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Segment Reporting (Details) (USD $)
In Thousands, unless otherwise specified
 3 Months Ended
Mar. 31, 2015
Rate
Mar. 31, 2014
Rate
Segment Reporting Information [Line Items]    
Revenues $ 52,570us-gaap_Revenues $ 41,649us-gaap_Revenues
Concentration Risk, Percentage 11.10%us-gaap_ConcentrationRiskPercentage1 4.50%us-gaap_ConcentrationRiskPercentage1
Inspection Revenue [Member]    
Segment Reporting Information [Line Items]    
Revenues 28,462us-gaap_Revenues
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_InspectionRevenueMember		 18,002us-gaap_Revenues
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_InspectionRevenueMember
Metrology Revenue [Member]    
Segment Reporting Information [Line Items]    
Revenues 7,599us-gaap_Revenues
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_MetrologyRevenueMember		 5,749us-gaap_Revenues
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_MetrologyRevenueMember
Lithography Revenue [Domain]    
Segment Reporting Information [Line Items]    
Revenues 21us-gaap_Revenues
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_LithographyRevenueDomain		 3,657us-gaap_Revenues
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_LithographyRevenueDomain
Data Analysis & Review [Member]    
Segment Reporting Information [Line Items]    
Revenues 7,794us-gaap_Revenues
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_DataAnalysisReviewMember		 5,974us-gaap_Revenues
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_DataAnalysisReviewMember
Sales Revenue, Goods, Net [Member]    
Segment Reporting Information [Line Items]    
Revenues 5,655us-gaap_Revenues
/ us-gaap_StatementBusinessSegmentsAxis
= us-gaap_SalesRevenueGoodsNetMember		 5,040us-gaap_Revenues
/ us-gaap_StatementBusinessSegmentsAxis
= us-gaap_SalesRevenueGoodsNetMember
Sales Revenue, Services, Net [Member]    
Segment Reporting Information [Line Items]    
Revenues 3,039us-gaap_Revenues
/ us-gaap_StatementBusinessSegmentsAxis
= us-gaap_SalesRevenueServicesNetMember		 3,227us-gaap_Revenues
/ us-gaap_StatementBusinessSegmentsAxis
= us-gaap_SalesRevenueServicesNetMember
Sales Revenue, Segment [Member]    
Segment Reporting Information [Line Items]    
Revenues $ 52,570us-gaap_Revenues
/ us-gaap_StatementBusinessSegmentsAxis
= us-gaap_SalesRevenueSegmentMember		 $ 41,649us-gaap_Revenues
/ us-gaap_StatementBusinessSegmentsAxis
= us-gaap_SalesRevenueSegmentMember
Sales [Member] | Percentage of Inspection Revenues [Member]    
Segment Reporting Information [Line Items]    
Concentration Risk, Percentage 54.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_PercentageOfInspectionRevenuesMember		 43.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_PercentageOfInspectionRevenuesMember
Sales [Member] | Percentage of Metrology Revenue [Member]    
Segment Reporting Information [Line Items]    
Concentration Risk, Percentage 15.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_PercentageOfMetrologyRevenueMember		 14.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_PercentageOfMetrologyRevenueMember
Sales [Member] | Percentage of Lithography Revenue [Member] [Domain]    
Segment Reporting Information [Line Items]    
Concentration Risk, Percentage 0.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_PercentageOfLithographyRevenueMemberDomain		 9.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_PercentageOfLithographyRevenueMemberDomain
Sales [Member] | Percentage of Data Analysis & Review [Member]    
Segment Reporting Information [Line Items]    
Concentration Risk, Percentage 15.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_PercentageOfDataAnalysisReviewMember		 14.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_PercentageOfDataAnalysisReviewMember
Sales [Member] | Percentage of Parts [Member]    
Segment Reporting Information [Line Items]    
Concentration Risk, Percentage 10.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_PercentageOfPartsMember		 12.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_PercentageOfPartsMember
Sales [Member] | Percentage of Service [Member]    
Segment Reporting Information [Line Items]    
Concentration Risk, Percentage 6.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_PercentageOfServiceMember		 8.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_PercentageOfServiceMember
Sales [Member] | Percentage of Total Revenue [Member]    
Segment Reporting Information [Line Items]    
Concentration Risk, Percentage 100.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_PercentageOfTotalRevenueMember		 100.00%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesMember
/ us-gaap_StatementBusinessSegmentsAxis
= rtec_PercentageOfTotalRevenueMember