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Balance Sheet Details Property Plant & Equipment (Details) (USD $)
In Thousands, unless otherwise specified
12 Months Ended
Dec. 31, 2014
Dec. 31, 2013
Dec. 31, 2012
Balance Sheet Details [Abstract]      
Buildings and Land Gross $ 5,024rtec_BuildingsAndLandGross $ 5,024rtec_BuildingsAndLandGross  
Machinery and Equipment, Gross 20,277us-gaap_MachineryAndEquipmentGross 20,827us-gaap_MachineryAndEquipmentGross  
Furniture and Fixtures, Gross 3,387us-gaap_FurnitureAndFixturesGross 4,043us-gaap_FurnitureAndFixturesGross  
Computer Equipments And Software Gross 5,819rtec_ComputerEquipmentsAndSoftwareGross 5,568rtec_ComputerEquipmentsAndSoftwareGross  
Leasehold Improvements, Gross 7,774us-gaap_LeaseholdImprovementsGross 7,744us-gaap_LeaseholdImprovementsGross  
Property, Plant and Equipment, Gross 42,281us-gaap_PropertyPlantAndEquipmentGross 43,206us-gaap_PropertyPlantAndEquipmentGross  
Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment (29,343)us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment (30,148)us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment  
Property, Plant and Equipment, Net 12,938us-gaap_PropertyPlantAndEquipmentNet 13,058us-gaap_PropertyPlantAndEquipmentNet  
Depreciation 4,686us-gaap_Depreciation 4,150us-gaap_Depreciation 3,680us-gaap_Depreciation
Property, Plant and Equipment, Transfers and Changes $ 2,631us-gaap_PropertyPlantAndEquipmentTransfersAndChanges