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Inventories (Details) - USD ($)
$ in Thousands
Sep. 30, 2021
Dec. 31, 2020
Inventories    
Raw materials $ 26,791 $ 24,738
Work in process 30,224 24,215
Finished goods 3,668 2,562
Inventories, Total 60,683 51,515
Inventory reserve 19,200 17,700
Excess and obsolete inventory $ 61,000 $ 162,000