XML 43 R33.htm IDEA: XBRL DOCUMENT v3.23.3
Business Combination - Intangible assets acquired (Details) - Epiluvac AB - USD ($)
$ in Thousands
3 Months Ended 9 Months Ended
Jan. 31, 2023
Sep. 30, 2023
Sep. 30, 2023
Intangible assets      
Intangible assets acquired, Amount $ 28,540    
Acquisition related costs   $ 100 $ 1,000
Technology      
Intangible assets      
Intangible assets acquired, Amount $ 28,020    
Intangible assets acquired, Useful life 15 years    
Customer relationship      
Intangible assets      
Intangible assets acquired, Amount $ 460    
Intangible assets acquired, Useful life 5 years    
Backlog      
Intangible assets      
Intangible assets acquired, Amount $ 60    
Intangible assets acquired, Useful life 1 year 6 months