Segment Reporting and Geographic Information Geographic Information (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013
Segment Reporting Information [Line Items]
Revenues	$ 41,649	$ 41,650
Asia [Member]
Segment Reporting Information [Line Items]
Revenues	6,591	5,408
UNITED STATES
Segment Reporting Information [Line Items]
Revenues	9,934	9,402
TAIWAN, PROVINCE OF CHINA
Segment Reporting Information [Line Items]
Revenues	7,930	13,131
JAPAN
Segment Reporting Information [Line Items]
Revenues	1,284	2,388
CHINA
Segment Reporting Information [Line Items]
Revenues	4,830	2,748
South Korea [Domain]
Segment Reporting Information [Line Items]
Revenues	7,552	3,423
GERMANY
Segment Reporting Information [Line Items]
Revenues	1,344	2,525
Other Europe [Domain]
Segment Reporting Information [Line Items]
Revenues	2,184	2,625
Sales [Member]
Segment Reporting Information [Line Items]
Revenues	$ 41,649	$ 41,650