than 10% of total revenues for the indicated periods.

	Six Months Ended
	June 30,
	2017		2016
Customer A	11.2	%	1.6	%
Customer B	6.0	%	13.4	%
Customer C	0.9	%	10.2	%

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Share Repurchase Program

6 Months Ended

Jun. 30, 2017

Share Repurchase Program [Abstract]

Share Repurchase [Text Block]

Share Repurchase Authorization

In January 2015, the Board of Directors authorized the Company to repurchase up to 3,000 shares of the Company’s common stock with no established end date. The authorization allows for repurchases to be made in the open market or through negotiated transactions from time to time. During the three and six month periods ended June 30, 2017, the Company did not repurchase any shares of common stock pursuant to the share repurchase authorization. At June 30, 2017, there were 711 shares available for future stock repurchases under this repurchase authorization. Shares of common stock purchased under the share repurchase authorization are retired.

The following table summarizes the Company’s stock repurchases for the three and six month periods ended June 30, 2017 and 2016, respectively:

	Three Months Ended				Six Months Ended
	June 30,				June 30,
	2017		2016		2017		2016
Shares of common stock repurchased	—		245		—		615
Cost of stock repurchased		$—		$3,344		$—		$8,045
Average price paid per share		$—		$13.63		$—		$13.07

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Subsequent Event (Notes)

6 Months Ended

Jun. 30, 2017

Subsequent Events [Abstract]

Subsequent Events [Text Block]

Subsequent Event

Subsequent to June 30, 2017 and through the Company’s financial statement issuance date of August 3, 2017, the Company entered into an agreement  with Camtek on July 28, 2017 resolving each of the three Litigations discussed further in Note 8, “Commitments and Contingencies”, of these Notes to Condensed Consolidated Financial Statements.  Pursuant to the Agreement, in exchange for a $13,000 cash payment from Camtek to be paid to the Company, the parties each agreed to dismiss with prejudice and release the other party from all claims, damages and expenses incurred or raised in the Litigations.

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Fair Value Measurements - (Tables)

6 Months Ended

Jun. 30, 2017

Fair Value Measurements [Abstract]

Fair Value, Measurement Inputs, Disclosure [Table Text Block]

The following tables provide the assets and liabilities carried at fair value measured on a recurring basis at June 30, 2017 and December 31, 2016:

			Fair Value Measurements Using
	Carrying Value		Quoted Prices in Active Markets for Identical Assets (Level 1)		Significant Other Observable Inputs (Level 2)		Significant Unobservable Inputs (Level 3)
June 30, 2017
Assets:
Available-for-sale debt securities:
Municipal notes and bonds	$	90,403	$	—	$	90,403	$	—
Corporate bonds	841		—		841		—
Foreign currency forward contracts	94		—		94		—
Total Assets	$	91,338	$	—	$	91,338	$	—
Liabilities:
Contingent consideration - acquisitions	3,025		—		—		3,025
Total Liabilities	$	3,025	$	—	$	—	$	3,025
December 31, 2016
Assets:
Available-for-sale debt securities:
Municipal notes and bonds	$	87,029	$	—	$	87,029	$	—
Corporate bonds	843		—		843		—
Foreign currency forward contracts	312		—		312		—
Total Assets	$	88,184	$	—	$	88,184	$	—
Liabilities:
Contingent consideration - acquisitions	3,251		—		—		3,251
Total Liabilities	$	3,251	$	—	$	—	$	3,251

Fair Value, Assets Measured on Recurring Basis, Unobservable Input Reconciliation [Table Text Block]

This table presents a reconciliation for all liabilities measured at fair value on a recurring basis using significant unobservable inputs (Level 3) for the six months ended June 30, 2017:

	Fair Value Measurements Using Significant Unobservable Inputs (Level 3)
Balance at December 31, 2016	$	3,251
Additions	—
Total loss included in selling, general and administrative expense	132
Payments	(358		)
Transfers into (out of) Level 3	—
Balance at June 30, 2017	$	3,025

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Marketable Securities - (Tables)

6 Months Ended

Jun. 30, 2017

Schedule of Available-for-sale Securities [Line Items]

Schedule of marketable securities by category [Table Text Block]

At June 30, 2017 and December 31, 2016, marketable securities are categorized as follows:

	Amortized Cost		Gross Unrealized Holding Gains		Gross Unrealized Holding Losses			Fair Value
June 30, 2017
Municipal notes and bonds	$	90,389	$	21	$	(7	)	$	90,403
Corporate bonds	841		—		—			841
Total marketable securities	$	91,230	$	21	$	(7	)	$	91,244
December 31, 2016
Municipal notes and bonds	$	87,088	$	6	$	(65	)	$	87,029
Corporate bonds	842		1		—			843
Total marketable securities	$	87,930	$	7	$	(65	)	$	87,872

