Business Acquisition - Assets Acquired and Liabilities Assumed (Details) - USD ($)	6 Months Ended
	Mar. 31, 2022	Sep. 30, 2021	Sep. 17, 2021	Mar. 31, 2021	Dec. 31, 2020	Dec. 06, 2018
Business Acquisition [Line Items]
Goodwill	$ 24,510,000	$ 0		$ 0	$ 0
VAY AG
Business Acquisition [Line Items]
Cash	867,000		$ 230,000
Measurement period adjustments, cash	637,000
Accounts receivable	9,000		9,000
Measurement period adjustments, accounts receivable	0
Prepaid expenses	13,000		15,000
Measurement period adjustments, prepaid expenses	(2,000)
Deferred tax assets	59,000		58,000
Measurement period adjustments, deferred tax assets	1,000
Developed technology (included in property, plant and equipment)	3,000,000		3,000,000
Measurement period adjustments, developed technology (included in property, plant and equipment	0
Identifiable assets acquired	3,948,000		3,312,000
Measurement period adjustments, identifiable assets acquired	636,000
Accrued liabilities	909,000		187,000
Measurement period adjustments, accrued liabilities	722,000
Unearned revenue	56,000		53,000
Measurement period adjustments, unearned revenue	3,000
Deferred tax liabilities, non-current	591,000		591,000
Measurement period adjustments, deferred tax liabilities, non-current	0
Total liabilities assumed	1,556,000		831,000
Measurement period adjustments, total liabilities assumed	725,000
Net identifiable assets acquired	2,392,000		2,481,000
Measurement period adjustments, net identifiable assets acquired	(89,000)
Goodwill	24,510,000		24,508,000			$ 24,500,000
Measurement period adjustments, goodwill	2,000
Total assets acquired	26,902,000		$ 26,989,000
Measurement period adjustments, total assets acquired	$ (87,000)