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Business Combination
6 Months Ended
Jun. 30, 2012
Business Combination [Abstract]  
Business Combination Disclosure [Text Block]
Business Combinations
On June 21, 2012, the Company announced that it had acquired specific assets and liabilities of NanoPhotonics GmbH, located in Mainz, Germany. The acquired business will be integrated into the Company’s inspection technology group.  The impact of the acquisition was not material to the Company’s consolidated financial position or results of operations. The Company has made a preliminary allocation of the purchase price to the assets acquired and liabilities assumed as of the acquisition date. The excess of the purchase price less the amount allocated to the net identifiable assets has been classified in goodwill. The Company expects to finalize its analysis of the intangible assets acquired within the first year of the acquisition, and therefore adjustments to goodwill and identifiable intangible assets will occur.  The results of operations of the acquired business subsequent to its acquisition have not been included in the Company’s unaudited condensed consolidated statements of operations.