Commitments and Contingencies Letter of Credit (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended
Mar. 31, 2013
Loss Contingencies [Line Items]
MaximumCapacityToGuaranteeUnderExistingLettersOfCredit	$ 40,000

Maximum capacity to guarantee under all existing letters of credit without consideration of any amounts that could be guaranteed or the amounts currently outstanding under the letters of credit.

No definition available.

Name:	rtec_Maximumcapacitytoguaranteeunderexistinglettersofcredit
Namespace Prefix:	rtec_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration