Segment Reporting and Geographic Information Geographic Information (Details) (USD $)	3 Months Ended		9 Months Ended
	Sep. 30, 2013	Sep. 30, 2012	Sep. 30, 2013	Sep. 30, 2012
Segment Reporting Information [Line Items]
Revenues	$ 44,044,000	$ 62,152,000	$ 131,753,000	$ 164,187,000
UNITED STATES
Segment Reporting Information [Line Items]
Revenues	13,484,000	7,621,000	32,962,000	25,758,000
Taiwan [Member]
Segment Reporting Information [Line Items]
Revenues	11,136,000	24,827,000	43,757,000	48,761,000
JAPAN
Segment Reporting Information [Line Items]
Revenues	2,345,000	4,834,000	6,052,000	10,235,000
CHINA
Segment Reporting Information [Line Items]
Revenues	4,015,000	3,723,000	11,284,000	9,713,000
South Korea [Domain]
Segment Reporting Information [Line Items]
Revenues	1,928,000	4,707,000	6,995,000	30,042,000
Segment, Geographical, Groups of Countries, Group One [Member]
Segment Reporting Information [Line Items]
Revenues	5,552,000	9,413,000	14,127,000	19,415,000
Austria [Domain]
Segment Reporting Information [Line Items]
Revenues	128,000	2,169,000	588,000	9,749,000
GERMANY
Segment Reporting Information [Line Items]
Revenues	1,771,000	1,401,000	4,242,000	3,142,000
Segment, Geographical, Groups of Countries, Group Two [Member]
Segment Reporting Information [Line Items]
Revenues	3,685,000	3,457,000	11,746,000	7,372,000
Sales [Member]
Segment Reporting Information [Line Items]
Revenues	$ 44,044,000	$ 62,152,000	$ 131,753,000	$ 164,187,000