Exhibit No. 16


 May 17, 2001


 Securities and Exchange Commission
 450 Fifth Street, N.W.
 Washington, D.C. 20549

 Commissioners:

 We have read the statements made by Rudolph Technologies, Inc. (copy attached),
 which we understand will be filed with the Commission, pursuant to Item 4 of
 Form 8-K, as part of the Company's Form 8-K/A report dated April 20, 2001.  We
 agree with the statements concerning our Firm in such Form 8-K/A.

 Very truly yours,

 /s/ PricewaterhouseCoopers LLP

 PricewaterhouseCoopers LLP
 Florham Park, New Jersey