Name:	rtec_RestrictedstockunitsexcludedfromComputationofdilutedlosspershare
Namespace Prefix:	rtec_
Data Type:	xbrli:sharesItemType
Balance Type:	na
Period Type:	duration

- Details

Name:	rtec_ShareRepurchaseProgramAbstract
Namespace Prefix:	rtec_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

Average price paid per share for the purchase of the targeted number of shares, determined by an average market price over a fixed period of time.

No definition available.

Name:	rtec_StockRepurchasedAndRetiredAveragePricePerShare
Namespace Prefix:	rtec_
Data Type:	num:perShareItemType
Balance Type:	na
Period Type:	duration

Number of shares that have been repurchased and retired during the period.

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher SEC

-Name Regulation S-X (SX)

-Number 210

-Section 04

-Article 3

Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 505

-SubTopic 10

-Section 50

-Paragraph 2

-URI http://asc.fasb.org/extlink&oid=6928386&loc=d3e21463-112644

Reference 3: http://www.xbrl.org/2003/role/presentationRef

-Publisher SEC

-Name Regulation S-X (SX)

-Number 210

-Section 02

-Paragraph 29, 30

-Article 5

Name:	us-gaap_StockRepurchasedAndRetiredDuringPeriodShares
Namespace Prefix:	us-gaap_
Data Type:	xbrli:sharesItemType
Balance Type:	na
Period Type:	duration

Equity impact of the value of stock that has been repurchased and retired during the period. The excess of the purchase price over par value can be charged against retained earnings (once the excess is fully allocated to additional paid in capital).

Name:	us-gaap_StockRepurchasedAndRetiredDuringPeriodValue
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

The number of shares authorized to be repurchased by an entity's Board of Directors under a stock repurchase plan.

No definition available.

Name:	us-gaap_StockRepurchaseProgramNumberOfSharesAuthorizedToBeRepurchased
Namespace Prefix:	us-gaap_
Data Type:	xbrli:sharesItemType
Balance Type:	na
Period Type:	instant

The remaining number of shares authorized to be repurchased by an entity's Board of Directors under a stock repurchase plan.

No definition available.