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Liabilities - Warranty (Details)
$ in Thousands
9 Months Ended
Sep. 30, 2023
USD ($)
Warranty  
Warranty period 1 year
Balance, beginning of the period $ 8,601
Warranties issued 4,580
Addition from Epiluvac acquisition 49
Consumption of reserves (5,089)
Changes in estimate 411
Balance, end of the period $ 8,552