Segment Reporting and Geographic Information (Tables)

12 Months Ended

Dec. 31, 2015

Segment Reporting and Geographic Information [Abstract]

Revenue from External Customers by Products and Services [Table Text Block]

The following table lists the different sources of revenue:

	Year Ended December 31,
	2015				2014				2013
Systems and software:
Inspection	$	118,925	54	%	$	87,818	49	%	$	89,089	51	%
Metrology	25,933		12	%	24,590		14	%	26,500		15	%
Data analysis and review	27,291		12	%	24,042		13	%	17,927		10	%
Lithography	14,519		6	%	11,163		6	%	8,548		5	%
Parts	24,072		11	%	20,334		11	%	21,078		12	%
Services	10,950		5	%	13,271		7	%	13,096		7	%
Total revenue	$	221,690	100	%	$	181,218	100	%	$	176,238	100	%

Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block]

The Company’s significant operations outside the United States include sales, service and application offices in Europe and Asia. For geographical reporting, revenues are attributed to the geographic location in which the product is shipped. Revenue by geographic region is as follows:

	Year Ended December 31,
	2015		2014		2013
Revenues from third parties:
United States	$	46,778	$	56,963	$	40,849
Taiwan	55,548		49,532		54,682
South Korea	14,221		16,690		10,704
Singapore	27,310		14,551		15,804
Austria	3,557		752		898
Japan	13,216		9,449		7,326
Germany	29,378		9,142		5,669
China	17,152		11,521		20,061
Other Europe	11,403		9,362		18,789
Other Asia	3,127		3,256		1,456
Total revenue	$	221,690	$	181,218	$	176,238