Segment Reporting and Geographic Information Geographic Information (Details) (USD $)	3 Months Ended
	Mar. 31, 2013	Mar. 31, 2012
Segment Reporting Information [Line Items]
Revenues	$ 41,650,000	$ 45,709,000
UNITED STATES
Segment Reporting Information [Line Items]
Revenues	9,402,000	9,355,000
Taiwan [Member]
Segment Reporting Information [Line Items]
Revenues	13,131,000	8,665,000
JAPAN
Segment Reporting Information [Line Items]
Revenues	2,388,000	1,393,000
CHINA
Segment Reporting Information [Line Items]
Revenues	2,748,000	1,913,000
South Korea [Domain]
Segment Reporting Information [Line Items]
Revenues	3,423,000	14,492,000
Segment, Geographical, Groups of Countries, Group One [Member]
Segment Reporting Information [Line Items]
Revenues	5,408,000	5,104,000
Austria [Domain]
Segment Reporting Information [Line Items]
Revenues	286,000	2,598,000
GERMANY
Segment Reporting Information [Line Items]
Revenues	2,525,000	373,000
Segment, Geographical, Groups of Countries, Group Two [Member]
Segment Reporting Information [Line Items]
Revenues	2,339,000	1,816,000
Sales [Member]
Segment Reporting Information [Line Items]
Revenues	$ 41,650,000	$ 45,709,000