Schedule of marketable securities classified by contractual maturity date [Table Text Block]

The amortized cost and estimated fair value of marketable securities classified by the maturity date listed on the security, regardless of the Condensed Consolidated Balance Sheet classification, is as follows at June 30, 2017 and December 31, 2016:

	June 30, 2017				December 31, 2016
	Amortized Cost		Fair Value		Amortized Cost		Fair Value
Due within one year	$	77,592	$	77,601	$	82,498	$	82,445
Due after one through five years	13,638		13,643		5,432		5,427
Due after five through ten years	—		—		—		—
Due after ten years	—		—		—		—
Total marketable securities	$	91,230	$	91,244	$	87,930	$	87,872

Schedule of marketable securities in unrealized loss positions [Table Text Block]

The following table summarizes the estimated fair value and gross unrealized holding losses of marketable securities, aggregated by investment instrument and period of time in an unrealized loss position at June 30, 2017 and December 31, 2016:  

	Unrealized Loss Position For Less Than 12 Months					Unrealized Loss Position For Greater Than 12 Months
	Fair Value		Gross Unrealized Losses			Fair Value		Gross Unrealized Losses
June 30, 2017
Municipal notes and bonds	$	26,062	$	(7	)	$	—	$	—
Corporate bonds	—		—			—		—
Total	$	26,062	$	(7	)	$	—	$	—
December 31, 2016
Municipal notes and bonds	$	64,918	$	(65	)	$	—	$	—
Corporate bonds	—		—			—		—
Total	$	64,918	$	(65	)	$	—	$	—

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Derivative Instruments and Hedging Activities Derivative Instruments and Hedging Activities - (Tables)

6 Months Ended

Jun. 30, 2017

Derivative Instruments and Hedging Activities [Abstract]

Schedule of Derivative Instruments in Statement of Financial Position, Fair Value [Table Text Block]

The dollar equivalent of the U.S. dollar forward contracts and related fair values as of June 30, 2017 and December 31, 2016 were as follows:

	June 30, 2017		December 31, 2016
Notional amount	$	3,148	$	3,827
Fair value of asset	$	94	$	312

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Identifiable Intangible Assets - (Tables)

6 Months Ended

Jun. 30, 2017

Identifiable Intangible Assets [Abstract]

Schedule of Finite-Lived Intangible Assets by Major Class [Table Text Block]

Purchased intangible assets as of June 30, 2017 and December 31, 2016 are as follows:

	Gross Carrying Amount		Accumulated Amortization		Net
June 30, 2017
Finite-lived intangibles:
Developed technology	$	65,527	$	57,790	$	7,737
Customer and distributor relationships	9,560		8,670		890
Trade names	4,361		3,725		636
Total identifiable intangible assets	$	79,448	$	70,185	$	9,263
December 31, 2016
Finite-lived intangibles:
Developed technology	$	65,527	$	56,986	$	8,541
Customer and distributor relationships	9,560		8,514		1,046
Trade names	4,361		3,675		686
Total identifiable intangible assets	$	79,448	$	69,175	$	10,273

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Balance Sheet Details - (Tables)

6 Months Ended

Jun. 30, 2017

Balance Sheet Detail [Abstract]

Schedule of Inventory, Current [Table Text Block]

Inventories are comprised of the following:

	June 30, 2017		December 31, 2016
Materials	$	34,739	$	32,993
Work-in-process	19,862		18,764
Finished goods	12,234		13,728
Total inventories	$	66,835	$	65,485

Property, Plant and Equipment [Table Text Block]

Property, plant and equipment, net is comprised of the following:

	June 30, 2017			December 31, 2016
Land and building	$	2,584		$	2,584
Machinery and equipment	26,803			23,493
Furniture and fixtures	3,036			2,699
Computer equipment and software	5,682			5,204
Leasehold improvements	8,952			8,116
	47,057			42,096
Accumulated depreciation	(31,966		)	(30,238		)
Total property, plant and equipment, net	$	15,091		$	11,858

Schedule of Other Assets [Table Text Block]

Other assets is comprised of the following:

	June 30, 2017		December 31, 2016
Deferred income taxes	$	32,165	$	30,850
Other	590		593
Total other assets	$	32,755	$	31,443

Other Current liabilities [Table Text Block]

Other current liabilities is comprised of the following:

	June 30, 2017		December 31, 2016
Intangible asset acquisition - Stella Alliance	$	1,000	$	1,000
Contingent consideration - acquisitions	634		855
Warrant settlement payable	—		1,025
Customer deposits	983		996
Other	5,105		3,263
Total other current liabilities	$	7,722	$	7,139

Other Non-current liabilities [Table Text Block]

Other non-current liabilities is comprised of the following:

