Segment Reporting and Geographic Information Geographic Region (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014
UNITED STATES
Segment Reporting Information [Line Items]
Revenues	$ 30,876	$ 46,778	$ 56,963
TAIWAN, PROVINCE OF CHINA
Segment Reporting Information [Line Items]
Revenues	68,211	55,548	49,532
Korea (South), Won
Segment Reporting Information [Line Items]
Revenues	15,556	14,221	16,690
SINGAPORE
Segment Reporting Information [Line Items]
Revenues	35,517	27,310	14,551
Austria [Domain]
Segment Reporting Information [Line Items]
Revenues	2,049	3,557	752
JAPAN
Segment Reporting Information [Line Items]
Revenues	11,875	13,216	9,449
GERMANY
Segment Reporting Information [Line Items]
Revenues	9,759	29,378	9,142
CHINA
Segment Reporting Information [Line Items]
Revenues	33,720	17,152	11,521
Other Europe [Domain]
Segment Reporting Information [Line Items]
Revenues	18,720	11,403	9,362
Asia [Member]
Segment Reporting Information [Line Items]
Revenues	6,497	3,127	3,256
Sales [Member]
Segment Reporting Information [Line Items]
Revenues	$ 232,780	$ 221,690	$ 181,218