<SEC-DOCUMENT>0001094392-16-000062-index.html : 20160509
<SEC-HEADER>0001094392-16-000062.hdr.sgml : 20160509
<ACCEPTANCE-DATETIME>20160509135228
ACCESSION NUMBER:		0001094392-16-000062
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20160509
ITEM INFORMATION:		Other Events
ITEM INFORMATION:		Financial Statements and Exhibits
FILED AS OF DATE:		20160509
DATE AS OF CHANGE:		20160509

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			RUDOLPH TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001094392
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				223531208
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-36226
		FILM NUMBER:		161630955

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		978-253-6200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
</SEC-HEADER>
<DOCUMENT>
<TYPE>8-K
<SEQUENCE>1
<FILENAME>a8k592016.htm
<DESCRIPTION>8-K 5.9.2016
<TEXT>
Document 1 - file: a8k592016.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-99.1
<SEQUENCE>2
<FILENAME>ex9918k592016.htm
<DESCRIPTION>EXHIBIT 99.1
<TEXT>
Document 2 - file: ex9918k592016.htm

</DOCUMENT>
</SEC-DOCUMENT>