	June 30, 2017		December 31, 2016
Unrecognized tax benefits (including interest)	$	4,866	$	3,386
Contingent consideration - acquisitions	2,391		2,396
Deferred revenue	1,299		1,132
Other	2,691		2,088
Total other non-current liabilities	$	11,247	$	9,002

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Debt Obligations - (Tables)

6 Months Ended

Jun. 30, 2017

Debt Obligations [Abstract]

Schedule of interest cost recognized on convertible senior notes [Table Text Block]

The following table presents the amount of interest cost recognized relating to the Notes during the three and six months endedJune 30, 2017 and June 30, 2016:

	Three Months Ended June 30,				Six Months Ended June 30,
	2017		2016		2017		2016
Contractual interest coupon	$	—	$	563	$	—	$	1,125
Amortization of interest discount	—		899		—		1,793
Amortization of debt issuance costs	—		123		—		246
Total interest cost recognized	$	—	$	1,585	$	—	$	3,164

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Commitments and Contingencies - (Tables)

6 Months Ended

Jun. 30, 2017

Commitments and Contingencies [Abstract]

Schedule of changes product warranty liability [Table Text Block]

Changes in the Company’s warranty reserves are as follows:

	Six Months Ended June 30,
	2017			2016
Balance, beginning of the period	$	1,788		$	1,894
Accruals	1,659			1,261
Usage	(1,311		)	(1,319		)
Balance, end of the period	$	2,136		$	1,836

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Share-Based Compensation - (Tables)

6 Months Ended

Jun. 30, 2017

Share-based Compensation [Abstract]

Summary of restricted stock unit activity [Table Text Block]

A summary of the Company’s nonvested restricted stock unit activity with respect to the six months endedJune 30, 2017 is as follows:

	Number of Shares		Weighted Average Grant Date Fair Value
Nonvested at December 31, 2016	1,136		$	12.30
Granted	273		$	22.62
Vested	(277	)	$	11.35
Forfeited	(30	)	$	12.30
Nonvested at June 30, 2017	1,102		$	15.10

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Other Income - (Tables)

6 Months Ended

Jun. 30, 2017

Other Income (Expense) [Abstract]

Schedule of Other Nonoperating Income (Expense) [Table Text Block]

	Three Months Ended				Six Months Ended
	June 30,				June 30,
	2017		2016		2017		2016
Foreign currency exchange losses, net	$	166	$	192	$	435	$	299
Total other expense	$	166	$	192	$	435	$	299

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Income Taxes - (Tables)

6 Months Ended

Jun. 30, 2017

Income Taxes [Abstract]

Schedule of effective tax rate [Table Text Block]

The following table provides details of income taxes:

	Three Months Ended						Six Months Ended
	June 30,						June 30,
	2017			2016			2017			2016
Income before income taxes	$	12,752		$	10,593		$	22,359		$	30,154
Provision for income taxes	$	3,559		$	2,992		$	6,015		$	8,614
Effective tax rate	27.9		%	28.2		%	26.9		%	28.6		%

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Earnings Per Share - (Tables)

6 Months Ended

Jun. 30, 2017

Earnings Per Share [Abstract]

Schedule of Antidilutive Securities Excluded from Computation of Earnings Per Share [Table Text Block]

The following table sets forth the weighted average number of stock options and restricted stock units that have been excluded from the calculation of diluted earnings per share as their effect would have been antidilutive:

	Three Months Ended June 30,		Six Months Ended June 30,
	2017	2016	2017	2016
Stock options	—	4	—	78
Restricted stock units	1	—	13	—
Total	1	4	13	78

Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]

The Company’s basic and diluted earnings per share amounts are as follows:

	Three Months Ended June 30,				Six Months Ended June 30,
	2017		2016		2017		2016
Numerator:
Net income	$	9,193	$	7,601	$	16,344	$	21,540
Denominator:
Basic earnings per share - weighted average shares outstanding	31,501		30,779		31,397		30,869
Effect of potential dilutive securities:
Employee stock options and restricted stock units - dilutive shares	645		563		704		630
Convertible senior notes - dilutive shares	—		412		—		206
Warrant - dilutive shares	—		—		3		—
Diluted earnings per share - weighted average shares outstanding	32,146		31,754		32,104		31,705
Earnings per share:
Basic	$	0.29	$	0.25	$	0.52	$	0.70
Diluted	$	0.29	$	0.24	$	0.51	$	0.68

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Accumulated Other Comprehensive Loss (Tables)

6 Months Ended

Jun. 30, 2017

Accumulated Other Comprehensive Loss [Abstract]

Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]

The components of accumulated other comprehensive loss, net of tax, are as follows:

	Foreign currency translation adjustments			Net unrealized (gains) losses on available-for-sale investments			Accumulated other comprehensive loss (income)
Beginning Balance, December 31, 2016	$	2,742		$	37		$	2,779
Net current period other comprehensive income	(1,253		)	(45		)	(1,298		)
Reclassifications	—			—			—
Ending balance, June 30, 2017	$	1,489		$	(8	)	$	1,481

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Segment Reporting and Geographic Information - (Tables)

6 Months Ended

Jun. 30, 2017

Segment Reporting and Geographic Information [Abstract]

Schedule of revenue from external customers by Products and Services [Table Text Block]

The following table lists the different sources of revenue:

	Three Months Ended								Six Months Ended
	June 30,								June 30,
	2017				2016				2017				2016
Systems and software:
Process Control	$	47,711	71	%	$	34,464	55	%	$	91,586	72	%	$	70,922	61	%
Lithography	3,533		5	%	11,480		18	%	3,550		2	%	11,650		10	%
Software	6,895		10	%	7,780		12	%	14,394		11	%	15,202		13	%
Parts	7,348		11	%	5,993		10	%	13,678		11	%	13,153		11	%
Services	1,931		3	%	2,984		5	%	4,889		4	%	6,136		5	%
Total revenue	$	67,418	100	%	$	62,701	100	%	$	128,097	100	%	$	117,063	100	%

Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block]

For geographical revenue reporting, revenues are attributed to the geographic location in which the product is shipped.  Revenue by geographic region is as follows:

	Three Months Ended				Six Months Ended
	June 30,				June 30,
	2017		2016		2017		2016
United States	$	9,182	$	5,646	$	18,190	$	13,034
Taiwan	20,323		14,535		34,156		36,570
Japan	3,468		3,164		6,677		6,101
China	5,904		10,824		20,005		19,649
South Korea	14,221		2,226		23,751		3,849
Singapore	1,945		14,879		5,211		21,926
Other Asia	1,444		1,674		1,559		2,545
Germany	4,789		4,235		7,869		4,932
Other Europe	6,142		5,518		10,679		8,457
Total revenue	$	67,418	$	62,701	$	128,097	$	117,063

Schedule of Revenue by Major Customers by Reporting Segments [Table Text Block]

The following customers each accounted for more than 10% of total revenues for the indicated periods.

	Six Months Ended
	June 30,
	2017		2016
Customer A	11.2	%	1.6	%
Customer B	6.0	%	13.4	%
Customer C	0.9	%	10.2	%

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Share Repurchase Program Stock Repurchase Program (Tables)

6 Months Ended

Jun. 30, 2017

Statement of Stockholders' Equity [Abstract]

share repurchase program [Table Text Block]

The following table summarizes the Company’s stock repurchases for the three and six month periods ended June 30, 2017 and 2016, respectively:

	Three Months Ended				Six Months Ended
	June 30,				June 30,
	2017		2016		2017		2016
Shares of common stock repurchased	—		245		—		615
Cost of stock repurchased		$—		$3,344		$—		$8,045
Average price paid per share		$—		$13.63		$—		$13.07

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Basis of Presentation Pronouncement reclass (Details) - Type of Adoption [Domain] - USD ($) $ in Thousands	3 Months Ended	6 Months Ended
	Jun. 30, 2017	Jun. 30, 2017	Dec. 31, 2016
New Accounting Pronouncements or Change in Accounting Principle [Line Items]
Employee Service Share-based Compensation, Tax Benefit from Compensation Expense	$ 623	$ 1,295
Proceeds and Excess Tax Benefit from Share-based Compensation		$ 252
Retained Earnings Reclassification			$ 72

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Fair Value Measurements - (Details) - USD ($) $ in Thousands	6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Dec. 31, 2016	Jul. 15, 2016	Jul. 25, 2011
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	$ 90,403		$ 87,029
Financial Instruments, Owned, Corporate Equities, at Fair Value	841		843
Foreign Currency Contract, Asset, Fair Value Disclosure	94		312
Assets, Fair Value Disclosure	91,338		88,184
Business Combination, Contingent Consideration, Liability	3,025		3,251
Liabilities, Fair Value Disclosure	$ 3,025		3,251
Fair Value Inputs Discount Rate 3	8.60%	9.10%
Fair Value, Measurement with Unobservable Inputs Reconciliations, Recurring Basis, Liability Value	$ 3,025		3,251
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Gain (Loss) Included in Other Comprehensive Income (Loss)	0
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Purchases	132
Fair Value, Measurement with Unobservable Inputs Reconciliation, Recurring Basis, Liability, Settlements	$ (358)
Fair Value, Level 3 Transfers out, Description	0
Convertible Debt				$ 60,000	$ 60,000
Fair Value, Inputs, Level 1 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	$ 0		0
Financial Instruments, Owned, Corporate Equities, at Fair Value	0		0
Foreign Currency Contract, Asset, Fair Value Disclosure	0		0
Assets, Fair Value Disclosure	0		0
Business Combination, Contingent Consideration, Liability	0		0
Liabilities, Fair Value Disclosure	0		0
Fair Value, Inputs, Level 2 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	90,403		87,029
Financial Instruments, Owned, Corporate Equities, at Fair Value	841		843
Foreign Currency Contract, Asset, Fair Value Disclosure	94		312
Assets, Fair Value Disclosure	91,338		88,184
Business Combination, Contingent Consideration, Liability	0		0
Liabilities, Fair Value Disclosure	0		0
Fair Value, Inputs, Level 3 [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Financial Instruments, Owned, State and Municipal Government Obligations, at Fair Value	0		0
Financial Instruments, Owned, Corporate Equities, at Fair Value	0		0
Foreign Currency Contract, Asset, Fair Value Disclosure	0		0
Assets, Fair Value Disclosure	0		0
Business Combination, Contingent Consideration, Liability	3,025		3,251
Liabilities, Fair Value Disclosure	$ 3,025		$ 3,251

