EX-21.1 3 a12312016exhibit211.htm EXHIBIT 21.1 Exhibit


Exhibit 21.1

SUBSIDIARIES
Name
 
Jurisdiction
Rudolph Technologies Europe, B.V.
 
Netherlands
Rudolph Technologies Japan KK
 
Japan
Rudolph Technologies (Shanghai) Trading Co., Ltd.
 
China
Rudolph Technologies Germany GmbH
 
Germany
Azores Corp.
 
Delaware
Azores Asia Limited
 
Hong Kong