Segment Reporting and Geographic Information - (Tables)

9 Months Ended

Sep. 30, 2013

Segment Reporting and Geographic Information [Abstract]

Schedule of revenue from external customers by Products and Services [Table Text Block]

The following table lists the different sources of revenue:

	Three Months Ended								Nine Months Ended
	September 30,								September 30,
	2013				2012				2013				2012
Systems and Software:
Inspection	$	21,734	49	%	$	42,415	68	%	$	73,441	55	%	$	99,220	60	%
Metrology	5,470		12	%	6,892		11	%	11,627		9	%	25,911		16	%
Lithography	3,618		8	%	—		—	%	7,318		6	%	—		—	%
Data Analysis and Review	4,724		11	%	5,082		8	%	13,737		10	%	15,213		9	%
Parts	5,235		12	%	4,838		8	%	16,036		13	%	15,488		10	%
Services	3,263		8	%	2,925		5	%	9,594		7	%	8,355		5	%
Total revenue	$	44,044	100	%	$	62,152	100	%	$	131,753	100	%	$	164,187	100	%

Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block]

For geographical revenue reporting, revenues are attributed to the geographic location in which the product is shipped.  Revenue by geographic region is as follows:

	Three Months Ended				Nine Months Ended
	September 30,				September 30,
	2013		2012		2013		2012
United States	$	13,484	$	7,621	$	32,962	$	25,758
Taiwan	11,136		24,827		43,757		48,761
Japan	2,345		4,834		6,052		10,235
China	4,015		3,723		11,284		9,713
South Korea	1,928		4,707		6,995		30,042
Other Asia	5,552		9,413		14,127		19,415
Austria	128		2,169		588		9,749
Germany	1,771		1,401		4,242		3,142
Other Europe	3,685		3,457		11,746		7,372
Total revenue	$	44,044	$	62,152	$	131,753	$	164,187

Schedule of Revenue by Major Customers by Reporting Segments [Table Text Block]

Customers comprising 10% or more of revenue:

	Nine Months Ended
	September 30,
	2013		2012
Customer A	13.0	%	6.4	%
Customer B	11.2	%	8.2	%
Customer C	8.9	%	10.3	%
Customer D	1.9	%	12.1	%
Customer E	0.8	%	11.8	%