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Marketable Securities - (Details) - USD ($) $ in Thousands	6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Dec. 31, 2016
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	$ 91,230		$ 87,930
Available-for-sale Securities, Fair Value Disclosure	91,244		87,872
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Debt Maturities, within One Year, Amortized Cost Basis	77,592		82,498
Available-for-sale Securities, Debt Maturities, within One Year, Fair Value	77,601		82,445
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Amortized Cost Basis	13,638		5,432
Available-for-sale Securities, Debt Maturities, Rolling Year Two Through Five, Fair Value	13,643		5,427
Available-for-sale Securities, Debt Maturities, after Five Through Ten Years, Amortized Cost Basis	0		0
Available-for-sale Securities, Debt Maturities, after Five Through Ten Years, Fair Value	0		0
Available-for-sale Securities, Debt Maturities, after Ten Years, Amortized Cost Basis	0		0
Available-for-sale Securities, Debt Maturities, after Ten Years, Fair Value	0		0
US Government and Government Agencies and Authorities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	90,389		87,088
Available-for-sale Securities, Gross Unrealized Gains	21	$ 6
Available-for-sale Securities, Gross Unrealized Losses	(7)	(65)
Available-for-sale Securities, Fair Value Disclosure	90,403		87,029
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	26,062		64,918
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	(7)	(65)
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0		0
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	0	0
Corporate Bond Securities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	841		842
Available-for-sale Securities, Gross Unrealized Gains	0	1
Available-for-sale Securities, Gross Unrealized Losses	0	0
Available-for-sale Securities, Fair Value Disclosure	841		843
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	0		0
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	0	0
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0		0
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	0	0
Available-for-sale Securities [Member]
Schedule of Available-for-sale Securities [Line Items]
Available-for-sale Securities, Amortized Cost Basis	91,230		87,930
Available-for-sale Securities, Gross Unrealized Gains	21	7
Available-for-sale Securities, Gross Unrealized Losses	(7)	(65)
Available-for-sale Securities, Fair Value Disclosure	91,244		87,872
Available-for-sale Securities, Debt Maturities, Fair Value [Abstract]
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than Twelve Months, Fair Value	26,062		64,918
Available-for-sale Securities, Continuous Unrealized Loss Position, Less than 12 Months, Aggregate Losses	(7)	(65)
Available-for-sale Securities, Continuous Unrealized Loss Position, Twelve Months or Longer, Fair Value	0		$ 0
Available-for-sale Securities, Continuous Unrealized Loss Position, 12 Months or Longer, Aggregate Losses	$ 0	$ 0

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Derivative Instruments and Hedging Activities - (Details) - USD ($) $ in Thousands	6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Dec. 31, 2016
Derivative [Line Items]
Gain (Loss) on Foreign Currency Derivative Instruments Not Designated as Hedging Instruments	$ 218	$ 300
Derivative, Notional Amount	3,148		$ 3,827
Derivative Asset, Fair Value, Gross Liability	$ 94
Derivative Asset, Fair Value, Gross Asset			$ 312

