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Balance Sheet Details Other Current Liabilities (Details) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014	Dec. 31, 2013
Balance Sheet Details [Abstract]
Estimated Litigation Liability, Current	$ 3,252us-gaap_LitigationReserveCurrent	$ 4,293us-gaap_LitigationReserveCurrent
Business Combination, Contingent Consideration, Liability, Current	1,267	868
Other Current Liabilities Subtotal	5,624rtec_OtherCurrentLiabilitiesSubtotal	4,971rtec_OtherCurrentLiabilitiesSubtotal
Other Liabilities, Current	$ 10,143us-gaap_OtherLiabilitiesCurrent	$ 10,132us-gaap_OtherLiabilitiesCurrent

Aggregate carrying amount of current liabilities (due within one year or within the normal operating cycle if longer) not separately disclosed in the balance sheet. Includes costs that are statutory in nature, are incurred on contractual obligations, or accumulate over time and for which invoices have not yet been received or will not be rendered and of liabilities not separately disclosed.

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