Restructuring Charges - Restructuring Charges (Details) $ in Thousands	3 Months Ended
	Mar. 26, 2022 USD ($)
Restructuring Cost and Reserve [Line Items]
Restructuring charges	$ 313
Probe Cards
Restructuring Cost and Reserve [Line Items]
Restructuring charges	42
Systems
Restructuring Cost and Reserve [Line Items]
Restructuring charges	271
Cost of revenues
Restructuring Cost and Reserve [Line Items]
Restructuring charges	139
Cost of revenues | Probe Cards
Restructuring Cost and Reserve [Line Items]
Restructuring charges	39
Cost of revenues | Systems
Restructuring Cost and Reserve [Line Items]
Restructuring charges	100
Research and development
Restructuring Cost and Reserve [Line Items]
Restructuring charges	146
Research and development | Probe Cards
Restructuring Cost and Reserve [Line Items]
Restructuring charges	0
Research and development | Systems
Restructuring Cost and Reserve [Line Items]
Restructuring charges	146
Selling, general and administrative
Restructuring Cost and Reserve [Line Items]
Restructuring charges	28
Selling, general and administrative | Probe Cards
Restructuring Cost and Reserve [Line Items]
Restructuring charges	3
Selling, general and administrative | Systems
Restructuring Cost and Reserve [Line Items]
Restructuring charges	$ 25