Liabilities - Warranty (Details) $ in Thousands	3 Months Ended
Mar. 31, 2023 USD ($)
Warranty
Warranty period	1 year
Balance, beginning of the period	$ 8,601
Warranties issued	1,678
Addition from Epiluvac acquisition	49
Consumption of reserves	(1,707)
Changes in estimate	82
Balance, end of the period	$ 8,703

No definition available.

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- Definition

Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 942
-SubTopic 210
-Section S99
-Paragraph 1
-Subparagraph (SX 210.9-03.15(5))
-URI https://asc.fasb.org/extlink&oid=126897435&loc=d3e534808-122878

Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 460
-SubTopic 10
-Section 50
-Paragraph 8
-Subparagraph (c)(1)
-URI https://asc.fasb.org/extlink&oid=126907703&loc=d3e12565-110249

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-Publisher FASB
-Name Accounting Standards Codification
-Topic 460
-SubTopic 10
-Section 50
-Paragraph 8
-Subparagraph (c)(5)
-URI https://asc.fasb.org/extlink&oid=126907703&loc=d3e12565-110249

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- Definition

Amount of increase in the standard and extended product warranty accrual from a business acquisition.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 460
-SubTopic 10
-Section 50
-Paragraph 8
-Subparagraph (c)
-URI https://asc.fasb.org/extlink&oid=126907703&loc=d3e12565-110249

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- Definition

Amount of decrease in the standard and extended product warranty accrual from payments made in cash or in kind to satisfy claims under the terms of the standard and extended product warranty.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 460
-SubTopic 10
-Section 50
-Paragraph 8
-Subparagraph ((c)(2))
-URI https://asc.fasb.org/extlink&oid=126907703&loc=d3e12565-110249

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- Definition

Amount of increase (decrease) in the standard and extended product warranty accrual from changes in estimates attributable to preexisting product warranties.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
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-SubTopic 10
-Section 50
-Paragraph 8
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-URI https://asc.fasb.org/extlink&oid=126907703&loc=d3e12565-110249

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- Definition

Amount of increase in the standard and extended product warranty accrual from warranties issued.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 460
-SubTopic 10
-Section 50
-Paragraph 8
-Subparagraph ((c)(3))
-URI https://asc.fasb.org/extlink&oid=126907703&loc=d3e12565-110249

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- Definition

Represents the warranty period from the date of final acceptance on the products purchased by customers.

+ References

No definition available.

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