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Identifiable Intangible Assets - (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016	Dec. 31, 2016
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	$ 79,448		$ 79,448		$ 79,448
Finite-Lived Intangible Assets, Accumulated Amortization	70,185		70,185		69,175
Intangible Assets, Net (Excluding Goodwill)	9,263		9,263		10,273
Amortization of Intangible Assets	505	$ 595	1,010	$ 1,190
Future Amortization Expense, Remainder of Fiscal Year	923		923
Future Amortization Expense, Year One	1,496		1,496
Future Amortization Expense, Year Two	1,496		1,496
Future Amortization Expense, Year Three	1,294		1,294
Future Amortization Expense, Year Four	546		546
Future Amortization Expense, Year Five	480		480
Developed Technology Rights [Member]
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	65,527		65,527		65,527
Finite-Lived Intangible Assets, Accumulated Amortization	57,790		57,790		56,986
Intangible Assets, Net (Excluding Goodwill)	7,737		7,737		8,541
Customer Relationships [Member]
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	9,560		9,560		9,560
Finite-Lived Intangible Assets, Accumulated Amortization	8,670		8,670		8,514
Intangible Assets, Net (Excluding Goodwill)	890		890		1,046
Trade Names [Member]
Finite-Lived Intangible Assets [Line Items]
Finite-Lived Intangible Assets, Gross	4,361		4,361		4,361
Finite-Lived Intangible Assets, Accumulated Amortization	3,725		3,725		3,675
Intangible Assets, Net (Excluding Goodwill)	$ 636		$ 636		$ 686

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Balance Sheet Details - Inventory (Details) - USD ($) $ in Thousands	Jun. 30, 2017	Dec. 31, 2016
Inventory Details [Abstract]
Inventory, Raw Materials, Net of Reserves	$ 34,739	$ 32,993
Inventory, Work in Process, Net of Reserves	19,862	18,764
Inventory, Finished Goods, Net of Reserves	12,234	13,728
Inventory, Net	66,835	65,485
Inventory Valuation Reserves	$ 11,842	$ 10,545

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Balance Sheet Details - Property Plant & Equipment (Details) - USD ($) $ in Thousands	Jun. 30, 2017	Dec. 31, 2016
Property, Plant and Equipment [Line Items]
Buildings and Land Gross	$ 2,584	$ 2,584
Machinery and Equipment, Gross	26,803	23,493
Furniture and Fixtures, Gross	3,036	2,699
Computer Equipments And Software Gross	5,682	5,204
Leasehold Improvements, Gross	8,952	8,116
Property, Plant and Equipment, Gross	47,057	42,096
Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment	(31,966)	(30,238)
Property, Plant and Equipment, Net	$ 15,091	$ 11,858

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Balance Sheet Details - Other Assets (Details) - USD ($) $ in Thousands	Jun. 30, 2017	Dec. 31, 2016
Other Assets [Abstract]
Deferred Tax Assets, Net of Valuation Allowance, Noncurrent	$ 32,165	$ 30,850
Other	590	593
Total Other Assets	$ 32,755	$ 31,443

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Balance Sheet Details - Other Current Liabilities (Details) - USD ($) $ in Thousands	Jun. 30, 2017	Dec. 31, 2016
Other Current Liabilities [Abstract]
Intangible assets current liabilities	$ 1,000	$ 1,000
Contingent Consideration Current Liability	634	855
Payable for repurchase of warrant	0	1,025
Customer Deposits, Current	983	996
Other Current Liabilities Subtotal	5,105	3,263
Other Liabilities, Current	$ 7,722	$ 7,139

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Balance Sheet Details - Other Non-Current Liabilities (Details) - USD ($) $ in Thousands	Jun. 30, 2017	Dec. 31, 2016
Other Non-current Liabilities [Abstract]
Unrecognized Tax Benefits	$ 4,866	$ 3,386
Contingent consideration - Acquisition non-current liability	2,391	2,396
Deferred Revenue, Noncurrent	1,299	1,132
Other Liabilities	2,691	2,088
Other Liabilities, Noncurrent	$ 11,247	$ 9,002

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Debt Obligations - (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	3 Months Ended		6 Months Ended		12 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016	Dec. 31, 2016	Jul. 15, 2016	Jul. 25, 2011
Convertible Debt						$ 60,000	$ 60,000
Conversion of Stock, Shares Issued					540
Debt Instrument, Interest Rate, Stated Percentage							3.75%
Class of Warrant or Right, Exercise Price of Warrants or Rights	$ 17.00		$ 17.00
Contractual Interest Coupon	$ 0	$ 563	$ 0	$ 1,125
Amortization of Debt Discount (Premium)	0	899	0	1,793
Amortization of Financing Costs	0	123	0	246
Interest Expense, Debt	$ 0	$ 1,585	$ 0	3,164
Class of Warrant or Right, Number of Securities Called by Warrants or Rights	386		386				4,634
Redemption of stock warrants			102		4,248
Stock Issued During Period, Value, Conversion of Convertible Securities					$ 10,525
Payments for Repurchase of Warrants			$ 1,025	$ 0	$ 9,500
Investment Warrants, Exercise Price			$ 23.13		$ 19.82
Common Stock [Member]
Redemption of stock warrants					80

