Legal Matters (Details) (USD $) In Thousands, unless otherwise specified	0 Months Ended	6 Months Ended
Jul. 22, 2014	Jun. 30, 2014	Jul. 22, 2014
Commitments and Contingencies [Abstract]
Loss Contingency, Damages Awarded, Value		$ 15,475
significant change in litigation accrual		9,622
Estimated Litigation Liability		13,833	3,250
Payments for Legal Settlements	$ 10,613

Name:	rtec_CommitmentsAndContingenciesAbstract
Namespace Prefix:	rtec_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

Material change in the estimated litigation liability amount since the prior balance sheet date, other than a change resulting from pay-down of the obligation.

+ References

No definition available.

+ Details

Name:	rtec_Significantchangeinlitigationaccrual
Namespace Prefix:	rtec_
Data Type:	xbrli:monetaryItemType
Balance Type:	na
Period Type:	duration

- Definition

Aggregate carrying amount of the estimated litigation liability for known or estimated probable loss from litigation, which may include attorneys' fees and other litigation costs.

+ References

+ Details

Name:	us-gaap_LitigationReserve
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of damages awarded to the plaintiff in the legal matter.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 450

-SubTopic 20

-Section 50

-Paragraph 1

-URI http://asc.fasb.org/extlink&oid=25496072&loc=d3e14326-108349

Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 450

-SubTopic 20

-Section 50

-Paragraph 4

-Subparagraph (a)

-URI http://asc.fasb.org/extlink&oid=25496072&loc=d3e14435-108349

Reference 3: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 450

-SubTopic 20

-Section 50

-Paragraph 9

-Subparagraph (a)

-URI http://asc.fasb.org/extlink&oid=25496072&loc=d3e14557-108349

+ Details

Name:	us-gaap_LossContingencyDamagesAwardedValue
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

The amount of cash paid for the settlement of litigation or for other legal issues during the period.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 230

-SubTopic 10

-Section 45

-Paragraph 25

-Subparagraph (g)

-URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3536-108585

+ Details

Name:	us-gaap_PaymentsForLegalSettlements
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration