Segment Reporting and Geographic Information Geographic Information (Details) (USD $)	3 Months Ended		6 Months Ended
	Jun. 30, 2013	Jun. 30, 2012	Jun. 30, 2013	Jun. 30, 2012
Segment Reporting Information [Line Items]
Revenues	$ 46,059,000	$ 56,326,000	$ 87,709,000	$ 102,035,000
UNITED STATES
Segment Reporting Information [Line Items]
Revenues	10,077,000	8,783,000	19,478,000	18,137,000
Taiwan [Member]
Segment Reporting Information [Line Items]
Revenues	19,490,000	15,269,000	32,621,000	23,934,000
JAPAN
Segment Reporting Information [Line Items]
Revenues	1,319,000	4,007,000	3,707,000	5,401,000
CHINA
Segment Reporting Information [Line Items]
Revenues	4,520,000	4,076,000	7,269,000	5,989,000
South Korea [Domain]
Segment Reporting Information [Line Items]
Revenues	1,644,000	10,842,000	5,067,000	25,334,000
Segment, Geographical, Groups of Countries, Group One [Member]
Segment Reporting Information [Line Items]
Revenues	3,167,000	4,899,000	8,575,000	10,003,000
Austria [Domain]
Segment Reporting Information [Line Items]
Revenues	174,000	4,982,000	460,000	7,580,000
GERMANY
Segment Reporting Information [Line Items]
Revenues	1,550,000	1,368,000	4,075,000	1,741,000
Segment, Geographical, Groups of Countries, Group Two [Member]
Segment Reporting Information [Line Items]
Revenues	4,118,000	2,100,000	6,457,000	3,916,000
Sales [Member]
Segment Reporting Information [Line Items]
Revenues	$ 46,059,000	$ 56,326,000	$ 87,709,000	$ 102,035,000