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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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MIC-Info: RSA-MD5,RSA,
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<SEC-DOCUMENT>0001181431-03-027629.txt : 20031027
<SEC-HEADER>0001181431-03-027629.hdr.sgml : 20031027
<ACCEPTANCE-DATETIME>20031027160634
ACCESSION NUMBER:		0001181431-03-027629
CONFORMED SUBMISSION TYPE:	4/A
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20030213
FILED AS OF DATE:		20031027

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		55 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		9782324001

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			JENNINGS WILLIAM C
		CENTRAL INDEX KEY:			0001054752

	FILING VALUES:
		FORM TYPE:		4/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		03958663

	BUSINESS ADDRESS:	
		STREET 1:		C/O WILLIAM C. JENNINGS
		STREET 2:		317 ELM STREET
		CITY:			NEW CANAAN
		STATE:			CT
		ZIP:			06840
		BUSINESS PHONE:		203-801-9576

	MAIL ADDRESS:	
		STREET 1:		C/O AXCELIS TECHNOLOGIES INC
		STREET 2:		55 CHERRY HILL DR
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
</SEC-HEADER>
<DOCUMENT>
<TYPE>4/A
<SEQUENCE>1
<FILENAME>rrd20998.xml
<DESCRIPTION>AMEND JENNINGS FORM 4 INITIAL GRANT
<TEXT>
<XML>
<?xml version="1.0"?><ownershipDocument>
    <schemaVersion>X0201</schemaVersion>

    <documentType>4/A</documentType><periodOfReport>2003-02-13</periodOfReport><dateOfOriginalSubmission>2003-02-14</dateOfOriginalSubmission><notSubjectToSection16>0</notSubjectToSection16>
    <issuer>
        <issuerCik>0001113232</issuerCik>
        <issuerName>AXCELIS TECHNOLOGIES INC</issuerName>
        <issuerTradingSymbol>ACLS</issuerTradingSymbol></issuer><reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001054752</rptOwnerCik>
            <rptOwnerName>JENNINGS WILLIAM C</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O AXCELIS TECHNOLOGIES, INC.</rptOwnerStreet1>
            <rptOwnerStreet2>55 CHERRY HILL DRIVE</rptOwnerStreet2>
            <rptOwnerCity>BEVERLY</rptOwnerCity>
            <rptOwnerState>MA</rptOwnerState>
            <rptOwnerZipCode>01915</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
            <reportingOwnerRelationship>
<isDirector>1</isDirector><isOfficer>0</isOfficer><isTenPercentOwner>0</isTenPercentOwner><isOther>0</isOther></reportingOwnerRelationship></reportingOwner><derivativeTable><derivativeTransaction><securityTitle><value>Stock option (right to buy)</value></securityTitle><conversionOrExercisePrice><value>6.03</value></conversionOrExercisePrice><transactionDate><value>2003-02-13</value></transactionDate><transactionCoding><transactionFormType>4</transactionFormType><transactionCode>A</transactionCode><equitySwapInvolved>0</equitySwapInvolved><footnoteId id="F1"/><footnoteId id="F2"/></transactionCoding><transactionAmounts><transactionShares><value>40000</value></transactionShares><transactionPricePerShare><value>0.00</value></transactionPricePerShare><transactionAcquiredDisposedCode><value>A</value></transactionAcquiredDisposedCode></transactionAmounts><exerciseDate><value>2003-08-13</value></exerciseDate><expirationDate><value>2013-02-13</value></expirationDate><underlyingSecurity><underlyingSecurityTitle><valu
e>Common Stock</value></underlyingSecurityTitle><underlyingSecurityShares><value>40000</value></underlyingSecurityShares></underlyingSecurity><postTransactionAmounts><sharesOwnedFollowingTransaction><value>40000</value></sharesOwnedFollowingTransaction></postTransactionAmounts><ownershipNature><directOrIndirectOwnership><value>D</value></directOrIndirectOwnership></ownershipNature></derivativeTransaction></derivativeTable><footnotes><footnote id="F1">Amended to correct Transaction Code; Transaction is a stock option grant under Rule 16b-3(d).</footnote><footnote id="F2">Granted pursuant to the Axcelis Technologies, Inc. 2000 Stock Plan.</footnote></footnotes><ownerSignature><signatureName>Lynnette C. Fallon, as attorney-in-fact for William C. Jennings</signatureName><signatureDate>2003-10-27</signatureDate></ownerSignature></ownershipDocument>



</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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