Commitments and Contingencies - (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended
Mar. 31, 2014	Mar. 31, 2013	Dec. 31, 2013	Dec. 31, 2012
Commitments and Contingencies [Abstract]
Standard Product Warranty Accrual	$ 1,509	$ 1,765	$ 1,551	$ 2,024
Product Warranty Accrual, Warranties Issued	481	446
Product Warranty Accrual, Payments	$ 523	$ 705

Name:	rtec_CommitmentsAndContingenciesAbstract
Namespace Prefix:	rtec_
Data Type:	xbrli:stringItemType
Balance Type:	na
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Represents the aggregate decrease in the liability related to payments to satisfy claims for standard and extended product warranties.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 460

-SubTopic 10

-Section 50

-Paragraph 8

-Subparagraph ((c)(2))

-URI http://asc.fasb.org/extlink&oid=6398077&loc=d3e12565-110249

+ Details

Name:	us-gaap_ProductWarrantyAccrualPayments
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

Represents the aggregate increase in the liability for accruals related to standard and extended product warranties issued during the reporting period.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 460

-SubTopic 10

-Section 50

-Paragraph 8

-Subparagraph ((c)(3))

-URI http://asc.fasb.org/extlink&oid=6398077&loc=d3e12565-110249

+ Details

Name:	us-gaap_ProductWarrantyAccrualWarrantiesIssued
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
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- Definition

Amount as of the balance sheet date of the aggregate standard product warranty liability. Does not include the balance for the extended product warranty liability.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 460

-SubTopic 10

-Section 50

-Paragraph 8

-Subparagraph (c)(1),(c)(5)

-URI http://asc.fasb.org/extlink&oid=6398077&loc=d3e12565-110249

+ Details

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Period Type:	instant