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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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<SEC-DOCUMENT>0000914190-06-000201.txt : 20060504
<SEC-HEADER>0000914190-06-000201.hdr.sgml : 20060504
<ACCEPTANCE-DATETIME>20060504110858
ACCESSION NUMBER:		0000914190-06-000201
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20060503
FILED AS OF DATE:		20060504
DATE AS OF CHANGE:		20060504

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			RUDOLPH TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001094392
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				223531208
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		PO BOX 1000
		STREET 2:		ONE RUDOLPH RD
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836
		BUSINESS PHONE:		9736911300

	MAIL ADDRESS:	
		STREET 1:		PO BOX 1000
		STREET 2:		ONE RUDOLPH RD
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			ODELL JEFFREY L
		CENTRAL INDEX KEY:			0001132353

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-27965
		FILM NUMBER:		06806611

	BUSINESS ADDRESS:	
		BUSINESS PHONE:		973-691-1300

	MAIL ADDRESS:	
		STREET 1:		C/O RUDOLPH TECHNOLOGIES, INC.
		STREET 2:		ONE RUDOLPH ROAD, PO BOX 1000
		CITY:			FLANDERS
		STATE:			NJ
		ZIP:			07836
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>edgar.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
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    <periodOfReport>2006-05-03</periodOfReport>

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            <rptOwnerState>MN</rptOwnerState>
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    <footnotes>
        <footnote id="F1">Sold pursuant to rule 10b5-1 trading plan dated February 28, 2006.</footnote>
    </footnotes>

    <remarks>This is part 1 of 2.</remarks>

    <ownerSignature>
        <signatureName>/s/ Robert K. Ranum as Attorney-in-Fact for Jeffrey L. O'Dell pursuant to Power of Attorney previously filed</signatureName>
        <signatureDate>2006-05-04</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
-----END PRIVACY-ENHANCED MESSAGE-----