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Commitments and Contingencies - (Details) - USD ($) $ in Thousands	6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Dec. 31, 2016	Dec. 31, 2015
Commitments and Contingencies [Abstract]
Standard Product Warranty Accrual	$ 2,136	$ 1,836	$ 1,788	$ 1,894
Product Warranty Accrual, Warranties Issued	1,659	1,261
Product Warranty Accrual, Payments	(1,311)	$ (1,319)
Loss Contingency, damages Awarded, Value 2	14,600
Proceeds from Legal Settlements	13,000
Line of Credit Facility, Remaining Borrowing Capacity	$ 86,000
Line of Credit Facility, Interest Rate at Period End	2.80%

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Share-Based Compensation Restricted Stock Units (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	6 Months Ended
	Jun. 30, 2017	Dec. 31, 2016
Restricted Stock Units Activity [Abstract]
Market performance-based restricted stock units granted	38
Maximum potential market performance-based restricted stock units to vest	76
Estimated fair value per share of the market performance-based restricted stock units	$ 25.30
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number	1,102	1,136
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value	$ 15.10	$ 12.30
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period	273
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value	$ 22.62
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period	(277)
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value	$ 11.35
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeited in Period	(30)
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value	$ 12.30
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized	$ 12,601	$ 8,697
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized, Period for Recognition	2 years 7 months

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Other Income - (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016
Other Income (Expense) [Abstract]
Foreign currency exchange losses (gains), net	$ 166	$ 192	$ 435	$ 299
Total other expenses (income)	$ 166	$ 192	$ 435	$ 299

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Income Taxes - (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016	Dec. 31, 2016
Income Taxes [Abstract]
Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest	$ 12,752	$ 10,593	$ 22,359	$ 30,154
Income Tax Expense (Benefit)	$ 3,559	$ 2,992	$ 6,015	$ 8,614
Effective Income Tax Rate	27.90%	28.20%	26.90%	28.60%
Valuation Allowance, Amount	$ 1,924		$ 1,924		$ 1,924

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Earnings Per Share - (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016
Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]
Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount	1	4	13	78
Stock Options Antidilutive securities excluded from computation	0	4	0	78
Restricted Stock Unit Antidilutive excluded from computation	1	0	13	0
Net Income (Loss) Attributable to Parent	$ 9,193	$ 7,601	$ 16,344	$ 21,540
Weighted Average Number of Shares Outstanding, Basic	31,501	30,779	31,397	30,869
Weighted Average Number Diluted Shares Outstanding Adjustment	645	563	704	630
Dilutive Securities, Effect on Basic Earnings Per Share	$ 0	$ 412	$ 0	$ 206
Warrant Dilutive Shares	$ 0	$ 0	$ 3	$ 0
Weighted Average Number of Shares Outstanding, Diluted	32,146	31,754	32,104	31,705
Earnings (Loss) Per Share, Basic	$ 0.29	$ 0.25	$ 0.52	$ 0.70
Earnings (Loss) Per Share, Diluted	$ 0.29	$ 0.24	$ 0.51	$ 0.68

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Accumulated Other Comprehensive Loss Accumulated Other Comprehensive Loss (Details) - USD ($) $ in Thousands	Jun. 30, 2017	Dec. 31, 2016
Stockholders' Equity Attributable to Parent	$ 313,291	$ 293,735
Accumulated Translation Adjustment [Member]
Stockholders' Equity Attributable to Parent	1,489	2,742
Net current period other comprehensive gain (loss)	(1,253)
Reclassification of accumulated other comprehensive income (loss)	0
Accumulated Net Unrealized Investment Gain (Loss) [Member]
Stockholders' Equity Attributable to Parent	(8)	37
Net current period other comprehensive gain (loss)	(45)
Reclassification of accumulated other comprehensive income (loss)	0
Accumulated Other Comprehensive Income (Loss) [Member]
Stockholders' Equity Attributable to Parent	1,481	$ 2,779
Net current period other comprehensive gain (loss)	(1,298)
Reclassification of accumulated other comprehensive income (loss)	$ 0

