Stockholders' Equity

9 Months Ended

Sep. 27, 2014

Stockholders' Equity Note [Abstract]

Stockholders' Equity

Stockholders’ Equity

Restricted Stock Units

Restricted stock unit activity under our equity incentive plans during the nine months endedSeptember 27, 2014 is set forth below:

	Units		Weighted Average Grant Date Fair Value
Restricted stock units at December 28, 2013	2,929,639		$	5.88
Awards granted	1,900,000		6.52
Awards vested	(1,175,853	)	6.42
Awards canceled	(255,801	)	6.06
Restricted stock units at September 27, 2014	3,397,985		$	6.04

On May 5, 2014, we issued 350,000 shares of restricted stock units to seven senior executives of our company that will vest based on certain market performance criteria. The performance criteria are based on the Company's Total Shareholder Return (TSR) for the period from April 1, 2014 to March 31, 2016 relative to the TSR of the companies identified as being part of the S&P Semiconductor Select Industry Index (FormFactor peer companies), as of April 1, 2014. The compensation cost will be recognized ratably over the requisite service period. During the nine months endedSeptember 27, 2014, we recorded $0.4 million of stock-based compensation expense related to these awards.

The total fair value of restricted stock units vested during the three and nine months endedSeptember 27, 2014 and September 28, 2013 was $0.2 million and $7.3 million, and $0.1 million and $3.4 million, respectively.

Stock Options

During the three and nine months endedSeptember 27, 2014 and September 28, 2013, we did not grant any stock options.