Subsequent Event (Notes)

3 Months Ended

Mar. 31, 2013

Subsequent Events [Abstract]

Subsequent Events [Text Block]

Subsequent Event

Subsequent to March 31, 2013 and through the Company’s financial statement issuance date of May 3, 2013, the Company announced on April 26, 2013 that it had purchased selected assets, including a strong patent portfolio, relating to metrology capability from Tamar Technology, Newbury Park, California. The Company paid a portion of the total transaction value upfront with cash on-hand. The asset purchase agreement includes an earn-out contingency that, if met, would bring the total transaction value to approximately $10,000. The addition of Tamar’s advanced metrology technologies to Rudolph’s existing inspection and metrology systems will allow the Company to address the emerging need for fast, precise three-dimensional (3D) measurement capabilities in the rapidly-growing advanced packaging market sector. The impact of the acquisition is not expected to be material to the Company’s consolidated financial position.