Segment Reporting and Geographic Information Geographic Information (Details) (USD $)	3 Months Ended		6 Months Ended
	Jun. 30, 2012	Jun. 30, 2011	Jun. 30, 2012	Jun. 30, 2011
Segment Reporting Information [Line Items]
Revenues	$ 56,326,000	$ 51,543,000	$ 102,035,000	$ 102,142,000
UNITED STATES
Segment Reporting Information [Line Items]
Revenues	8,783,000	12,527,000	18,137,000	25,102,000
Taiwan [Member]
Segment Reporting Information [Line Items]
Revenues	15,269,000	8,385,000	23,934,000	18,533,000
JAPAN
Segment Reporting Information [Line Items]
Revenues	4,007,000	2,403,000	5,401,000	6,280,000
CHINA
Segment Reporting Information [Line Items]
Revenues	4,076,000	1,853,000	5,989,000	8,317,000
South Korea [Domain]
Segment Reporting Information [Line Items]
Revenues	10,842,000	8,358,000	25,334,000	13,910,000
Segment, Geographical, Groups of Countries, Group One [Member]
Segment Reporting Information [Line Items]
Revenues	4,899,000	6,919,000	10,003,000	9,807,000
Austria [Domain]
Segment Reporting Information [Line Items]
Revenues	4,982,000	3,665,000	7,580,000	6,666,000
GERMANY
Segment Reporting Information [Line Items]
Revenues	1,368,000	5,592,000	1,741,000	9,127,000
Segment, Geographical, Groups of Countries, Group Two [Member]
Segment Reporting Information [Line Items]
Revenues	2,100,000	1,841,000	3,916,000	4,400,000
Sales [Member]
Segment Reporting Information [Line Items]
Revenues	$ 56,326,000	$ 51,543,000	$ 102,035,000	$ 102,142,000