Summary of Significant Accounting Policies Recent Accounting pronouncements (Details) $ in Thousands	12 Months Ended
Dec. 31, 2015 USD ($)
Recent Accounting Pronouncements [Abstract]
Recent Accounting Pronouncement Reclass	$ 8,986

Recent Accounting Pronouncement Deferred Tax Reclass

No definition available.

Name:	rtec_RecentAccountingPronouncementReclass
Namespace Prefix:	rtec_
Data Type:	xbrli:monetaryItemType
Balance Type:	na
Period Type:	duration