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Segment Reporting (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016
Segment Reporting Information [Line Items]
Revenues	$ 67,418	$ 62,701	$ 128,097	$ 117,063
Concentration Risk, Percentage			11.20%	1.60%
Process Control Revenue [Member]
Segment Reporting Information [Line Items]
Revenues	47,711	34,464	$ 91,586	$ 70,922
Lithography Revenue [Domain]
Segment Reporting Information [Line Items]
Revenues	3,533	11,480	3,550	11,650
Software [Domain]
Segment Reporting Information [Line Items]
Revenues	6,895	7,780	14,394	15,202
Sales Revenue, Goods, Net [Member]
Segment Reporting Information [Line Items]
Revenues	7,348	5,993	13,678	13,153
Sales Revenue, Services, Net [Member]
Segment Reporting Information [Line Items]
Revenues	1,931	2,984	4,889	6,136
Sales Revenue, Segment [Member]
Segment Reporting Information [Line Items]
Revenues	$ 67,418	$ 62,701	$ 128,097	$ 117,063
Sales [Member] | Percentage of Process Control Revenue [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	71.00%	55.00%	72.00%	61.00%
Sales [Member] | Percentage of Lithography Revenue [Member] [Domain]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	5.00%	18.00%	2.00%	10.00%
Sales [Member] | Percentage of Software Revenue [Domain]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	10.00%	12.00%	11.00%	13.00%
Sales [Member] | Percentage of Parts [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	11.00%	10.00%	11.00%	11.00%
Sales [Member] | Percentage of Service [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	3.00%	5.00%	4.00%	5.00%
Sales [Member] | Percentage of Total Revenue [Member]
Segment Reporting Information [Line Items]
Concentration Risk, Percentage	100.00%	100.00%	100.00%	100.00%
UNITED STATES
Segment Reporting Information [Line Items]
Revenues	$ 9,182	$ 5,646	$ 18,190	$ 13,034
TAIWAN, PROVINCE OF CHINA
Segment Reporting Information [Line Items]
Revenues	20,323	14,535	34,156	36,570
JAPAN
Segment Reporting Information [Line Items]
Revenues	3,468	3,164	6,677	6,101
CHINA
Segment Reporting Information [Line Items]
Revenues	5,904	10,824	20,005	19,649
SINGAPORE
Segment Reporting Information [Line Items]
Revenues	1,945	14,879	5,211	21,926
Asia [Member]
Segment Reporting Information [Line Items]
Revenues	1,444	1,674	1,559	2,545
GERMANY
Segment Reporting Information [Line Items]
Revenues	4,789	4,235	7,869	4,932
Sales [Member]
Segment Reporting Information [Line Items]
Revenues	$ 67,418	$ 62,701	$ 128,097	$ 117,063

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Segment Reporting and Geographic Information Geographic Information (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016
Segment Reporting Information [Line Items]
Revenues	$ 67,418	$ 62,701	$ 128,097	$ 117,063
UNITED STATES
Segment Reporting Information [Line Items]
Revenues	9,182	5,646	18,190	13,034
TAIWAN, PROVINCE OF CHINA
Segment Reporting Information [Line Items]
Revenues	20,323	14,535	34,156	36,570
JAPAN
Segment Reporting Information [Line Items]
Revenues	3,468	3,164	6,677	6,101
CHINA
Segment Reporting Information [Line Items]
Revenues	5,904	10,824	20,005	19,649
South Korea [Domain]
Segment Reporting Information [Line Items]
Revenues	14,221	2,226	23,751	3,849
SINGAPORE
Segment Reporting Information [Line Items]
Revenues	1,945	14,879	5,211	21,926
Asia [Member]
Segment Reporting Information [Line Items]
Revenues	1,444	1,674	1,559	2,545
GERMANY
Segment Reporting Information [Line Items]
Revenues	4,789	4,235	7,869	4,932
Country Other Europe [Member]
Segment Reporting Information [Line Items]
Revenues	6,142	5,518	10,679	8,457
Sales [Member]
Segment Reporting Information [Line Items]
Revenues	$ 67,418	$ 62,701	$ 128,097	$ 117,063

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Segment Reporting and Geographic Information Customer Reporting (Details)	6 Months Ended
	Jun. 30, 2017 Rate	Jun. 30, 2016 Rate
Segment Reporting Information [Line Items]
Entity-Wide Revenue, Major Customer, Percentage	11.20%	1.60%
Major Customer Two [Domain]
Segment Reporting Information [Line Items]
Entity-Wide Revenue, Major Customer, Percentage	6.00%	13.40%
Major Customer Three [Member]
Segment Reporting Information [Line Items]
Entity-Wide Revenue, Major Customer, Percentage	0.90%	10.20%

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Share Repurchase Program - (Details) - USD ($) $ / shares in Units, shares in Thousands, $ in Thousands	3 Months Ended		6 Months Ended
	Jun. 30, 2017	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016
Share Repurchase Program [Abstract]
Stock Repurchase Program, Number of Shares Authorized to be Repurchased	3,000		3,000
Stock Repurchased and Retired During Period, Shares	0	245	0	615
Shares available for future repurchase	711		711
Stock Repurchased During Period, Value	$ 0	$ 3,344	$ 0	$ 8,045
StockRepurchasedAndRetired-AveragePricePerShare	$ 0.00	$ 13.63	$ 0.00	$ 13.07

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Subsequent Event (Details) $ in Millions	6 Months Ended
	Jun. 30, 2017 USD ($)
Subsequent Events [Abstract]
Proceeds from Legal Settlements	$ 13.0