Business Combination - Consideration (Details) $ in Thousands		3 Months Ended	9 Months Ended
	Jan. 31, 2023 USD ($)	Sep. 30, 2023 USD ($)	Sep. 30, 2023 USD ($)
Business Combination
Additional contingent consideration recognized			$ 1,167
Contingent consideration payment			2,500
Epiluvac AB
Business Combination
Cash paid, net of cash acquired	$ 30,373
Contingent consideration	26,055
Acquisition date fair value	$ 56,428
Business Combination, Contingent Consideration, Liability, Measurement Input	us-gaap:MeasurementInputDiscountRateMember
Contingent consideration measurement input	0.0554
Contingent consideration	$ 26,100	$ 24,700	24,700
Additional contingent consideration recognized		800	1,100
Contingent consideration payment		2,500
Epiluvac AB | Accrued expenses and other current liabilities
Business Combination
Contingent consideration		7,300	7,300
Epiluvac AB | Other liabilities.
Business Combination
Contingent consideration		$ 17,400	$ 17,400
Epiluvac AB | Completion of certain defined milestones
Business Combination
Contingent consideration payments, High end of range	15,000
Epiluvac AB | Percentage of orders received during defined Earn-out period
Business Combination
Contingent consideration payments, High end of range	$ 20,000
Maximum earn-out period	4 years