Acquisition - Intangible Assets Acquired (Details) - Cascade Microtech - USD ($) $ in Thousands	Jun. 24, 2016	Dec. 31, 2016
Business Acquisition [Line Items]
Total intangible assets	$ 149,753	$ 149,753
Intangible asset weighted average useful life	4 years 1 month 6 days
In Process Research and Development
Business Acquisition [Line Items]
Indefinite-lived intangible assets acquired	$ 12,400
Developed technologies
Business Acquisition [Line Items]
Finite-lived intangible assets acquired	$ 91,100
Intangible asset weighted average useful life	4 years 8 months 6 days
Customer relationships
Business Acquisition [Line Items]
Finite-lived intangible assets acquired	$ 23,053
Intangible asset weighted average useful life	6 years 9 months 6 days
Backlog
Business Acquisition [Line Items]
Finite-lived intangible assets acquired	$ 15,600
Intangible asset weighted average useful life	6 months 6 days
Trade name
Business Acquisition [Line Items]
Finite-lived intangible assets acquired	$ 7,600
Intangible asset weighted average useful life	3 years 6 months 6 days