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Liabilities (Tables)
9 Months Ended
Sep. 30, 2023
Liabilities  
Schedule of accrued expenses and other current liabilities

September 30,

December 31,

    

2023

    

2022

(in thousands)

Payroll and related benefits

$

27,809

$

30,044

Contingent consideration

7,279

Warranty

8,552

8,601

Operating lease liabilities

3,825

3,333

Interest

3,007

2,853

Professional fees

2,047

2,102

Sales, use, and other taxes

 

5,995

 

2,027

Other

 

7,085

 

7,071

Total

$

65,599

$

56,031

Schedule of changes in product warranty reserves

(in thousands)

Balance - December 31, 2022

$

8,601

Warranties issued

 

4,580

Addition from Epiluvac acquisition

49

Consumption of reserves

 

(5,089)

Changes in estimate

 

411

Balance - September 30, 2023

$

8,552

Schedule of changes in deferred revenue

(in thousands)

Balance - December 31, 2022

 

$

16,990

Deferral of revenue

 

10,293

Recognition of unearned revenue

 

(7,259)

Balance - September 30, 2023

 

$

20,024

Schedule of carrying value of Convertible Senior Notes

September 30, 2023

December 31, 2022

  

Principal Amount

  

Unamortized
transaction costs

  

Net carrying value

  

Principal Amount

  

Unamortized
debt discount/
transaction costs

  

Net carrying value

(in thousands)

2023 Notes

$

$

$

$

20,173

$

(4)

$

20,169

2025 Notes

 

26,500

 

(124)

 

26,376

 

132,500

 

(990)

 

131,510

2027 Notes

25,000

(336)

24,664

125,000

(2,019)

122,981

2029 Notes

230,000

(6,394)

223,606

Net carrying value

$

281,500

$

(6,854)

$

274,646

$

277,673

$

(3,013)

$

274,660

Schedule of interest expense related to Convertible Senior Notes

Three months ended September 30,

Nine months ended September 30,

    

2023

    

2022

    

2023

    

2022

 

(in thousands)

Cash Interest Expense

 

  

  

  

  

Coupon interest expense - 2023 Notes

$

$

136

$

23

$

409

Coupon interest expense - 2025 Notes

232

1,159

2,128

3,478

Coupon interest expense - 2027 Notes

234

1,172

2,151

3,516

Coupon interest expense - 2029 Notes

1,653

2,406

Non-cash Interest Expense

 

 

  

 

 

  

Amortization of debt discount/transaction costs- 2023 Notes

 

 

24

 

4

 

73

Amortization of debt discount/transaction costs- 2025 Notes

25

115

218

341

Amortization of debt discount/transaction costs- 2027 Notes

22

103

197

305

Amortization of debt discount/transaction costs- 2029 Notes

264

405

Total Interest Expense

$

2,430

$

2,709

$

7,532

$

8,122