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Segment Reporting and Geographic Information Customer Reporting (Details)
 3 Months Ended
Mar. 31, 2015
Rate
Mar. 31, 2014
Rate
Segment Reporting Information [Line Items]    
Entity-Wide Revenue, Major Customer, Percentage 11.10%us-gaap_ConcentrationRiskPercentage1 4.50%us-gaap_ConcentrationRiskPercentage1
Major Customers Two [Domain]    
Segment Reporting Information [Line Items]    
Entity-Wide Revenue, Major Customer, Percentage 10.20%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_MajorCustomersAxis
= rtec_MajorCustomersTwoDomain		 0.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_MajorCustomersAxis
= rtec_MajorCustomersTwoDomain
Major Customer Three [Domain]    
Segment Reporting Information [Line Items]    
Entity-Wide Revenue, Major Customer, Percentage 2.20%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_MajorCustomersAxis
= rtec_MajorCustomerThreeDomain		 14.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_MajorCustomersAxis
= rtec_MajorCustomerThreeDomain
Major Customer Four [Domain]    
Segment Reporting Information [Line Items]    
Entity-Wide Revenue, Major Customer, Percentage 0.90%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_MajorCustomersAxis
= rtec_MajorCustomerFourDomain		 17.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_MajorCustomersAxis
= rtec_MajorCustomerFourDomain