Segment Reporting and Geographic Information (Tables)

3 Months Ended

Mar. 31, 2012

Segment Reporting Information [Line Items]

Schedule of revenue from external customers by Products and Services [Table Text Block]

The following table lists the different sources of revenue:

	Three Months Ended
	March 31,
	2012				2011
Systems and Software:
Inspection	$	22,856	50	%	$	23,103	46	%
Metrology	10,237		22	%	12,182		24	%
Data Analysis and Review	4,547		10	%	6,147		12	%
Parts	5,504		12	%	6,240		12	%
Services	2,565		6	%	2,927		6	%
Total revenue	$	45,709	100	%	$	50,599	100	%

Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block]

For geographical revenue reporting, revenues are attributed to the geographic location in which the product is shipped.  Revenue by geographic region is as follows:

	Three Months Ended March 31,
	2012		2011
United States	$	9,355	$	12,575
Taiwan	8,665		10,148
Japan	1,393		3,877
China	1,913		6,465
South Korea	14,492		5,552
Other Asia	5,104		2,887
Austria	2,598		3,001
Germany	373		3,535
Other Europe	1,816		2,559
Total revenue	$	45,709	$	50,599

Schedule of Revenue by Major Customers by Reporting Segments [Table Text Block]

Customers comprising 10% or more of revenue:

	Three Months Ended March 31,
	2012		2011
Customer A	30.7	%	4.3	%
Customer B	10.4	%	12.4	%
Customer C	6.0	%	10.6	%