<SEC-DOCUMENT>0001094392-15-000021-index.html : 20150522
<SEC-HEADER>0001094392-15-000021.hdr.sgml : 20150522
<ACCEPTANCE-DATETIME>20150522140723
ACCESSION NUMBER:		0001094392-15-000021
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		34
CONFORMED PERIOD OF REPORT:	20150520
ITEM INFORMATION:		Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers: Compensatory Arrangements of Certain Officers
ITEM INFORMATION:		Submission of Matters to a Vote of Security Holders
ITEM INFORMATION:		Regulation FD Disclosure
ITEM INFORMATION:		Financial Statements and Exhibits
FILED AS OF DATE:		20150522
DATE AS OF CHANGE:		20150522

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			RUDOLPH TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001094392
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				223531208
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-36226
		FILM NUMBER:		15885965

	BUSINESS ADDRESS:	
		STREET 1:		PO BOX 1000
		STREET 2:		ONE RUDOLPH RD
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836
		BUSINESS PHONE:		9736911300

	MAIL ADDRESS:	
		STREET 1:		PO BOX 1000
		STREET 2:		ONE RUDOLPH RD
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836
</SEC-HEADER>
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<TYPE>8-K
<SEQUENCE>1
<FILENAME>a8k5202015.htm
<DESCRIPTION>8-K
<TEXT>
Document 1 - file: a8k5202015.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-99.1
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<FILENAME>annualshareholdersmeetin.htm
<DESCRIPTION>EXHIBIT 99.1
<TEXT>
Document 2 - file: annualshareholdersmeetin.htm

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<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>annualshareholdersmeetin001.jpg
<TEXT>
Document 3 - file: annualshareholdersmeetin001.jpg

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<SEQUENCE>4
<FILENAME>annualshareholdersmeetin002.jpg
<TEXT>
Document 4 - file: annualshareholdersmeetin002.jpg

</DOCUMENT>
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<SEQUENCE>5
<FILENAME>annualshareholdersmeetin003.jpg
<TEXT>
Document 5 - file: annualshareholdersmeetin003.jpg

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<SEQUENCE>6
<FILENAME>annualshareholdersmeetin004.jpg
<TEXT>
Document 6 - file: annualshareholdersmeetin004.jpg

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<DOCUMENT>
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<SEQUENCE>7
<FILENAME>annualshareholdersmeetin005.jpg
<TEXT>
Document 7 - file: annualshareholdersmeetin005.jpg

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<DOCUMENT>
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<SEQUENCE>8
<FILENAME>annualshareholdersmeetin006.jpg
<TEXT>
Document 8 - file: annualshareholdersmeetin006.jpg

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<SEQUENCE>9
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<TEXT>
Document 9 - file: annualshareholdersmeetin007.jpg

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<SEQUENCE>10
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<TEXT>
Document 10 - file: annualshareholdersmeetin008.jpg

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<SEQUENCE>11
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<TEXT>
Document 11 - file: annualshareholdersmeetin009.jpg

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<SEQUENCE>12
<FILENAME>annualshareholdersmeetin010.jpg
<TEXT>
Document 12 - file: annualshareholdersmeetin010.jpg

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<TEXT>
Document 13 - file: annualshareholdersmeetin011.jpg

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Document 14 - file: annualshareholdersmeetin012.jpg

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<SEQUENCE>15
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<TEXT>
Document 15 - file: annualshareholdersmeetin013.jpg

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<SEQUENCE>16
<FILENAME>annualshareholdersmeetin014.jpg
<TEXT>
Document 16 - file: annualshareholdersmeetin014.jpg

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<SEQUENCE>17
<FILENAME>annualshareholdersmeetin015.jpg
<TEXT>
Document 17 - file: annualshareholdersmeetin015.jpg

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<SEQUENCE>18
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<TEXT>
Document 18 - file: annualshareholdersmeetin016.jpg

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<SEQUENCE>19
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<TEXT>
Document 19 - file: annualshareholdersmeetin017.jpg

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<SEQUENCE>20
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<TEXT>
Document 20 - file: annualshareholdersmeetin018.jpg

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<SEQUENCE>21
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<TEXT>
Document 21 - file: annualshareholdersmeetin019.jpg

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<SEQUENCE>22
<FILENAME>annualshareholdersmeetin020.jpg
<TEXT>
Document 22 - file: annualshareholdersmeetin020.jpg

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<SEQUENCE>23
<FILENAME>annualshareholdersmeetin021.jpg
<TEXT>
Document 23 - file: annualshareholdersmeetin021.jpg

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<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>24
<FILENAME>annualshareholdersmeetin022.jpg
<TEXT>
Document 24 - file: annualshareholdersmeetin022.jpg

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<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>25
<FILENAME>annualshareholdersmeetin023.jpg
<TEXT>
Document 25 - file: annualshareholdersmeetin023.jpg

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<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>26
<FILENAME>annualshareholdersmeetin024.jpg
<TEXT>
Document 26 - file: annualshareholdersmeetin024.jpg

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<DOCUMENT>
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<SEQUENCE>27
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<TEXT>
Document 27 - file: annualshareholdersmeetin025.jpg

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<DOCUMENT>
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<SEQUENCE>28
<FILENAME>annualshareholdersmeetin026.jpg
<TEXT>
Document 28 - file: annualshareholdersmeetin026.jpg

</DOCUMENT>
<DOCUMENT>
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<SEQUENCE>29
<FILENAME>annualshareholdersmeetin027.jpg
<TEXT>
Document 29 - file: annualshareholdersmeetin027.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>30
<FILENAME>annualshareholdersmeetin028.jpg
<TEXT>
Document 30 - file: annualshareholdersmeetin028.jpg

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<SEQUENCE>31
<FILENAME>annualshareholdersmeetin029.jpg
<TEXT>
Document 31 - file: annualshareholdersmeetin029.jpg

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<SEQUENCE>32
<FILENAME>annualshareholdersmeetin030.jpg
<TEXT>
Document 32 - file: annualshareholdersmeetin030.jpg

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<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>33
<FILENAME>annualshareholdersmeetin031.jpg
<TEXT>
Document 33 - file: annualshareholdersmeetin031.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>34
<FILENAME>annualshareholdersmeetin032.jpg
<TEXT>
Document 34 - file: annualshareholdersmeetin032.jpg

</DOCUMENT>
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