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Business Combination
9 Months Ended
Sep. 30, 2013
Business Combination [Abstract]  
Business Combination Disclosure [Text Block]
Business Combinations
Tamar Technology
In April 2013, the Company announced that it had acquired specific assets of Tamar Technology, located in Newbury Park, California (Tamar acquisition). The Company paid $3,365 of the purchase price in cash and accrued an additional $6,198 for contingent consideration. The acquired business has been integrated into the Company’s inspection technology group.  The impact of the acquisition was not material to the Company’s consolidated financial position or results of operations.
Azores
In December 2012, the Company announced that it had acquired Azores Corporation, located in Wilmington, Massachusetts (Azores acquisition). The acquired business marks the Company's entry into the advanced packaging and flat panel display lithography markets and forms the Company’s lithography systems group. The impact of the acquisition was not material to the Company’s consolidated financial position or results of operations.
The Company made a preliminary allocation of the purchase price to the assets acquired and liabilities assumed as of the acquisition date for the Azores acquisition and the Tamar acquisition. For the period ended September 30, 2013, the Company finalized the purchase price allocation for Azores, with the exception of taxes, and recorded adjustments to goodwill and inventory. The Company recast its December 31, 2012 balance sheet to reflect these adjustments. The Company will finalize its analysis of the remaining purchase price allocation within the measurement period, not to exceed one year from the date of the acquisition, and therefore additional adjustments may occur.