<SEC-DOCUMENT>0001094392-16-000053-index.html : 20160421 <SEC-HEADER>0001094392-16-000053.hdr.sgml : 20160421 <ACCEPTANCE-DATETIME>20160421091757 ACCESSION NUMBER: 0001094392-16-000053 CONFORMED SUBMISSION TYPE: DEF 14A PUBLIC DOCUMENT COUNT: 2 CONFORMED PERIOD OF REPORT: 20160518 FILED AS OF DATE: 20160421 DATE AS OF CHANGE: 20160421 EFFECTIVENESS DATE: 20160421 FILER: COMPANY DATA: COMPANY CONFORMED NAME: RUDOLPH TECHNOLOGIES INC CENTRAL INDEX KEY: 0001094392 STANDARD INDUSTRIAL CLASSIFICATION: INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823] IRS NUMBER: 223531208 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 FILING VALUES: FORM TYPE: DEF 14A SEC ACT: 1934 Act SEC FILE NUMBER: 001-36226 FILM NUMBER: 161582783 BUSINESS ADDRESS: STREET 1: PO BOX 1000 STREET 2: ONE RUDOLPH RD CITY: FLANDERS STATE: NJ ZIP: 07836 BUSINESS PHONE: 9736911300 MAIL ADDRESS: STREET 1: PO BOX 1000 STREET 2: ONE RUDOLPH RD CITY: FLANDERS STATE: NJ ZIP: 07836 </SEC-HEADER> <DOCUMENT> <TYPE>DEF 14A <SEQUENCE>1 <FILENAME>rtec_2016proxydef.htm <DESCRIPTION>DEF 14A <TEXT> Document 1 - file: rtec_2016proxydef.htm
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>2 <FILENAME>image0.jpg <TEXT> Document 2 - file: image0.jpg
</DOCUMENT> </SEC-DOCUMENT>