Statement of Cash Flows (USD $) In Thousands, unless otherwise specified	12 Months Ended
Dec. 31, 2012	Dec. 31, 2011	Dec. 31, 2010
Net Cash Provided by (Used in) Operating Activities [Abstract]
Net Income (Loss) Attributable to Parent	$ 43,865	$ 25,226	$ 27,015
Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]
Amortization	2,212	2,113	2,069
Amortization of Financing Costs and Discounts	2,736	1,129	0
Depreciation	3,680	4,210	3,706
Foreign Currency Transaction Gain (Loss), before Tax	482	(846)	255
Increase (Decrease) in Marketable Securities, Restricted	0	(1)	0
Share-based Compensation	4,001	4,802	5,439
Provision for doubtful accounts and inventory valuation	3,263	1,278	(1,188)
Increase (Decrease) in Deferred Income Taxes	(20,814)	(9,018)	(152)
Change in operating assets and liabilities [Abstract]
Increase (Decrease) in Accounts Receivable	(14,743)	17,958	(23,428)
Increase (Decrease) in Income Taxes Receivable	3,547	(529)	2,300
Increase (Decrease) in Inventories	(6,701)	(35)	(5,577)
Increase (Decrease) in Prepaid Expense and Other Assets	(1,365)	(4,389)	(113)
Increase (Decrease) in Accounts Payable	(2,735)	(3,427)	2,183
Increase (Decrease) in Accrued Liabilities	1,682	1,083	2,671
Increase (Decrease) in Deferred Revenue	3,648	(1,330)	948
Increase (Decrease) in Other Current Liabilities	(990)	5,720	802
Increase (Decrease) in Other Noncurrent Liabilities	299	1,500	(608)
Net Cash Provided by (Used in) Operating Activities	22,067	45,444	16,322
Payments to Acquire Marketable Securities	(96,309)	(81,004)	(7,823)
Proceeds from Sale and Maturity of Marketable Securities	102,384	11,418	10,261
Payments to Acquire Property, Plant, and Equipment	(2,429)	(1,622)	(4,363)
Payments to Acquire Businesses, Net of Cash Acquired	(18,580)	0	(849)
Net Cash Provided by (Used in) Investing Activities	(14,934)	(71,208)	(2,774)
Proceeds from Convertible Debt	0	57,749	0
Proceeds from Issuance of Warrants	0	7,007	0
Payments for (Proceeds from) Derivative Instrument, Financing Activities	0	(14,507)	0
Proceeds from Issuance of Shares under Incentive and Share-based Compensation Plans, Including Stock Options	257	257	289
Excess Tax Benefit (Tax Deficiency) from Share-based Compensation, Financing Activities	211	528	242
Net Cash Provided by (Used in) Financing Activities	468	51,034	531
Effect of Exchange Rate on Cash and Cash Equivalents	(19)	281	(798)
Cash and Cash Equivalents, Period Increase (Decrease)	7,582	25,551	13,281
Cash and Cash Equivalents, at Carrying Value	104,253	96,671	71,120
Income Taxes Paid	2,402	2,454	916
Interest Paid	$ 2,188	$ 0	$ 0

Name:	rtec_ChangeInOperatingAssetsAndLiabilitiesAbstract
Namespace Prefix:	rtec_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

Amount of the current period expense charged against operations, the offset which is generally to the allowance for doubtful accounts for the purpose of reducing receivables, including notes receivable, to an amount that approximates their net realizable value (the amount expected to be collected). Also includes the amount of the valuation account as of the balance sheet date which reduces the carrying amount of inventory to net realizable value; takes into consideration such factors as market value, excessive quantities based on expected sales, technological obsolescence, and shrinkage.