Balance Sheet Details - Other Non-Current Liabilities (Details) (USD $) In Thousands, unless otherwise specified	Mar. 31, 2015	Dec. 31, 2014
Other Non-current Liabilities [Abstract]
Unrecognized Tax Benefits	$ 3,196us-gaap_UnrecognizedTaxBenefits	$ 3,178us-gaap_UnrecognizedTaxBenefits
Contingent consideration - Acquisition non-current liability	3,873	3,797
Other Liabilities	2,122us-gaap_OtherLiabilities	1,695us-gaap_OtherLiabilities
Other Liabilities, Noncurrent	$ 9,191us-gaap_OtherLiabilitiesNoncurrent	$ 8,670us-gaap_OtherLiabilitiesNoncurrent

Amount of non-current liability recognized arising from contingent consideration in a business combination.

No definition available.

Name:	rtec_ContingentconsiderationAcquisitionnoncurrentliability
Namespace Prefix:	rtec_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Details

Name:	rtec_OtherNonCurrentLiabilitiesAbstract
Namespace Prefix:	rtec_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

The aggregate carrying amount, as of the balance sheet date, of liabilities not separately disclosed in the balance sheet.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 942

-SubTopic 210

-Section S99

-Paragraph 1

-Subparagraph (SX 210.9-03.15)

-URI http://asc.fasb.org/extlink&oid=6876686&loc=d3e534808-122878

+ Details

Name:	us-gaap_OtherLiabilities
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Aggregate carrying amount, as of the balance sheet date, of noncurrent obligations not separately disclosed in the balance sheet. Noncurrent liabilities are expected to be paid after one year (or the normal operating cycle, if longer).

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 210

-SubTopic 10

-Section S99

-Paragraph 1

-Subparagraph (SX 210.5-02.24)

-URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682

+ Details

Name:	us-gaap_OtherLiabilitiesNoncurrent
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of unrecognized tax benefits pertaining to uncertain tax positions taken in tax returns.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Glossary Unrecognized Tax Benefit

-URI http://asc.fasb.org/extlink&oid=6527854

Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 740

-SubTopic 10

-Section 50

-Paragraph 15A

-Subparagraph (a)

-URI http://asc.fasb.org/extlink&oid=6907707&loc=SL6600010-109319

+ Details

Name:	us-gaap_UnrecognizedTaxBenefits
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant