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Organization and Nature of Operations	12 Months Ended
Organization and Nature of Operations	Dec. 31, 2016
Organization and Nature of Operations: [Abstract]
Nature of Operations [Text Block]	Organization and Nature of Operations: Rudolph Technologies, Inc. (the “Company”) designs, develops, manufactures and supports high-performance process control defect inspection, advanced packaging lithography, metrology and process control software systems used in semiconductor device manufacturing. The Company has branch sales and service offices in South Korea, Taiwan and Singapore and wholly-owned sales and service subsidiaries in the United States, Europe, Japan and China. The Company operates in a single segment and is a provider of process characterization equipment and software for wafer fabs and advanced packaging facilities.