Exhibit 5.1



                                       November 13, 2009



Aehr Test Systems
400 Kato Terrace
Fremont, CA 94539

       Re:   Registration Statement on Form S-8

Ladies and Gentlemen:

       We have examined the Registration Statement on Form S-8 to be filed by
you with the Securities and Exchange Commission on or about November 13, 2009
(the "Registration Statement"), in connection with the registration under the
Securities Act of 1933, as amended, of an aggregate of 1,208,792 shares of
your Common Stock, par value $0.01 per share, 958,792 of which (the "Plan
Shares") are reserved for issuance under the 2006 Equity Incentive Plan (the
"Plan") and 250,000 of which (the "ESPP Shares") are reserved for issuance
under the 2006 Employee Stock Purchase Plan (the "ESPP"). As your legal
counsel, we have examined the proceedings taken and are familiar with the
proceedings proposed to be taken by you in connection with the issuance and
sale of the Plan Shares and the ESPP Shares pursuant to the Plan and the
ESPP, respectively.

       It is our opinion that, when issued and sold in the manner described
in the Plan and the ESPP and pursuant to the agreements which accompany each
grant under the Plan and the ESPP, respectively, the Plan Shares and the ESPP
Shares will be legally and validly issued, fully-paid and non-assessable.

       We consent to the use of this opinion as an exhibit to the
Registration Statement, and further consent to the use of our name wherever
appearing in the Registration Statement and any amendments thereto.



                                       Very truly yours,

                                       WILSON SONSINI GOODRICH & ROSATI
                                       Professional Corporation

                                       /s/ Wilson Sonsini Goodrich & Rosati