Business Combination - Assets acquired and liabilities assumed (Details) - USD ($) $ in Thousands	Sep. 30, 2023	Jan. 31, 2023	Dec. 31, 2022
Business Combination, Recognized Identifiable Assets Acquired and Liabilities Assumed, Net [Abstract]
Goodwill	$ 214,964		$ 181,943
Epiluvac AB
Business Combination, Recognized Identifiable Assets Acquired and Liabilities Assumed, Net [Abstract]
Accounts receivable		$ 247
Inventories		391
Prepaid expense and other current assets		381
Property, plant, and equipment		736
Intangible assets		28,540
Total identifiable assets acquired		30,295
Accounts payable and accrued expenses		656
Customer deposits and deferred revenue		429
Deferred income taxes		5,723
Other liabilities		80
Total liabilities assumed		6,888
Net identifiable assets acquired		23,407
Goodwill		33,021
Net assets acquired		$ 56,428