Exhibit 5.1



                                    November 21, 2014



Aehr Test Systems
400 Kato Terrace
Fremont, CA 94539

     Re:    Registration Statement on Form S-8

Ladies and Gentlemen:

     We have examined the Registration Statement on Form S-8 to be
filed by you with the Securities and Exchange Commission on or
about the date hereof (the "Registration Statement"), in connection
with the registration under the Securities Act of 1933, as amended,
of an aggregate of 859,941 shares of your Common Stock, par value
$0.01 per share (the "Shares"), reserved for issuance under Aehr
Test Systems 2006 Equity Incentive Plan (the "Plan"). As your legal
counsel, we have examined the proceedings taken and are familiar
with the proceedings proposed to be taken by you in connection with
the issuance and sale of the Shares to be issued under the Plan.

     It is our opinion that the Shares, when issued and sold in the
manner described in the Plan and pursuant to the agreements which
accompany the Plan, will be legally and validly issued, fully-paid
and non-assessable.

     We consent to the use of this opinion as an exhibit to the
Registration Statement, and further consent to the use of our name
wherever appearing in the Registration Statement and any amendments
thereto.



                              Very truly yours,

                              WILSON SONSINI GOODRICH & ROSATI
                              Professional Corporation

                              /s/ Wilson Sonsini Goodrich & Rosati